公开(公告)号：US08976433B2

公开(公告)日：2015-03-10

申请号：US13328255

申请日：2011-12-16

Applicant: Takahiro Masumura

Inventor： Takahiro Masumura

IPC: G03H1/12 ,  G03H1/04 ,  G01N21/00 ,  G01N21/47 ,  G01N21/64 ,  G02B21/00 ,  G02B26/06 ,  G03H1/00

CPC classification number: G03H1/0443 ,  G01N21/00 ,  G01N21/4795 ,  G01N21/6456 ,  G01N2201/0675 ,  G02B21/0032 ,  G02B21/0052 ,  G02B21/0056 ,  G02B26/06 ,  G03H2001/0072 ,  G03H2001/0083 ,  G03H2001/0447 ,  G03H2001/0458 ,  G03H2001/0467

Abstract: An apparatus includes a low-coherent light source configured to emit an electromagnetic wave; a spatial light modulator configured to modulate a wavefront of the electromagnetic wave; an interferometer including a movable mirror to set a depth of a medium to be irradiated by the electromagnetic wave and a beam splitter configured to the electromagnetic wave into a reference beam and an object beam; a detector to detect information about an interference pattern formed by the object beam coming from the medium via the beam splitter and the reference beam reflected by the movable mirror; and a controller configured to control the spatial light modulator, based on the information, to form a modulated wavefront for irradiating the medium.

Abstract translation: 一种装置，包括配置成发射电磁波的低相干光源; 配置为调制所述电磁波的波前的空间光调制器; 干涉仪，包括可移动反射镜，用于设置要被电磁波照射的介质的深度;以及分配器，其配置成电磁波到参考光束和物体光束中; 检测器，用于检测由通过分束器的来自介质的物体束形成的干涉图案和由可移动镜反射的参考光束的信息; 以及控制器，其被配置为基于所述信息来控制所述空间光调制器，以形成用于照射所述介质的调制波阵面。

公开(公告)号：US20140204385A1

公开(公告)日：2014-07-24

申请号：US14021822

申请日：2013-09-09

Applicant: Bing OUYANG ,  Fraser DALGLEISH ,  Anni DALGLEISH

Inventor： Bing OUYANG ,  Fraser DALGLEISH ,  Anni DALGLEISH

IPC: G01N21/55

CPC classification number: G01N21/55 ,  G01N21/47 ,  G01N21/49 ,  G01N2021/1793 ,  G01N2201/0675

Abstract: A sensing system is provided that includes a transmitter assembly with a light source and a microdisplay device, wherein the transmitter assembly defines an optical beam transmission path to provide illumination of a substantially one-dimensional (1D) region of a target area, the microdisplay device comprising a plurality of controllable elements for causing the illumination to be a substantially 1D pattern of light along the 1D region. The system further includes a receiver assembly for defining a return optical signal transmission path from the 1D region and collecting return optical signals from the 1D region. The system also includes a processing component for generating sensor information associated with the 1D region by processing the return optical signals from the 1D region with return optical signals from adjacent 1D regions using a distributed compressive sensing (DCS) technique.

Abstract translation: 提供了一种感测系统，其包括具有光源和微型显示装置的发射器组件，其中发射器组件限定光束传输路径以提供目标区域的基本上一维（1D）区域的照明，微显示器件 包括多个可控元件，用于使得照明是沿1D区域的大致1D图案的光。 该系统还包括用于从1D区域定义返回光信号传输路径并收集来自1D区域的返回光信号的接收器组件。 该系统还包括用于通过使用分布式压缩感测（DCS）技术处理来自1D区域的返回光信号和来自相邻1D区域的返回光信号来产生与1D区域相关联的传感器信息的处理部件。

公开(公告)号：US08451450B2

公开(公告)日：2013-05-28

申请号：US12880543

申请日：2010-09-13

Applicant: Xin Heng

Inventor： Xin Heng

IPC: G01B9/021

CPC classification number: A61B18/203 ,  A61B2018/00452 ,  A61B2018/00642 ,  A61B2018/00779 ,  G01N21/4795 ,  G01N2201/0675 ,  G02B26/06 ,  G03H1/0443 ,  G03H1/2294 ,  G03H2001/0072

Abstract: An optical system and associated method enable near real time optical phase conjugation. In the method, a translucent medium is illuminated by a sample illumination beam. Light scattered by the medium is directed to an electronic image sensor while a reference beam is also directed to the electronic image sensor. The scattered light and the reference beam form an interference pattern at the electronic image sensor. A digital representation of the interference pattern is recorded using the electronic image sensor, and the characteristics of a conjugate of the sample beam are computed from the numerical representation. A conjugate beam having the computed characteristics is generated using a configurable optical element and directed back to the translucent medium. The generation of the conjugate beam may be accomplished using a spatial light modulator.

