Method of making a self cooling electrically programmable fuse
    41.
    发明授权
    Method of making a self cooling electrically programmable fuse 失效
    制造自制电可编程保险丝的方法

    公开(公告)号:US5622892A

    公开(公告)日:1997-04-22

    申请号:US407431

    申请日:1995-03-17

    CPC classification number: H01L23/5256 H01L23/3672 H01L2924/0002 Y10S438/922

    Abstract: A method of fabricating an electrically programmable fuse buried under quartz and layers of polyimide with a specific structure to enhance its "thermal" capabilities. The fuse is designed to "blow" and cool off quickly so as not to cause damage to areas above and surrounding the fuse. A passivation layer is added above the fuse to act as a heat sink and absorb and redistribute the heat generated from one localized area to a broader and cooler area. The materials used for the fuse and the heat sink are selected to be compatible with both oxide and polyimide personalization schemes. Modeling of the fuse enables optimizing the characteristics of the fuse, particularly to transmit to the surface of the passivation layer the thermal wave created during programming of the fuse.

    Abstract translation: 埋设在石英下的电可编程熔丝的制造方法和具有特定结构的聚酰亚胺层以提高其“热”能力。 保险丝设计为“吹”并快速冷却,以免对保险丝上方和周围的区域造成损坏。 保险丝上方加上钝化层,作为散热片,吸收并重新分配从一个局部区域产生的热量到较宽和较冷的区域。 用于保险丝和散热器的材料被选择为与氧化物和聚酰亚胺个性化方案兼容。 保险丝的建模可以优化保险丝的特性,特别是在保险丝编程期间向钝化层的表面传输热波。

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