公开(公告)号：US20230113008A1

公开(公告)日：2023-04-13

申请号：US17796323

申请日：2021-01-22

Applicant: UNIVERSITÄT BASEL

Inventor： Brendan SHIELDS ,  Natascha HEDRICH ,  Patrick MALETINSKY

IPC: G01Q70/10 ,  C30B29/04 ,  C30B33/12 ,  C30B33/04 ,  G01Q60/54 ,  G01Q70/14 ,  G01Q70/16

Abstract: A diamond scanning element, especially for an imaging application, includes a support and a pillar extending from the support. The pillar has a longitudinal axis and the pillar includes a tip with a tapered lateral section with a, preferably constantly, increasing curvature. The tip includes a sensor element, which is a defect, and a flat end facet extending toward the axis with a gradient of less than 10%.

公开(公告)号：US11480588B2

公开(公告)日：2022-10-25

申请号：US16765382

申请日：2018-11-13

Applicant: Nanotools GMBH

Inventor： Bernd Irmer

IPC: G01Q30/04 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q70/16

Abstract: The invention relates to a method for providing a probe device for scanning probe microscopy, in particular for atomic force microscopy, wherein a scanning probe microscope is used for measuring a sample by means of a tip which is arranged on a cantilever of the probe device and which has a tip geometry. According to the invention, in a step upstream of the manufacturing process producing the tip, the tip geometry is optimized based on a selected tip basic form with regard to defined, required measurement properties, by computer simulating and evaluating the tip geometry, and modifying the tip geometry according to the evaluation with regard to these measurement properties. The invention further relates to a probe device for scanning probe microscopy, in particular for atomic force microscopy, having a cantilever and a tip formed on the cantilever in the nanometer range, with which samples to be measured can be scanned.

公开(公告)号：US11237188B2

公开(公告)日：2022-02-01

申请号：US16041731

申请日：2018-07-20

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US20210318351A9

公开(公告)日：2021-10-14

申请号：US16765382

申请日：2018-11-13

Applicant: Nanotools GMBH

Inventor： Bernd Irmer

IPC: G01Q30/04 ,  G01Q70/16 ,  G01Q70/10

Abstract: The invention relates to a method for providing a probe device for scanning probe microscopy, in particular for atomic force microscopy, wherein a scanning probe microscope is used for measuring a sample by means of a tip which is arranged on a cantilever of the probe device and which has a tip geometry. According to the invention, in a step upstream of the manufacturing process producing the tip, the tip geometry is optimized based on a selected tip basic form with regard to defined, required measurement properties, by computer simulating and evaluating the tip geometry, and modifying the tip geometry according to the evaluation with regard to these measurement properties. The invention further relates to a probe device for scanning probe microscopy, in particular for atomic force microscopy, having a cantilever and a tip formed on the cantilever in the nanometer range, with which samples to be measured can be scanned.

公开(公告)号：US20210311092A1

公开(公告)日：2021-10-07

申请号：US17012304

申请日：2020-09-04

Applicant: Industry-Academic Cooperation Foundation, Dankook University

Inventor： Jae-Hyoung Park ,  Seung-Ki Lee ,  Donggen Choi ,  So-Bin Shin ,  Ji-Yeon Kim

IPC: G01Q70/16 ,  G01Q70/06 ,  G01N27/30

Abstract: A micro probe array device and method of manufacturing are disclosed. In the micro probe array device, a plurality of working electrodes are arranged in an array form, so that an individual electric signal can be applied to an object for each working electrode. In the micro probe array device, the height of the working electrode may be different, the working electrode and the counter electrode may constitute a double electrode, or the substrate may be made of a flexible material.

公开(公告)号：US20210096153A1

公开(公告)日：2021-04-01

申请号：US17038269

申请日：2020-09-30

Applicant: Yanshan University

Inventor： Jianchao CHEN ,  Jingxin WU ,  Xiaoguang AN ,  Guangming SONG

IPC: G01Q60/38 ,  G01Q70/14 ,  G01Q70/16

Abstract: A sharpening method for a probe tip of an Atomic Force Microscope (AFM) includes the steps of dripping a prepared slurry on a glass slide to form a droplet on the glass slide, where particles of the prepared slurry are diamond powder; infiltrating the tip to be sharpened with the prepared slurry; setting operation mode of the AFM to tapping in the fluid and lowering the probe into droplet till the probe cantilever beam is immersed completely in the droplet; setting vibration parameters, scanning parameters, and sharpening time, performing tip sharpening; and evaluating the sharpening results, and finishing sharpening. When the AFM works in a tapping mode in fluid, the tip of the self-excited oscillating probe is sharpened under the grinding effect of the diamond particles. The method is simple and effective, and easy to implement.

