公开(公告)号：US20100053611A1

公开(公告)日：2010-03-04

申请号：US12510900

申请日：2009-07-28

Applicant: Howard A. Padmore ,  Dmytro L. Voronov ,  Rossana Cambie ,  Valeriy V. Yashchuk ,  Eric M. Gullikson

Inventor： Howard A. Padmore ,  Dmytro L. Voronov ,  Rossana Cambie ,  Valeriy V. Yashchuk ,  Eric M. Gullikson

IPC: G01J3/18 ,  B29D11/00 ,  C23C14/00 ,  C23C14/34 ,  B05D5/06 ,  C23C14/35 ,  G02B5/18

CPC classification number: G02B5/1838 ,  B29D11/0073 ,  B29D11/00769 ,  B82Y10/00 ,  G01J3/1809 ,  G21K1/06 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/067

Abstract: A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.

Abstract translation: 具有超高密度凹槽的衍射光栅结构包括具有周期性重复的凹陷特征的薄片基片和设置在薄片基片上的多层材料堆叠。 衍射光栅的表面被平坦化，使得多层叠层的层以周期的方式形成布置在结构的平坦化表面上的多条线，其中具有第一属性的线与具有不同性质的线交替 衬底的表面。 例如，在一个实施例中，包括高Z和低Z材料的线在平坦化表面上交替，提供适合作为EUV和软X射线的衍射光栅的结构。 在一些实施例中，提供约10,000线/ mm至约100,000线/ mm之间的线密度。

公开(公告)号：US20020180970A1

公开(公告)日：2002-12-05

申请号：US09958458

申请日：2001-10-05

Inventor： Michael R. Hammer ,  Philip V. Wilson ,  Mark R. Williams ,  Dower C. Bricker ,  Martin K. Masters ,  Stewart R. Campbell ,  Peter G. Layton

IPC: G01J003/28

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/1809 ,  G01J3/2803 ,  G01J5/62 ,  G01J2003/1828 ,  G01N21/27 ,  G01N21/31

Abstract: A method and apparatus for the spectrochemical analysis of a sample in which a solid state array detector (82) is used to detect radiation (62) of spectrochemical interest. The invention involves the use of a shutter (72) adjacent the entrance aperture (70) of a polychromator (74-80) to expose the detector (82) to the radiation (62) for varying lengths of time whereby for short duration exposure times charge accumulation in elements (i.e. pixels) of the detector (82) due to high intensity components of the radiation is limited and for longer exposure times charge accumulation in elements (pixels) of the detector (82) due to feeble intesity components of radiation (62) is increased. This ensures that each reading of the detector (82) includes at least one exposure in which the amount of charge accumulated at each wavelength of interest is neither too little or too great. The problems of feeble radiation components not being accurately measurable and of high intensity radiation components exceeding the charge carrying capacity of elements (pixels) of the detector (82) are thereby able to be avoided. An attenuator (90) may be placed between the radiation source (60) and the detector (82) to permit longer exposure times to be used for very high intensity radiation.

Abstract translation: 用于对样品进行光谱化学分析的方法和装置，其中固态阵列检测器（82）用于检测分光光度的辐射（62）。 本发明涉及使用与多色调剂（74-80）的入口孔（70）相邻的快门（72）将检测器（82）暴露于辐射（62）以改变长度的时间，从而短时间曝光时间 由于辐射的高强度分量，检测器（82）的元件（即，像素）中的电荷累积受到限制，并且由于辐射的微弱的肥胖分量，对于更长的曝光时间来检测器（82）的元件（像素）中的电荷累积 62）增加。 这确保了检测器（82）的每次读取包括至少一次曝光，其中在每个感兴趣波长处累积的电荷量既不太小也不太大。 因此能够避免无法精确测量的微弱辐射成分和超过检测器（82）的元件（像素）的电荷承载能力的高强度辐射成分的问题。 衰减器（90）可以放置在辐射源（60）和检测器（82）之间，以允许更长的曝光时间用于非常高强度的辐射。

公开(公告)号：US20010024275A1

公开(公告)日：2001-09-27

申请号：US09801001

申请日：2001-03-08

Inventor： Toru Suzuki ,  Osamu Wakabayashi

IPC: G01J003/28

CPC classification number: G01J3/1809 ,  G01J3/1838 ,  G01J3/22

Abstract: A spectrometer measures a spectrum of a light beam supplied from a light source so as to obtain fine information and coarse information of the spectrum easily. This spectrometer has a holographic grating, an Echelle grating, a rotation stage and a line sensor. In the case where a single pass beam is to be detected, a control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle null1. On the other hand, in the case where a double pass beam is to be detected, the control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle null2.

