公开(公告)号：US5289010A

公开(公告)日：1994-02-22

申请号：US987122

申请日：1992-12-08

Applicant: Juda L. Shohet

Inventor： Juda L. Shohet

IPC: H01J27/18 ,  H01J37/05 ,  H01J37/317

CPC classification number: H01J27/18 ,  H01J37/05 ,  H01J37/32412 ,  H01J2237/053 ,  H01J2237/31705

Abstract: Plasma source ion implantation is carried out within an evacuated chamber having a target, such as a semiconductor wafer, supported on a target stage, with pulses of high voltage applied to the target periodically to implant ions from a plasma into the target. The ions in the plasma are purified after formation of the plasma by passing the plasma through an ion cyclotron resonance system composed of excitation electrodes and ion collector electrodes surrounding an ion purification region, with a magnet providing a unidirectional magnetic field through the ion purification region. A radio frequency time varying electric field from the excitation electrodes drives unwanted ions having charge-to-mass ratios greater than or less than that of the desired ion species to resonance with the electric field. During resonance, the undesired ions are driven outwardly in expanding spirals until reaching the ion collector plates, where the unwanted ions are removed. The purified plasma is passed to a plasma implantation region within the chamber from which the desired ions are implanted into the target as pulses of voltage are applied to the target. The ion purification may be carried out in a periodic manner between the repetitive pulses of voltage that are applied to the target.

Abstract translation: 等离子体源离子注入在具有负载在目标载物台上的目标物例如半导体晶片的真空室内进行，其中周期性地向目标施加高电压的脉冲，以将离子从等离子体注入到靶中。 等离子体中的离子通过使等离子体通过由激发电极和围绕离子净化区域的离子集电极组成的离子回旋共振系统，通过离子净化区域提供单向磁场的磁体而被纯化。 来自激发电极的射频时变电场驱动具有大于或小于所需离子种类的电荷质量比的不需要的离子，使其与电场共振。 在共振期间，不需要的离子在扩展螺旋中被向外驱动，直到到达不需要的离子去除的离子收集板。 纯化的等离子体被传递到腔室内的等离子体注入区域，当将脉冲的电压施加到靶材上时，将期望的离子注入到靶中。 离子纯化可以在施加到目标的电压的重复脉冲之间以周期性方式进行。

公开(公告)号：US5185524A

公开(公告)日：1993-02-09

申请号：US699669

申请日：1991-05-14

Applicant: Simon C. Page

Inventor： Simon C. Page

IPC: H01J37/05 ,  H01J37/244 ,  H01J49/44 ,  H01J49/48

CPC classification number: H01J49/484 ,  H01J37/05

Abstract: A charged particle energy analyzer includes two hemispherical electrodes and means for developing an inverse square electric field in the gap between the two electrodes. An afocal charged particle lens arrangement is arranged to project a charged particle image of a sample into the electric field. Two baffles are disposed in the gap between the electrodes the baffles being effective to restrict the energy and angular divergence of the particles transmitted by the analyzer, the baffles being positioned so as to reduce the dependence of the energy and the orientation of the charged particles transmitted by the baffles on the position of the particles within the image. A two-dimensional detector is arranged to detect the charged particle image transmitted by the analyzer.

公开(公告)号：US5177361A

公开(公告)日：1993-01-05

申请号：US812626

申请日：1991-12-23

Applicant: Dieter Krahl ,  Hans Patzold ,  Albrecht Rilk ,  Johannes Bihr

Inventor： Dieter Krahl ,  Hans Patzold ,  Albrecht Rilk ,  Johannes Bihr

IPC: G01Q30/02 ,  H01J37/05 ,  H01J49/46

CPC classification number: H01J37/05 ,  H01J49/46

Abstract: The invention is directed to an electron energy filter which is assembled from three or four plates placed together in a sandwich-like configuration. The pole pieces are seated on the inner sides of the outer plates and attached thereto. The pole pieces can therefore be produced in pairs so that their outer surfaces match precisely. This assembly is economical and provides a precise manufacture.

