公开(公告)号：US20130206986A1

公开(公告)日：2013-08-15

申请号：US13767822

申请日：2013-02-14

Applicant: Hitachi High-Technologies Corporation

Inventor： Makoto SUZUKI ,  Kazunari ASAO

IPC: H01J37/26

CPC classification number: H01J37/263 ,  H01J37/265 ,  H01J2237/221

Abstract: There is proposed a charged particle beam apparatus including: a plurality of noise removal filters that remove noise of an electrical signal; a measurement unit that measures the contrast-to-noise ratio after applying one of the noise removal filters; and a determination unit that determines a magnitude relationship between the contrast-to-noise ratio measured by the measurement unit and a threshold value set in advance.

Abstract translation: 提出了一种带电粒子束装置，包括：多个噪声去除滤波器，其去除电信号的噪声; 测量单元，其在应用所述噪声去除滤波器之一之后测量所述对比噪声比; 以及确定单元，其确定由测量单元测量的对比度噪声比与预先设置的阈值之间的大小关系。

公开(公告)号：US08481934B2

公开(公告)日：2013-07-09

申请号：US13107892

申请日：2011-05-14

Applicant: Makoto Ezumi ,  Satoru Iwama ,  Junichi Kakuta ,  Takahiro Sato ,  Akira Ikegami

Inventor： Makoto Ezumi ,  Satoru Iwama ,  Junichi Kakuta ,  Takahiro Sato ,  Akira Ikegami

IPC: H01J37/28

CPC classification number: H01J37/26 ,  G01N23/2251 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0048 ,  H01J2237/281

Abstract: As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first electron beam to a sample to charge the sample are proposed wherein the beam diameter of the first electron beam is made larger than the beam diameter of the second electron beam.

Abstract translation: 作为用于实现具有大纵横比的接触孔的精确观察，检查或测量的一个方面，提出了在将第一电子束扫描到样品以对样品充电之后扫描第二电子束的方法和装置，其中， 使第一电子束的直径大于第二电子束的光束直径。

公开(公告)号：US08338782B2

公开(公告)日：2012-12-25

申请号：US13217088

申请日：2011-08-24

Applicant: Uwe Luecken ,  Remco Schoenmakers ,  Frank Jeroen Pieter Schuurmans

Inventor： Uwe Luecken ,  Remco Schoenmakers ,  Frank Jeroen Pieter Schuurmans

IPC: H01J37/26 ,  G01N23/00 ,  G21K7/00

CPC classification number: H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/2446

Abstract: In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the inclusion in the data of an image artifact, such as charging or bubbling, and data including the artifact may be eliminated form the final image. CMOS detectors provide for selective read out of pixels at high data rates, allowing for real-time adaptive imaging.

Abstract translation: 在透射电子显微镜检测器系统中，从像素读出图像数据，并在图像采集期间进行分析。 图像采集过程根据分析结果进行修改。 例如，分析可以指示在图像伪像的数据中包括例如充电或冒泡，并且可以从最终图像中消除包括伪影的数据。 CMOS检测器提供以高数据速率选择性读出像素，允许实时自适应成像。

公开(公告)号：US20120199756A1

公开(公告)日：2012-08-09

申请号：US13367251

申请日：2012-02-06

Applicant: Bart Buijsse ,  Peter Christiaan Tiemeijer ,  Martinus Petrus Maria Bierhoff

Inventor： Bart Buijsse ,  Peter Christiaan Tiemeijer ,  Martinus Petrus Maria Bierhoff

IPC: H01J3/26

CPC classification number: H01J37/26 ,  H01J37/265 ,  H01J2237/1501 ,  H01J2237/2614

Abstract: A method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM) is disclosed. The TEM is equipped with an objective lens for guiding a beam of electrons to a sample, a diffraction plane in which at least a beam of unscattered electrons is focused and a structure to enhance the Contrast Transfer Function (CTF) which is situated in the diffraction plane or an image thereof.

