公开(公告)号：US08082800B2

公开(公告)日：2011-12-27

申请号：US12755007

申请日：2010-04-06

Applicant: Victor Alexandrovich Kalinin

Inventor： Victor Alexandrovich Kalinin

IPC: G01N29/04

CPC classification number: G01L3/10 ,  G01L1/165

Abstract: A contactless SAW based torque and temperature sensor comprising a first (2) and second (3) SAW resonator provided on a substrate made of Y+34° cut of quartz. The first SAW resonator (2) has its principle axis inclined at +45° to the X-axis of the substrate, which, in use is either aligned with the longitudinal axis of the device who torque is to be measured or is perpendicular thereto, and the second SAW (3) has its principle axis inclined at −45° to the X-axis of the substrate. A third SAW (4) has its principle axis inclined at an angle of 30 degrees to the X-axis of the substrate. Each said SAW resonator (2,3,4) is formed by laying a film of aluminum on the substrate having a thickness (h) and the SAW resonators have an average operating wavelength λ where the ratio h/λ is in the range 0.021 to 0.032.

Abstract translation: 一种非接触SAW的扭矩和温度传感器，包括设置在由Y + 34°石英切割的基板上的第一（2）和第二（3）SAW谐振器。 第一SAW谐振器（2）的主轴线相对于基板的X轴倾斜+ 45°，在使用中它与要测量或垂直于扭矩的装置的纵向轴线对齐， 并且第二SAW（3）的主轴相对于基板的X轴倾斜-45°。 第三SAW（4）的主轴与基板的X轴倾斜30度。 每个所述SAW谐振器（2,3,4）通过在具有厚度（h）的衬底上铺设铝膜而形成，并且SAW谐振器具有平均工作波长λ，其中比率h /λ在0.021至 0.032。

公开(公告)号：US20110073474A1

公开(公告)日：2011-03-31

申请号：US12700307

申请日：2010-02-04

Applicant: Eun Chol CHO ,  Hun Joo LEE ,  Soo Suk LEE

Inventor： Eun Chol CHO ,  Hun Joo LEE ,  Soo Suk LEE

IPC: G01N27/26 ,  H01L41/04

CPC classification number: H01L41/1132 ,  G01L1/165 ,  G01L9/0025 ,  G01N29/022 ,  G01N2291/0256 ,  G01N2291/0423

Abstract: A surface acoustic wave device, including: a piezoelectric substrate; an interdigitated transducer electrode disposed on the substrate; an oxide film disposed on surface of the interdigitated transducer electrode; and a hydrophobic film disposed on a surface of the oxide film.

Abstract translation: 一种表面声波装置，包括：压电基板; 设置在所述基板上的叉指传感器电极; 设置在交叉换能器电极的表面上的氧化膜; 以及设置在氧化物膜的表面上的疏水性膜。

公开(公告)号：US07886607B2

公开(公告)日：2011-02-15

申请号：US12260128

申请日：2008-10-29

Applicant: Thomas Fink ,  Raymond Lohr

Inventor： Thomas Fink ,  Raymond Lohr

IPC: G01L13/02

CPC classification number: G01L1/165 ,  G01L1/2287 ,  G01L3/10

Abstract: The invention relates to a package for a strain sensor. The package includes a base part (10) from a strain hardened material, a central part (20) from an annealed material which carries glass fritted leadthroughs, and a lid part (30), wherein the base part, the central part and the lid part are made from austenitic stainless steel AISI 304L as well as a method for producing such a package.

Abstract translation: 本发明涉及应变传感器的包装。 所述包装包括来自应变硬化材料的基底部分（10），来自承载玻璃熔结引线的退火材料的中心部分（20）和盖部分（30），其中所述基部，中心部分和盖 部件由奥氏体不锈钢AISI 304L制成，以及制造这种包装的方法。

公开(公告)号：US20090115010A1

公开(公告)日：2009-05-07

申请号：US12260128

申请日：2008-10-29

Applicant: Thomas Fink ,  Raymond Lohr

Inventor： Thomas Fink ,  Raymond Lohr

IPC: H01L29/84 ,  H01L21/50

CPC classification number: G01L1/165 ,  G01L1/2287 ,  G01L3/10

Abstract: The invention relates to a package for a strain sensor. The package includes a base part (10) from a strain hardened material, a central part (20) from an annealed material which carries glass fritted leadthroughs, and a lid part (30), wherein the base part, the central part and the lid part are made from austenitic stainless steel AISI 304L as well as a method for producing such a package.

