PROXIMITY SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

    公开(公告)号:US20190086202A1

    公开(公告)日:2019-03-21

    申请号:US15769999

    申请日:2016-10-25

    IPC分类号: G01B13/12 G01L11/02 G03F9/00

    摘要: A gas gauge proximity sensor comprising a measurement gas flow channel having an optical pressure sensor for comparing a pressure of the first gas flow and a reference pressure; the optical pressure sensor comprising a first optical cavity fluidly connected to the measurement channel and a second optical cavity fluidly connected to the reference pressure, with the optical cavities being configured to receive electromagnetic radiation and output reflected electromagnetic radiation, the optical pressure sensor further being configured to combine the reflected electromagnetic radiation from the first optical cavity with the reflected electromagnetic radiation from the second optical cavity and determine, based on the combined electromagnetic radiation, a pressure difference between the pressure of the first gas flow and the reference pressure and determine, based on the pressure difference, a distance between the measurement outlet and the measurement object.

    PRESSURE MEASURING DEVICE
    54.
    发明申请

    公开(公告)号:US20180238758A1

    公开(公告)日:2018-08-23

    申请号:US15764847

    申请日:2016-09-29

    申请人: Holger BLUM

    发明人: Holger BLUM

    IPC分类号: G01L11/02 G01L19/14 G01L19/00

    摘要: The invention refers to a pressure-measuring device for converting a mechanical or hydraulic pressurization in a measuring signal and for forwarding the measuring signal to a remote evaluation unit. The invention distinguishes by a fastening device (1) for fastening the pressure-measuring device to a machine housing of a motor or a pump, a transmitter head (4) which is arranged on a measuring device head (3) of the pressure measuring device and which is to be connected to a light source via a first optical fiber (25), a receiver head (5) which is arranged on the measuring device head (3) of the pressure measuring device and which is arranged opposite to the transmitter head (4) to receive the light emitted by the transmitter head (4) via a light path in the measuring device head (3) and to be connected to the evaluation unit via a second optical fiber (26), and a measuring element (14), which in case of a mechanical or hydraulic pressure is displaceable on the measuring device head (3) into the light path between the transmitter head (4) and the receiver head (5).