Abstract translation: 本发明涉及一种电子能量过滤器，其以三明治状构造放置在一起的三个或四个板组装。 极片位于外板的内侧并附接在其上。 因此，极片可以成对地制造，使得它们的外表面精确匹配。 该组件是经济的并且提供精确的制造。

公开(公告)号：US5107111A

公开(公告)日：1992-04-21

申请号：US549414

申请日：1990-07-06

Applicant: Hiroshi Daimon ,  Shozo Ino

Inventor： Hiroshi Daimon ,  Shozo Ino

IPC: H01J49/44 ,  G01N27/62 ,  G01Q80/00 ,  H01J37/05 ,  H01J37/244 ,  H01J37/285 ,  H01J49/48

CPC classification number: H01J37/285 ,  H01J37/05 ,  H01J37/244 ,  H01J49/484 ,  H01J2237/053 ,  H01J2237/24435 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24585

Abstract: A charged particle analyzer comprises a spherical grid, a spherical electrode concentric with each other, an emission portion for emitting charged particles, a screen plate having an exit opening, a plurality of second spherical grids forming a high pass filter for the charged particles, a detector for detecting the charged particles, and an obstacle ring being in parallel with an equatorial plane normal to a line connecting the emission portion and the center of the exit opening and being within the spherical electrode.

Abstract translation: 带电粒子分析仪包括球形网格，彼此同心的球形电极，用于发射带电粒子的发射部分，具有出射开口的筛板，形成用于带电粒子的高通滤波器的多个第二球形网格， 用于检测带电粒子的检测器，以及与平行于连接发射部分和出口的中心并在球形电极内的线的赤道平面平行的障碍环。

公开(公告)号：US4810883A

公开(公告)日：1989-03-07

申请号：US6712

申请日：1987-01-29

Applicant: David W. Turner

Inventor： David W. Turner

IPC: H01J37/05 ,  H01J49/46

CPC classification number: B82Y15/00 ,  H01J37/05 ,  H01J49/46

Abstract: A device for providing an energy filtered charged particle image particularly an electron image in the form of an electron energy analyzer which acts as a band-pass filter whilst maintaining the spatial integrity of the electron image in a uniform magnetic field. It embodies new electron optical properties wherein image electrons injected parallel to the magnetic field are guided, using crossed electrostatic and magnetic fields, to a low-pass electron mirror and then through a high-pass retardation filter. Non-uniform electrostatic deflection fields are used to compensate for the energy-dependent dispersion of the crossed fields whereby it is possible to correct for image distortion resulting from such dispersion.

Abstract translation: PCT No.PCT / GB86 / 00298 Sec。 371日期1987年1月29日 102（e）日期1987年1月29日PCT申请日1986年5月30日PCT公布。 出版物WO86 / 07188 日期为1986年12月4日。一种用于提供能量过滤的带电粒子图像的装置，特别是电子能量分析仪形式的电子图像，其作为带通滤光器，同时将电子图像的空间完整性保持在均匀的磁 领域。 它体现了新的电子光学特性，其中平行于磁场的图像电子使用交叉的静电场和磁场被引导到低通电子镜，然后通过高通延迟滤波器。 使用非均匀的静电偏转场来补偿交叉场的能量相关色散，由此可以校正由这种色散引起的图像失真。

公开(公告)号：US4808821A

公开(公告)日：1989-02-28

申请号：US874498

申请日：1986-06-16

Applicant: Hans-Peter Feuerbaum ,  Juergen Frosien

Inventor： Hans-Peter Feuerbaum ,  Juergen Frosien

IPC: H01J37/28 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01R31/28 ,  G01R31/305 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J37/26 ,  H01J49/06 ,  H01J49/44 ,  H01J49/48 ,  H01J37/05

CPC classification number: H01J49/06 ,  G01R31/305 ,  H01J37/1474 ,  H01J37/268 ,  H01J49/488

Abstract: A spectrometer objective is composed of a short focal length, asymmetrical objective lens comprising an integrated electrostatic opposing field spectrometer and a single-stage deflection system arranged within the magnetic lens. Since the deflection of primary electrons occurs within the spectrometer objective, the space for a two-state deflection system employed in conventional systems between a condenser lens and an objective lens can be eliminated. The extremely-short structural length of the electron beam measuring apparatus which is thereby obtainable, in turn, has a beneficial effect on the influence of the lateral Boersch effect on probe diameter, this influence increasing with the length of the electron-optical beam path.

