Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof
    72.
    发明授权
    Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof 有权
    有机抗反射涂料聚合物,抗反射涂料组合物及其制备方法

    公开(公告)号:US06582883B2

    公开(公告)日:2003-06-24

    申请号:US09891029

    申请日:2001-06-25

    IPC分类号: G03C176

    摘要: An organic anti-reflective polymer having the following Formula 1, its preparation method, an anti-reflective coating composition comprising the said organic anti-reflective polymer and a preparation method of an anti-reflective coating made therefrom. The anti-reflective coating comprising the polymer eliminates standing waves caused by the optical properties of lower layers on the wafer and by the thickness changes of the photoresist, prevents back reflection and CD alteration caused by the diffracted and reflected light from such lower layers. Such advantages enable the formation of stable ultrafine patterns suitable for 64M, 256M, 1G, 4G, and 16G DRAM semiconductor devices and improve the production yields. Another advantage is the ability to control the k value.

    摘要翻译: 具有下列通式1的有机抗反射聚合物,其制备方法,包含所述有机抗反射聚合物的抗反射涂料组合物和由其制备的抗反射涂层的制备方法。 包含该聚合物的抗反射涂层消除了由晶片上的下层的光学性质引起的驻波以及光致抗蚀剂的厚度变化,从而防止由这种较低层衍射的和反射的光引起的背反射和CD变化。 这样的优点使得能够形成适合于64M,256M,1G,4G和16G DRAM半导体器件的稳定超细格局,并提高了产量。 另一个优点是能够控制k值。

    Active energy beam curable composition and printed wiring board
    73.
    发明申请
    Active energy beam curable composition and printed wiring board 失效
    活性能量束固化组合物和印刷线路板

    公开(公告)号:US20020115739A1

    公开(公告)日:2002-08-22

    申请号:US09782381

    申请日:2001-02-12

    摘要: There is provided an active energy beam curable composition, which is useful for forming a solder resist film for a printed wiring board, which can be developed through an ultraviolet exposure and a dilute alkali aqueous solution, and is excellent in heat resistance, adhesivity and chemical resistance. There is also proposed a printed wiring board provided with a cured film of such an active energy beam curable composition. This composition is featured in that it comprises not only an active energy beam curable vinyl copolymer modified resin wherein an epoxy compound having an ethylenic unsaturated group is added to a copolymer comprising styrene, (metha)acrylic acid, and, as an optional component, (metha)acrylate; but also an active energy beam curable bisphenol type epoxyacrylate resin.

    摘要翻译: 提供了一种活性能量束固化组合物,其可用于形成可通过紫外线曝光和稀碱水溶液显影的印刷线路板的阻焊膜,并且具有优异的耐热性,粘合性和化学性 抵抗性。 还提出了一种设置有这种活性能量束固化组合物的固化膜的印刷线路板。 该组合物的特征在于,其不仅包含活性能量束可固化乙烯基共聚物改性树脂,其中将具有烯属不饱和基团的环氧化合物加入到包含苯乙烯,(甲基)丙烯酸和作为任选组分的共聚物中( 甲基)丙烯酸酯; 而且是活性能量束可固化双酚型环氧丙烯酸酯树脂。

    Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof
    74.
    发明申请
    Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof 有权
    有机抗反射涂料聚合物,抗反射涂料组合物及其制备方法

    公开(公告)号:US20020093069A1

    公开(公告)日:2002-07-18

    申请号:US09891029

    申请日:2001-06-25

    IPC分类号: H01L031/0232

    摘要: An organic anti-reflective polymer having the following Formula 1, its preparation method, an anti-reflective coating composition comprising the said organic anti-reflective polymer and a preparation method of an anti-reflective coating made therefrom. The anti-reflective coating comprising the polymer eliminates standing waves caused by the optical properties of lower layers on the wafer and by the thickness changes of the photoresist, prevents back reflection and CD alteration caused by the diffracted and reflected light from such lower layers. Such advantages enable the formation of stable ultrafine patterns suitable for 64M, 256M, 1 G, 4 G, and 16 G DRAM semiconductor devices and improve the production yields. Another advantage is the ability to control the k value. 1