Abstract translation: 本发明涉及应变传感器的包装。 所述包装包括来自应变硬化材料的基底部分（10），来自承载玻璃熔结引线的退火材料的中心部分（20）和盖部分（30），其中所述基部，中心部分和盖 部件由奥氏体不锈钢AISI 304L制成，以及制造这种包装的方法。

公开(公告)号：US07358651B2

公开(公告)日：2008-04-15

申请号：US11109108

申请日：2005-04-18

Applicant: Richard C. Ruby ,  Graham M. Flower ,  John D. Larson, III ,  Mark A. Unkrich

Inventor： Richard C. Ruby ,  Graham M. Flower ,  John D. Larson, III ,  Mark A. Unkrich

IPC: H01L41/08

CPC classification number: G01K11/265 ,  G01L1/165 ,  G01L9/0025 ,  H03H9/0542

Abstract: An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.

Abstract translation: 一种用于检测目标环境变量（TEV）的装置和方法。 包括对目标环境变量具有第一响应的第一FBAR的第一薄膜体声波谐振器（FBAR）振荡器产生第一频率。 包括具有对目标环境变量的第二响应的第二FBAR的第二薄膜 - 体声波谐振器（FBAR）振荡器产生第二频率。 耦合到第一FBAR振荡器和第二FBAR振荡器的电路基于第一频率和第二频率来确定目标环境变量（例如，TEV的变化）。

公开(公告)号：US07267009B2

公开(公告)日：2007-09-11

申请号：US11107102

申请日：2005-04-14

Applicant: James Z T Liu ,  Michael L. Rhodes ,  Aziz Rahman

Inventor： James Z T Liu ,  Michael L. Rhodes ,  Aziz Rahman

IPC: G01H11/00 ,  G01N29/00

CPC classification number: G01L9/0025 ,  G01L1/165 ,  G01N29/022 ,  G01N2291/0256 ,  G01N2291/0422 ,  G01N2291/0423 ,  G01N2291/0426 ,  G01N2291/0427

Abstract: A multiple-mode acoustic wave sensor apparatus includes an acoustic wave device comprising a piezoelectric substrate and at least one electrode on the substrate. When such sensor is used in a wireless configuration, a plurality of antennas can be configured on the substrate in association with the acoustic wave device, wherein each antenna among the plurality of antennas is responsive to varying interrogation signals transmitted wirelessly to the plurality of antennas in order to excite multiple frequency modes via at least one interdigital transducer on the substrate and thereby passively detect multiple and varying parameters of a sensed material utilizing the acoustic wave device.

Abstract translation: 多模式声波传感器装置包括声波装置，该声波装置包括压电基片和基片上的至少一个电极。 当这种传感器用于无线配置时，可以在声波装置的基板上配置多个天线，其中多个天线中的每个天线响应于以多个天线无线方式发射的多个询问信号 通过基板上的至少一个叉指式换能器来激发多个频率模式，从而利用声波装置被动地检测感测材料的多个和变化的参数。

公开(公告)号：US20070188054A1

公开(公告)日：2007-08-16

申请号：US11352828

申请日：2006-02-13

Applicant: Randall Hasken ,  Larry Bohnert ,  Steven Magee

Inventor： Randall Hasken ,  Larry Bohnert ,  Steven Magee

IPC: H01L41/053

CPC classification number: G01D11/245 ,  B81B7/007 ,  G01D5/485 ,  G01K11/265 ,  G01L1/165 ,  G01L3/10 ,  H03H9/1092

Abstract: A sensor package generally includes a substrate and one or more sensing elements, located on a surface of the substrate. A lid, such as for example a glass cap, is coupled to the substrate such that the lid and substrate define a sealed cavity accommodating the sensing element(s). The lid has at least one conductive via or well electrically coupled to the sensing element(s) inside the cavity and arranged so as to provide an electrical connection to the exterior of the lid for connecting with external circuitry. The substrate can be a piezoelectric substrate and each sensing element can consist of an interdigital transducer such that the substrate and interdigital transducer(s) define a surface acoustic wave sensor. A surface acoustic wave sensor system for sensing torque includes the sensor package and leads wire bonded to the conductive vias for attaching the sensor package to an antenna.

Abstract translation: 传感器封装通常包括位于衬底的表面上的衬底和一个或多个感测元件。 诸如玻璃盖的盖子被耦合到基板，使得盖子和基板限定容纳感测元件的密封空腔。 盖子具有至少一个导电通孔或者电气电耦合到腔内的感测元件，并被设置成提供到盖的外部的电连接以便与外部电路连接。 衬底可以是压电衬底，并且每个感测元件可以由叉指式换能器组成，使得衬底和叉指式换能器定义声表面波传感器。 用于感测扭矩的表面声波传感器系统包括传感器封装和引线，其结合到导电通孔，用于将传感器封装附接到天线。

公开(公告)号：US20060123913A1

公开(公告)日：2006-06-15

申请号：US11016165

申请日：2004-12-15

Applicant: Brian Marsh

Inventor： Brian Marsh

IPC: G01N29/26

CPC classification number: G01L9/0025 ,  G01L1/165

Abstract: A wireless sensor is disclosed, which includes a substrate upon which the wireless sensor can be configured. The wireless sensor includes a plurality of surface acoustic wave (SAW) sensing elements configured in parallel with one another upon the substrate, wherein one or more of the SAW sensing elements is responsive to a wireless frequency range that differs from that of a wireless frequency range of at least one other SAW sensing element among the group of SAW sensing elements. It is this parallelism that permits all of the SAW sensing elements to receive the same strain when pressure is applied thereon. In doing so, the capability for three separate interrogators to measure strain is provided. At any one location, however, only one style of interrogators can be employed, rendering two of the three SAW sensing elements useless, without interfering with the one SAW sensing element that is useful in order to permit a wireless interrogation of the wireless sensor despite varying international frequency standards thereof.