Abstract translation: 光学系统和相关联的方法实现近实时光学相位共轭。 在该方法中，半透明介质由样本照明光束照射。 由介质散射的光被引导到电子图像传感器，而参考光束也被引导到电子图像传感器。 散射光和参考光束在电子图像传感器处形成干涉图案。 使用电子图像传感器记录干涉图案的数字表示，并且从数字表示计算样本波束的共轭的特征。 使用可配置光学元件产生具有计算特性的共轭光束并且被引导回到半透明介质。 可以使用空间光调制器来实现共轭光的产生。

公开(公告)号：US20120307257A1

公开(公告)日：2012-12-06

申请号：US13577883

申请日：2011-01-27

Applicant: Minoru Yoshii ,  Eiichi Fujii

Inventor： Minoru Yoshii ,  Eiichi Fujii

IPC: G02F1/11 ,  G02B26/00 ,  G02B26/02 ,  G01B9/02 ,  H01S3/13

CPC classification number: H01S3/1055 ,  A61B5/0066 ,  G01J3/10 ,  G01N21/4795 ,  G01N2201/0675 ,  H01S3/08009 ,  H01S3/08013 ,  H01S3/0805 ,  H01S3/0812 ,  H01S3/105 ,  H01S3/1068 ,  H01S5/141 ,  H01S5/146

Abstract: The present invention provides a light source apparatus capable of producing stable oscillation and performing high-speed wavelength sweeping over a desired wavelength range.A swept light source apparatus in which oscillation wavelength is continuously changeable is provided. The apparatus includes, inside a resonator, an optical amplification medium that amplifies light, a first device configured to disperse light emitted from the optical amplification medium and thus produce beams having different wavelengths, a second device functioning as a non-focusing optical element and configured to collimate the beams having different wavelengths resulting from the dispersion by the first device, and a selecting device configured to select a beam having a specific wavelength from among the beams collimated by the second device. The beam having the specific wavelength selected by the selecting device is fed back to the optical amplification medium.

Abstract translation: 本发明提供能够产生稳定振荡并且在期望的波长范围内执行高速波长扫描的光源装置。 提供振荡波长连续变化的扫掠光源装置。 该装置在谐振器内包括放大光的光放大介质，配置成分散从光放大介质发射的光并因此产生具有不同波长的光束的第一器件，用作非聚焦光学元件的第二器件， 准直由第一装置的色散产生的具有不同波长的光束;以及选择装置，被配置为从由第二装置准直的光束中选择具有特定波长的光束。 具有由选择装置选择的特定波长的光束被反馈到光放大介质。

公开(公告)号：US20110222068A1

公开(公告)日：2011-09-15

申请号：US12880543

申请日：2010-09-13

Applicant: Xin Heng

Inventor： Xin Heng

IPC: G01B9/021

CPC classification number: A61B18/203 ,  A61B2018/00452 ,  A61B2018/00642 ,  A61B2018/00779 ,  G01N21/4795 ,  G01N2201/0675 ,  G02B26/06 ,  G03H1/0443 ,  G03H1/2294 ,  G03H2001/0072

Abstract: An optical system and associated method enable near real time optical phase conjugation. In the method, a translucent medium is illuminated by a sample illumination beam. Light scattered by the medium is directed to an electronic image sensor while a reference beam is also directed to the electronic image sensor. The scattered light and the reference beam form an interference pattern at the electronic image sensor. A digital representation of the interference pattern is recorded using the electronic image sensor, and the characteristics of a conjugate of the sample beam are computed from the numerical representation. A conjugate beam having the computed characteristics is generated using a configurable optical element and directed back to the translucent medium. The generation of the conjugate beam may be accomplished using a spatial light modulator.