Abstract translation: 公开了一种用于调整或对准透射电子显微镜（TEM）中的一个或多个光学元件的方法。 TEM配备有用于将电子束引导到样品的物镜，其中至少一束不散射电子被聚焦的衍射平面和用于增强位于衍射中的对比度传递函数（CTF）的结构 平面或其图像。

公开(公告)号：US08193493B2

公开(公告)日：2012-06-05

申请号：US13032050

申请日：2011-02-22

Applicant: Sayaka Tanimoto ,  Hiroya Ohta ,  Hiroshi Makino ,  Ryuichi Funatsu

Inventor： Sayaka Tanimoto ,  Hiroya Ohta ,  Hiroshi Makino ,  Ryuichi Funatsu

IPC: G01N23/00 ,  G01N23/225

CPC classification number: G01N23/225 ,  H01J37/265 ,  H01J37/28

Abstract: A charged particle beam apparatus that can achieve both high defect-detection sensitivity and high inspection speed for a sample with various properties in a multi-beam type semiconductor inspection apparatus. The allocation of the primary beam on the sample is made changeable, and furthermore, the beam allocation for performing the inspection at the optimum inspection specifications and at high speed is selected based on the property of the sample. In addition, many optical parameters and apparatus parameters are optimized. Furthermore, the properties of the selected primary beam are measured and adjusted.

Abstract translation: 一种能够实现多光束型半导体检查装置中具有各种性质的样品的高缺陷检测灵敏度和高检测速度的带电粒子束装置。 使样品上的一次光束的分配是可变的，此外，基于样品的性质选择用于以最佳检查规格和高速进行检查的光束分配。 此外，优化了许多光学参数和设备参数。 此外，测量和调整所选择的一次光束的性质。

公开(公告)号：US08191402B2

公开(公告)日：2012-06-05

申请号：US12523370

申请日：2008-07-11

Applicant: Keisuke Kishita ,  Hisashi Sakai

Inventor： Keisuke Kishita ,  Hisashi Sakai

IPC: G01N1/22

CPC classification number: G01N33/0011 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/006 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/304 ,  Y10T137/87619

Abstract: Gas is supplied from positive pressure (105 Pa or more) to an analyzer of high vacuum (10−2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and is decompressed by a decompression pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the decompressed gas is introduced to a gas analyzer through a switching operation using a gas switching valve.

Abstract translation: 气体从正压（105Pa以上）到高真空分析仪（10-2Pa以下）精确稳定地供给，同时保持条件恒定并复制条件，并在短时间内切换到所需气体 。 根据气体导入装置和方法，在混合室中合成多种气体，将合成气体导入，通过减压泵减压至0.1Pa〜0.1MPa的压力，减压气体 通过使用气体切换阀的切换操作引入气体分析器。

公开(公告)号：US08188428B2

公开(公告)日：2012-05-29

申请号：US12770244

申请日：2010-04-29

Applicant: Kohei Yamaguchi ,  Kenji Obara

Inventor： Kohei Yamaguchi ,  Kenji Obara

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/216 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495

Abstract: A technique executes autofocus adjustment stably even when a plurality of patterns or foreign matter capable of being imaged only by a specific detector are included independently. Such an image as a concavo-convex image having a weak contrast can be picked up. The technique can automatically focus such an image even when it is difficult to find a focus position in the image. A scanning electron microscope includes a plurality of detectors for detecting secondary signals from a specimen when irradiated with an electron beam, and a calculation unit for combining the signals obtained from the detectors. At least two of the detectors are provided to be symmetric with respect to the electron beam. The focus of the electron beam is adjusted based on the signals of the detectors or on a signal corresponding to a combination of the signals.

Abstract translation: 即使独立地包括仅能够由特定检测器成像的多个图案或异物也能够稳定地执行自动聚焦调整。 可以拾取这样的具有弱对比度的凹凸图像的图像。 即使在图像中难以找到焦点位置，该技术也可以自动对焦这样的图像。 扫描电子显微镜包括多个用于在用电子束照射时检测来自样本的次级信号的检测器，以及用于组合从检测器获得的信号的计算单元。 至少两个检测器被提供为相对于电子束对称。 基于检测器的信号或对应于信号的组合的信号来调整电子束的焦点。

公开(公告)号：US20120112068A1

公开(公告)日：2012-05-10

申请号：US13382396

申请日：2010-05-14

Applicant: Shusaku Maeda ,  Kouji Ishiguro

Inventor： Shusaku Maeda ,  Kouji Ishiguro

IPC: G01N23/225

CPC classification number: G01N23/2251 ,  G01B2210/56 ,  G01N2223/31 ,  G01N2223/321 ,  G01N2223/6116 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/2001 ,  H01L21/67248

Abstract: The present invention provides a charged particle beam device in which the change of expansion/contraction of a specimen which is an observing object is restricted thereby eliminating position deviation of the observing object and significantly increasing its throughput. The present invention includes specimen holding means for holding a specimen, temperature regulation means which can regulate the temperature of the specimen, and temperature regulation means control means which can control the temperature regulation means based on various conditions.