Abstract translation: 光谱仪物镜由包括集成静电相对场光谱仪的短焦距不对称物镜和布置在磁透镜内的单级偏转系统组成。 由于一次电子的偏转发生在光谱仪物镜内，因此可以消除在聚光透镜和物镜之间的常规系统中采用的两状态偏转系统的空间。 由此可以获得电子束测量装置的极短的结构长度，对横向Boersch效应对探针直径的影响具有有益的影响，这种影响随着电子束光路的长度而增加。

公开(公告)号：US4760261A

公开(公告)日：1988-07-26

申请号：US907043

申请日：1986-09-12

Applicant: Harald Rose ,  Stefan Lanio

Inventor： Harald Rose ,  Stefan Lanio

IPC: H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H05B31/26 ,  G21K1/08

CPC classification number: H01J37/05

Abstract: An image forming alpha filter having pole pieces with straight edges is disclosed which has good local resolution and very good energy resolution. It includes three deflection regions, which are separated from one another by relatively large interspaces.

Abstract translation: 公开了具有良好的局部分辨率和非常好的能量分辨率的具有直边缘极片的图像形成α滤光器。 它包括三个偏转区域，它们通过相对较大的间隙彼此分开。

公开(公告)号：US4683376A

公开(公告)日：1987-07-28

申请号：US773863

申请日：1985-09-09

Applicant: Hans-Peter Feuerbaum

Inventor： Hans-Peter Feuerbaum

IPC: G01R19/00 ,  G01Q30/02 ,  G01R31/302 ,  G01R31/305 ,  H01J37/05 ,  H01J37/26 ,  G01N23/00

CPC classification number: H01J37/05 ,  G01R31/305 ,  H01J37/268

Abstract: An electrostatic opposing field spectrometer has an extraction electrode (AN) and an opposing field electrode arrangement with a pair of planar opposing field electrodes (EG1 and EG2) mounted to an outer electrode part (EM) at either end of a truncated conical shaped bore extending therethrough, where the smaller opening of the bore is in the direction of the extraction electrode (AN). The planar opposing field electrodes (EG1 and EG2), in conjunction with the bore surface, generates substantially spherical equi-potential lines (A1 and A2) which transmit a larger solid angle distribution of secondary electrons (SE) triggered at a measuring point (M) on the specimen surface (PR).

Abstract translation: 静电相对场光谱仪具有提取电极（AN）和相对的场电极装置，其具有一对平面相对的场电极（EG1和EG2），其安装到在截锥形孔延伸的任一端的外电极部分（EM） 其中孔的较小开口沿着提取电极（AN）的方向。 平面相对的场电极（EG1和EG2）与孔表面一起产生基本上球形的等电位线（A1和A2），其传播在测量点（M）处触发的二次电子（SE）的较大立体角分布 ）在样品表面（PR）上。

公开(公告)号：US4634931A

公开(公告)日：1987-01-06

申请号：US636996

申请日：1984-08-02

Applicant: Shunroku Taya ,  Susumu Kozasa

Inventor： Shunroku Taya ,  Susumu Kozasa

IPC: H01J37/05 ,  H01J37/30 ,  H01J37/317 ,  H01J49/20 ,  H01J49/30 ,  H01L21/265 ,  H01J7/24 ,  H05B31/26

CPC classification number: H01J37/3007 ,  H01J37/3171

Abstract: Ions emitted from an ion source are dispersed by a dispersion means, and those ions of a predetermined mass number are extracted from the thus-dispersed ions and are selectively implanted into a sample. A plane of incidence of ions in the mass-dispersing means is so formed that the angle of incidence of ions thereon has a negative value, and a plane of emission of ions therein is so formed that the angle of emission of ions of the predetermined mass number therefrom has a positive value.

Abstract translation: 从离子源发出的离子通过分散装置分散，从这样分散的离子中提取出预定质量的离子，并选择性地将其注入到样品中。 质量分散装置中的离子入射面被形成为使得其上的离子的入射角具有负值，并且其中的离子的发射面形成为使得预定质量的离子的发射角 其数量为正值。

公开(公告)号：US4053808A

公开(公告)日：1977-10-11

申请号：US741376

申请日：1976-11-12

Applicant: Jack Peacock

Inventor： Jack Peacock

IPC: G01N23/00 ,  G21K1/02 ,  G21K1/04 ,  H01J21/14 ,  H01J37/05 ,  H01J29/02

CPC classification number: G21K1/02 ,  H01J21/14

Abstract: An electron beam collimator formed by two pairs of multi-leaved corner plates connected by slideable members permitting the dimensions of the collimator to be altered.