Abstract translation: 光学系统和相关联的方法实现近实时光学相位共轭。 在该方法中，半透明介质由样本照明光束照射。 由介质散射的光被引导到电子图像传感器，而参考光束也被引导到电子图像传感器。 散射光和参考光束在电子图像传感器处形成干涉图案。 使用电子图像传感器记录干涉图案的数字表示，并且从数字表示计算样本波束的共轭的特征。 使用可配置光学元件产生具有计算特性的共轭光束并且被引导回到半透明介质。 可以使用空间光调制器来实现共轭光的产生。

公开(公告)号：US07973921B2

公开(公告)日：2011-07-05

申请号：US12145708

申请日：2008-06-25

Applicant: Shai Silberstein ,  Tsafrir Avni

Inventor： Shai Silberstein ,  Tsafrir Avni

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/9503 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2201/067 ,  G01N2201/0675 ,  G01N2201/0697 ,  G01N2201/1241

Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体，其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如，当工具检查晶片管芯中的存储器区域和外围特征时，可以增加或减小照明强度。 在一些实施例中，调整可以基于在预检查设置顺序期间获得的数据，其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

公开(公告)号：US20110122404A1

公开(公告)日：2011-05-26

申请号：US13003725

申请日：2009-07-21

Applicant: David Fisch ,  Yigal Katzir

Inventor： David Fisch ,  Yigal Katzir

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N2021/8825 ,  G01N2021/9513 ,  G01N2021/95638 ,  G01N2201/062 ,  G01N2201/0675

Abstract: A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.

Abstract translation: 描述了一种使用区域传感器（或线传感器）的机器视觉系统的新架构，其具有远心成像光学复合物与远心照明模块。 照明模块可以包括明场照明源和/或暗场照明源。 远心成像光学器件包括具有孔径光阑的上成像模块和位于上成像模块和物体之间的下成像模块，使得光源和孔径光阑位于下成像模块的后焦平面中。 下部成像模块将照明源成像到上部成像模块的孔径光阑的平面内。 上成像模块的光轴相对于下成像模块偏移。 远心照明模块的光轴相对于下成像模块的轴线在相反方向上偏移。

公开(公告)号：US20070009148A1

公开(公告)日：2007-01-11

申请号：US11160707

申请日：2005-07-06

Applicant: Gernot Brasen ,  Christian Laue ,  Matthias Loeffler ,  Heiko Theuer

Inventor： Gernot Brasen ,  Christian Laue ,  Matthias Loeffler ,  Heiko Theuer

IPC: G06K9/00

CPC classification number: G01N21/95607 ,  G01N2201/0675 ,  H01L21/67288

Abstract: The present invention provides a method, an optical inspection apparatus as well as a computer program product for optical inspection of a surface. The optical inspection apparatus can be effectively applied for optical inspection of periodic structures on e.g. a semi-conductor wafer for the purpose of quality control. By effectively splitting a light beam into a plurality of spatially separated light beams and by selective usage of these light beams, various surface segments of the surface can be inspected simultaneously by superposition of respective images. A resulting superposition image can then be compared with a reference image for detection of defects of the surface.

Abstract translation: 本发明提供一种光学检查装置以及用于光学检查表面的计算机程序产品的方法。 光学检查装置可以有效地应用于例如周期性结构的光学检查。 半导体晶片，用于质量控制。 通过将光束有效地分割成多个空间分离的光束并且通过选择性地使用这些光束，可以通过叠加各个图像同时检查表面的各种表面段。 然后可以将所得到的叠加图像与用于检测表面缺陷的参考图像进行比较。

公开(公告)号：US07041998B2

公开(公告)日：2006-05-09

申请号：US10396760

申请日：2003-03-24

Applicant: Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

Inventor： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

IPC: G01N21/86 ,  G01N21/00

CPC classification number: G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

Abstract: In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

Abstract translation: 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

公开(公告)号：US06969857B2

公开(公告)日：2005-11-29

申请号：US10753614

申请日：2004-01-08

Applicant: Thomas E. Owen

Inventor： Thomas E. Owen

IPC: G01J3/427 ,  G01N20060101 ,  G01N21/05 ,  G01N21/31 ,  G01N21/35 ,  G01N21/61 ,  G01N33/00

CPC classification number: G01N21/3518 ,  G01J3/0232 ,  G01J3/427 ,  G01N21/05 ,  G01N21/314 ,  G01N21/3504 ,  G01N21/61 ,  G01N33/004 ,  G01N33/0054 ,  G01N2021/3125 ,  G01N2021/3137 ,  G01N2201/0675 ,  G01N2201/1211 ,  G01N2201/1218 ,  Y02A50/244 ,  Y02A50/246

Abstract: A gas sensor, whose chamber uses filters and choppers in either a semicircular geometry or annular geometry, and incorporates separate infrared radiation filters and optical choppers. This configuration facilitates the use of a single infrared radiation source and a single detector for infrared measurements at two wavelengths, such that measurement errors may be compensated.

Abstract translation: 气体传感器，其室使用半圆形几何形状或环形几何形状的过滤器和斩波器，并且包含单独的红外辐射滤波器和光学切割器。 这种配置有助于在两个波长处使用单个红外辐射源和单个检测器用于红外测量，从而可以补偿测量误差。