Abstract translation: 公开了一种无线传感器，其包括可以配置无线传感器的基板。 无线传感器包括在衬底上彼此并联配置的多个表面声波（SAW）感测元件，其中一个或多个SAW感测元件响应于与无线频率范围不同的无线频率范围 的SAW传感元件组中的至少一个其它SAW感测元件。 正是这种平行度允许所有SAW传感元件在施加压力时承受相同的应变。 在这样做时，提供了三个独立的询问器测量应变的能力。 然而，在任何一个位置，只能使用一种型号的询问器，使三个SAW传感元件中的两个无用，而不会干扰一个SAW传感元件，该元件可用于允许无线传感器的无线询问，尽管不同 国际频率标准。

公开(公告)号：US20050056098A1

公开(公告)日：2005-03-17

申请号：US10926851

申请日：2004-08-26

Applicant: Leland Solie

Inventor： Leland Solie

IPC: G01L1/16 ,  G01L9/00 ,  G01L19/00 ,  H02N2/00

CPC classification number: G01L19/0092 ,  G01L1/165 ,  G01L9/0025

Abstract: A surface acoustic wave (SAW) sensor and an interrogator that transmits a noise source to the sensor for receiving an interrogation signal that is processed and compared to the source signal provides pressure and temperature measurements. One SAW sensor a single interdigital transducer serving as both an input and an output transducer for generating and detecting a SAW, and coded reflectors in a mirrored arrangement opposing the single interdigital transducer. The piezoelectric substrate is supported in a hermetically sealed package such that pressure on the package causes distortion of the substrate transducer surface and thus SAW velocity changes that reflect changes in pressure. Characteristic temperature coefficients of delay for the substrate are directly translated into a temperature value.

Abstract translation: 传输噪声源到传感器的表面声波（SAW）传感器和询问器，用于接收处理并与源信号比较的询问信号，提供压力和温度测量。 一个SAW传感器，用作用于产生和检测SAW的输入和输出换能器的单指数换能器，以及与单指叉换能器相对的镜像结构的编码反射器。 压电基板被支撑在密封的封装中，使得封装上的压力导致基板换能器表面的变形，并因此引起反映压力变化的SAW速度变化。 将基板的特征温度系数延迟直接转换为温度值。

公开(公告)号：US20050001511A1

公开(公告)日：2005-01-06

申请号：US10492724

申请日：2002-10-16

Applicant: Victor Kalinin ,  Mark Lee

Inventor： Victor Kalinin ,  Mark Lee

IPC: G01L1/00 ,  G01D5/48 ,  G01L1/16 ,  G01L3/10 ,  G01L19/04 ,  H01L41/08 ,  H01L41/18 ,  H03H9/02 ,  H03H9/19

CPC classification number: H03H9/02834 ,  G01D5/485 ,  G01L1/165 ,  G01L3/106

Abstract: A surface acoustic wave (SAW) sensor includes a transducer (240 provided on a substrate (23), wherein the transducer (24) is oriented on the substrate (23) so that the direction of acoustic wave propagation is such that the variation of sensor output with temperature, associated with the variation of the substrate third-elastic constants with temperature, substantially equal but opposite to the sum total of the variation of sensor output with temperature associated with the substrate linear temperature coefficient of expansion and with the variations with temperature of the substrate non-zero third order elastic constants, the substrate first-order elastic constants and the substrate density. The effect of temperature variation on sensor output is thereby minimized. This is achieved with a 35-degree arrangement or with reflective gratings inclined at an angle of 3.1 degrees to normal. Additionally, a robust package with a dish is given. Particular applications include the measurement of torque.

Abstract translation: 表面声波（SAW）传感器包括换能器（240），其设置在基板（23）上，其中换能器（24）定向在基板（23）上，使得声波传播的方向使得传感器 与温度的输出相关联的第三弹性常数与温度的变化相关，基本上等于但与传感器输出的变化与基板线性温度系数膨胀的温度的变化总和相反， 衬底非零三阶弹性常数，衬底一级弹性常数和衬底密度，因此温度变化对传感器输出的影响最小化，这是通过35度布置或反射光栅倾斜于 角度为3.1度至正常值，另外，还提供了一个带有盘的坚固的包装，具体应用包括测量o f扭矩。