Abstract:
An immersion exposure system 1 performs an exposure process through a liquid 301 provided between an optical element of a projection optical means 121 and a substrate 111. The immersion exposure system 1 includes a liquid supply section 80 which supplies the liquid 301, an exposure section to which the liquid 301 (301b) supplied from the liquid supply section 80 is continuously introduced along a specific direction and which performs an exposure process in a state in which a space between the optical element of the projection optical means 121 and the substrate 111 is filled with the liquid 301, a liquid recovery section 90 which recovers the liquid 301 (301a) passed through the exposure section 110 at a symmetrical position against the substrate 111, and a liquid recycling section 20 which recycles the liquid 301 (301c) recovered by the liquid recovery section 90. The properties of the immersion exposure liquid can be stabilized when applying an immersion method, whereby exposure can be advantageously and continuously performed, and running cost can be reduced.
Abstract:
The present invention provides compounds for modulating protein kinase enzymatic activity for modulating cellular activities such as proliferation, differentiation, programmed cell death, migration and chemoinvasion. More specifically, the invention provides quinazolines and quinolines which inhibit, regulate, and/or modulate kinase receptor, particularly c-Met, KDF, c-Kit, flt-3 and flt-4, signal transduction pathways related to the changes in cellular activities as mentioned above, compositions which contain these compounds, and methods of using them to treat kinase-dependent diseases and conditions. The present invention also provides methods for making compounds as mentioned above, and compositions which contain these compounds.
Abstract:
The present invention provides steam reforming catalyst compositions containing Pd and Zn, and methods of steam reforming alcohols over a catalyst. Surprisingly superior results and properties of the present invention, including low temperature activity and/or low carbon monoxide output, are also described. Methods of making a steam reforming catalyst are also provided.
Abstract:
Methods for producing alcohols from CO or CO2 and H2 utilizing a palladium-zinc on alumina catalyst are described. Methods of synthesizing alcohols over various catalysts in microchannels are also described. Ethanol, higher alcohols, and other C2+ oxygenates can produced utilizing Rh—Mn or a Fisher-Tropsch catalyst.
Abstract:
A method for treating a saturated hydrocarbon compound suitable as a liquid for the immersion exposure method excelling in transmission in the deep ultraviolet region using sulfuric acid in an amount smaller than in a conventional method is provided. The above sulfuric acid washing treatment is the method for producing saturated hydrocarbon compound intended to reduce the absorbance, wherein the second sulfuric acid washing treatment step is conducted after the first sulfuric acid washing treatment step at a temperature 10° C. or more lower than the temperature of the first sulfuric acid washing treatment step. The absorbance of light with a wavelength of 193 nm of the saturated hydrocarbon compound to be treated in the above second sulfuric acid washing treatment step is 0.10 or less per 1 cm of a liquid optical path length, and the above saturated hydrocarbon compound is an alicyclic saturated hydrocarbon compound.
Abstract:
An ink bottle assembly for use with an ink supply system, the ink bottle assembly including a main body and a cap assembly. The main body includes a neck having at least one first ramped feature, such as a ramped ridge. The cap assembly includes a shell secured to the neck and a tip slidably secured to the shell. The shell includes a second ramped feature, wherein the second ramped feature is allowed to pass over the first ramped feature in a first direction, and wherein the second ramped feature abuts against the first ramped feature in a second direction, thereby precluding movement in the second direction.
Abstract:
The invention provides novel acid generators which are unproblematic in combustibility and accumulation inside the human body and can generate acids having high acidities and high boiling points and exhibiting properly short diffusion lengths in resist coating films and which permit the formation of resist patterns excellent smoothness with little dependence on the denseness of a mask pattern; sulfonic acids generated from the acid generators; sulfonyl halides useful as raw material in the synthesis of the acid generators; and radiation-sensitive resin compositions containing the acid generators. The acid generators have structures represented by the general formula (I), wherein R1 is a monovalent substituent such as alkoxycarbonyl, alkylsulfonyl, or alkoxysulfonyl, R2 to R4 are each hydrogen or alkyl; k is an integer of 0 or above; and n is an integer of 0 to 5. Among the radiation-sensitive resin compositions, a positive one contains a resin having acid-dissociable groups in addition to the above acid generator, while a negative one contains an alkali-soluble resin and a crosslinking agent in addition to the acid generator.
Abstract:
An embodiment of this invention provides a circuit and method for reducing the number of electronic components needed to calibrate circuits on an IC. A multiplexer is located on the IC where the outputs of a plurality of circuits located on the IC are each connected to a separate data input of the multiplexer. The control input of the multiplexer selects which data input of the multiplexer is connected to an external component. Each data input is individually connected to the component periodically.
Abstract:
A system and method for integrating a plurality of subcircuit grids in a simulation environment. Upon obtaining a subcircuit layer of a particular granularity for each logical component of an electrical entity (e.g., a semiconductor die in a package and board environment), the nodes of a first subcircuit layer are interconnected to the nodes of a second subcircuit layer using a constraint-based search process.
Abstract:
The present invention is directed to the preparation of photoresist polymers via living free radical polymerization techniques. Sterically bulky ester monomers are utilized as the polymerization components. Use of chain transfer agents is included in polymerization processing conditions. Cleavage of polymer terminal end groups that include a heteroatom are described.