Abstract translation: 本发明提供了一种带电粒子束装置，其中作为观察对象的试样的膨胀/收缩的变化被限制，从而消除了观察对象的位置偏差并显着增加了其生产量。 本发明包括用于保持试样的试样保持装置，可调节试样的温度的温度调节装置，以及可以基于各种条件控制温度调节装置的温度调节装置控制装置。

公开(公告)号：US20120074316A1

公开(公告)日：2012-03-29

申请号：US13195927

申请日：2011-08-02

Applicant: Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Tatsuya KOHAMA ,  Kenji TERAO ,  Takeshi MURAKAMI ,  Takehide HAYASHI ,  Kiwamu TSUKAMOTO ,  Hiroshi SOBUKAWA ,  Norio KIMURA

Inventor： Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Tatsuya KOHAMA ,  Kenji TERAO ,  Takeshi MURAKAMI ,  Takehide HAYASHI ,  Kiwamu TSUKAMOTO ,  Hiroshi SOBUKAWA ,  Norio KIMURA

IPC: G01N23/20 ,  G01N23/00

CPC classification number: H01J37/22 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2817

Abstract: An electro-optical inspection apparatus is provided that is capable of preventing adhesion of dust or particles to the sample surface as much as possible. A stage (100) on which a sample (200) is placed is disposed inside a vacuum chamber (112) that can be evacuated to vacuum, and a dust collecting electrode (122) is disposed to surround a periphery of the sample (200). The dust collecting electrode (122) is applied with a voltage having the same polarity as a voltage applied to the sample (200) and an absolute value that is the same or larger than an absolute value of the voltage. Thus, because dust or particles such as particles adhere to the dust collecting electrode (122), adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber containing the stage, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied. In addition, adhesion of dust or particles can be further reduced by disposing a gap control plate (124) having a through hole (124a) at the center above the sample (200) and the dust collecting electrode (122).

Abstract translation: 提供一种电光检查装置，其能够尽可能地防止灰尘或颗粒附着到样品表面。 将其上放置有样品（200）的载物台（100）设置在能够抽真空的真空室（112）的内部，并且设置集尘电极（122）以包围样品（200）的周围， 。 集尘电极（122）施加与施加到样品（200）的电压相同极性的电压和与电压的绝对值相同或更大的绝对值。 因此，由于灰尘或颗粒例如颗粒附着在集尘电极122上，所以可以降低灰尘或颗粒对样品表面的粘附。 代替使用集尘电极，可以在包含载物台的真空室的壁上形成凹部，或者在壁上配置具有施加了预定电压的网状结构的金属板。 此外，通过在样品（200）上方的中心和集尘电极（122）设置具有通孔（124a）的间隙控制板（124），可以进一步减少灰尘或颗粒的附着。

公开(公告)号：US20120049061A1

公开(公告)日：2012-03-01

申请号：US13217088

申请日：2011-08-24

Applicant: Uwe Luecken ,  Remco Schoenmakers ,  Frank Jeroen Pieter Schuurmans

Inventor： Uwe Luecken ,  Remco Schoenmakers ,  Frank Jeroen Pieter Schuurmans

IPC: H01J37/26

CPC classification number: H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/2446

Abstract: In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the inclusion in the data of an image artifact, such as charging or bubbling, and data including the artifact may be eliminated form the final image. CMOS detectors provide for selective read out of pixels at high data rates, allowing for real-time adaptive imaging.

Abstract translation: 在透射电子显微镜检测器系统中，从像素读出图像数据，并在图像采集期间进行分析。 图像采集过程根据分析结果进行修改。 例如，分析可以指示在图像伪像的数据中包括例如充电或冒泡，并且可以从最终图像中消除包括伪影的数据。 CMOS检测器提供以高数据速率选择性读出像素，允许实时自适应成像。