    摘要翻译: 具有下列通式1的有机抗反射聚合物,其制备方法,包含所述有机抗反射聚合物的抗反射涂料组合物和由其制备的抗反射涂层的制备方法。 包含该聚合物的抗反射涂层消除了由晶片上的下层的光学性质引起的驻波以及光致抗蚀剂的厚度变化,从而防止由这种较低层衍射的和反射的光引起的背反射和CD变化。 这样的优点使得能够形成适合于64M,256M,1G,4G和16G DRAM半导体器件的稳定的超细格局,并提高了产量。 另一个优点是能够控制k值。

    Process for the preparation of powder coating compositions
    76.
    发明申请
    Process for the preparation of powder coating compositions 失效
    粉末涂料组合物的制备方法

    公开(公告)号:US20020052456A1

    公开(公告)日:2002-05-02

    申请号:US09935619

    申请日:2001-08-23

    摘要: The invention relates to a method of preparation for polymers, particularly binders for powder coatings and powder coatings which are prepared as a solution in a supercritical fluid phase. Binders for powder coatings are prepared from at least two ethylenically unsaturated monomers capable of free-radical or ionic copolymerization, and conventional initiators and regulators in supercritical fluids, whereby polymerization is carried out in the homogeneous phase, and, after the reaction has ended, either the composition or the phase parameters of the mixture are altered so that at least two phases with supercritical fluid are obtained, and the phase containing predominantly polymer is separated and the polymer is separated as a powder from the sc fluid by depressurization or the polymer phase is further processed under supercritical phase conditions to the powder coating.

    摘要翻译: 本发明涉及一种制备聚合物的方法,特别是制备为在超临界流体相中的溶液的粉末涂料和粉末涂料的粘合剂。 用于粉末涂料的粘合剂由至少两种能够进行自由基或离子共聚的烯键式不饱和单体和超临界流体中的常规引发剂和调节剂制备,其中聚合在均相中进行,反应结束后, 改变混合物的组成或相参数,使得获得具有超临界流体的至少两相,并且主要包含聚合物的相分离,并且通过减压将聚合物作为粉末与sc流体分离,或者聚合物相是 在超临界相条件下进一步加工成粉末涂料。

    Cationically polymerizable pigmented composition
    78.
    发明授权
    Cationically polymerizable pigmented composition 失效
    阳离子聚合着色组合物

    公开(公告)号:US6166100A

    公开(公告)日:2000-12-26

    申请号:US358418

    申请日:1999-07-22

    摘要: A cationically polymerizable pigmented composition comprising (A) a cationically polymerizable binder component containing at least one resin or compound selected from the group consisting of (A-1) a cationically polymerizable acrylic resin consisting of a copolymer of (a) a (meth) acrylic ester monomer having C.sub.6-31 aliphatic hydrocarbon group, (b) a polymerizable unsaturated monomer containing a polymerizable unsaturated group and at least one cationically polymerizable moiety selected from the group consisting of an epoxy group and an oxetane ring, and optionally (c) other polymerizable unsaturated monomer, and (A-2) a fatty acid-modified epoxy compound containing C.sub.6-32 aliphatic hydrocarbon group and epoxy group, (B) a cationic polymerization initiator initiating polymerization by irradiation or heating, and (C) a color pigment.

    摘要翻译: 一种阳离子聚合性着色组​​合物,其包含(A)含有至少一种选自(A-1)由(a)(甲基)丙烯酸类的共聚物组成的阳离子聚合性丙烯酸树脂的树脂或化合物的阳离子聚合性粘合剂成分 (b)含有可聚合不饱和基团的可聚合不饱和单体和至少一种选自环氧基和氧杂环丁烷环的阳离子可聚合部分,和(c)其它可聚合的 不饱和单体和(A-2)含有C 6〜32脂肪族烃基和环氧基的脂肪酸改性环氧化合物,(B)阳离子聚合引发剂通过照射或加热引发聚合,和(C)着色颜料。