公开(公告)号：US20190204353A1

公开(公告)日：2019-07-04

申请号：US16290981

申请日：2019-03-04

Applicant: Southwest Jiaotong University

Inventor： Linmao QIAN ,  Liang JIANG ,  Bin LIN ,  Jianbin LUO

IPC: G01Q70/16

CPC classification number: G01Q70/16 ,  G01N19/02 ,  G01Q60/26 ,  G01Q70/10

Abstract: A method for designing and processing a microcantilever-based probe with an irregular cross section applied in the ultra-low friction coefficient measurement at a nanoscale single-point contact includes: first, establishing a universal theoretical model of the friction coefficient measurement; then, combined with the structural features of the microcantilever-based probe with the irregular cross section, establishing a specific theoretical model of the friction coefficient measurement suitable for the microcantilever-based probe with the irregular cross section; and based on above, combined with constraint conditions such as the friction coefficient resolution, the loadable maximum positive pressure or the measurable minimum friction force, and the atomic force microscope characteristics, etc., designing the microcantilever-based probe with the irregular cross section meeting the measurement requirements.

公开(公告)号：US10088498B2

公开(公告)日：2018-10-02

申请号：US15443339

申请日：2015-08-28

Applicant: Panorama Synergy Ltd

Inventor： John Dell ,  Lorenzo Faraone ,  Roger Jeffery ,  Adrian Keating ,  Mariusz Martyniuk ,  Gino Putrino ,  Dilusha Silva

IPC: G01Q60/38 ,  G01Q70/16 ,  G01Q10/00

Abstract: A method of stimulating a MicroElectroMechanical Systems (MEMS) structure (e.g. a cantilever), and an optical sensor for use in such a method, using optical radiation pressure instead of electrostatic pressure, or the like. An optical pulse creates optical radiation pressure which stimulates movement of the MEMS structure and then movement of the MEMS structure may be measures. An interrogating light may be input after the optical pulse to measure movement of the MEMS structure. Advantageously, the same light source can be utilized to stimulate movement of the MEMS structure and to measure movement of the MEMS structure.

公开(公告)号：US10060948B2

公开(公告)日：2018-08-28

申请号：US15235889

申请日：2016-08-12

Applicant: Tiptek, LLC

Inventor： Joseph W. Lyding ,  Gregory S. Girolami ,  Scott P. Lockledge ,  Jinju Lee

IPC: G01Q70/16 ,  G01Q70/10 ,  G01Q60/00 ,  G01Q60/16

CPC classification number: G01Q70/10 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/16 ,  H01J37/28

Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

公开(公告)号：US09389244B2

公开(公告)日：2016-07-12

申请号：US14271344

申请日：2014-05-06

Applicant: Applied Nanostructures, Inc.

Inventor： Jeremy J. Goeckeritz ,  Gary D. Aden ,  Ami Chand ,  Josiah F. Willard

IPC: G01Q70/14 ,  G01Q60/58 ,  G01Q70/16 ,  B82Y35/00

CPC classification number: G01Q70/14 ,  B82Y35/00 ,  G01Q60/58 ,  G01Q70/16

Abstract: A scanning probe assembly having a nanometer sensor element defined at a tip apex and its method of fabrication using micro-electromechanical systems (MEMS) processing techniques. The assembly comprises a probe body, a cantilever extending outward, and a hollow tip at the end of the cantilever. A first conductive material is disposed on the hollow tip, followed by a dielectric layer thus embedding the conductive layer. A nanometer hole is milled through the tip, first conductor and dielectric materials. A metal sensor element is deposited by means of electrochemical deposition in the through-hole. A second conductor is deposited on a lower layer. The first and second conductors form electrical connections to the sensor element in the tip. The intra-tip metal, in combination with other layers, may form a thermocouple, thermistor, Schottky diode, ultramicroelectrode, or Hall Effect sensor, and used as a precursor to grow spikes such a nanotubes.

Abstract translation: 具有限定在顶端顶点处的纳米传感器元件的扫描探针组件及其使用微机电系统（MEMS）处理技术的制造方法。 组件包括探针主体，向外延伸的悬臂和悬臂末端的中空尖端。 第一导电材料设置在中空尖端上，随后是介电层从而嵌入导电层。 通过尖端，第一导体和电介质材料研磨纳米孔。 金属传感器元件通过电化学沉积沉积在通孔中。 第二导体沉积在下层上。 第一和第二导体与尖端中的传感器元件形成电连接。 尖端金属与其他层结合可形成热电偶，热敏电阻，肖特基二极管，超微电极或霍尔效应传感器，并用作生长诸如纳米管的尖峰的前体。