Abstract translation: 光谱仪测量从光源提供的光束的光谱，以便容易地获得光谱的精细信息和粗略信息。 该光谱仪具有全息光栅，Echelle光栅，旋转台和线传感器。 在要检测单程光束的情况下，控制处理单元控制旋转阶段，以使Echelle光栅从Littrow布置旋转预定角度δ1。 另一方面，在要检测双通光束的情况下，控制处理单元控制旋转台，以便将梯形光栅从Littrow布置旋转预定角度δ2。

公开(公告)号：US6078048A

公开(公告)日：2000-06-20

申请号：US66662

申请日：1998-04-27

Applicant: Charles G. Stevens ,  Norman L. Thomas

Inventor： Charles G. Stevens ,  Norman L. Thomas

IPC: G01J3/18 ,  G01J3/28 ,  G02B5/18

CPC classification number: G02B5/1814 ,  G01J3/1809 ,  G01J3/2803 ,  G01J2003/1828

Abstract: A small spectrograph containing no moving components and capable of providing high resolution spectra of the mid-infrared region from 2 microns to 4 microns in wavelength. The resolving power of the spectrograph exceeds 20,000 throughout this region and at an optical throughput of about 10.sup.-5 cm.sup.2 sr. The spectrograph incorporates a silicon immersion echelle grating operating in high spectral order combined with a first order transmission grating in a cross-dispersing configuration to provide a two-dimensional (2-D) spectral format that is focused onto a two-dimensional infrared detector array. The spectrometer incorporates a common collimating and condensing lens assembly in a near aberration-free axially symmetric design. The spectrometer has wide use potential in addition to general research, such as monitoring atmospheric constituents for air quality, climate change, global warming, as well as monitoring exhaust fumes for smog sources or exhaust plumes for evidence of illicit drug manufacture.

Abstract translation: 一个小型的光谱仪不含移动组件，能够提供波长为2微米至4微米的中红外区域的高分辨率光谱。 光谱仪的分辨率在该区域超过20,000，光通量约为10-5cm2 sr。 光谱仪包括以高光谱顺序工作的硅浸没式光栅栅格，与交叉分散配置中的一阶透射光栅组合，以提供聚焦到二维红外检测器阵列上的二维（2-D）光谱格式 。 光谱仪包含一个普通的准直和聚光透镜组件，具有近无像差的轴对称设计。 除了一般性研究之外，光谱仪还具有广泛的应用潜力，例如监测空气质量，气候变化，全球变暖的大气成分，以及监测烟雾源的废气烟雾或排放羽毛，以证明非法药物生产。

公开(公告)号：US4986658B1

公开(公告)日：1996-06-25

申请号：US34174889

申请日：1989-04-21

Applicant: UNIV LEHIGH

Inventor： KIM YONG W

IPC: G01J3/443 ,  G01J3/02 ,  G01J3/04 ,  G01J3/18 ,  G01J3/28 ,  G01N21/17 ,  G01N21/69 ,  G01N21/71 ,  G01N21/73 ,  G01N21/63

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/28 ,  G01J3/2889 ,  G01J2003/1828 ,  G01N21/718 ,  G01N2021/695

公开(公告)号：US5189486A

公开(公告)日：1993-02-23

申请号：US657096

申请日：1991-02-15

Applicant: Stefan Florek ,  Helmut Becker-Ross

Inventor： Stefan Florek ,  Helmut Becker-Ross

IPC: G01J3/18

CPC classification number: G01J3/1809 ,  G01J2003/1828 ,  G01J2003/1876

Abstract: The invention relates to an Echelle polychromator and can be employed in instruments for the spectrophotometric investigation of radiation sources. It is characterized in that, connected in series with the polychromator, there is a dispersive and polychromatic illuminating device, which is formed from an entrance slit arrangement, collimator optics, prism and camera optics, the entrance slit arrangements of the polychromator and of the illuminating device consisting of a main slit for limiting the bundle in the grating dispersion direction and a transverse slit for limiting the bundle in the direction of the dispersion of the prism in the Echelle polychromator. The whole of the wavelength range, which is to be processed by the polychromator, is imaged completely with negligible aberration on the transverse slit of the Echelle polychromator as a spectrum of the illuminating device. The dispersion of the illuminating device runs in the direction of the transverse dispersion of the prism of the Echelle polychromator. The dispersion-induced geometric width of the spectrum of the illuminating device for the whole of the wavelength region that is to be processed by the polychromator is less than the width of the transverse slit of the Echelle polychromator. Parts of the bundle of rays of the spectrum of the illuminating device are blocked out by the transverse slit of the Echelle polychromator.

Abstract translation: 本发明涉及一种Echelle多色变色器，可用于辐射源分光光度测量仪器中。 其特征在于，与多色板串联连接，存在分散和多色照明装置，其由入口狭缝布置，准直器光学器件，棱镜和照相机光学元件形成，多色调色剂的入射狭缝布置和照明 由用于限制光栅分散方向的束的主狭缝和用于限制束在Echelle多色分光器中的棱镜的分散方向的横向狭缝构成的装置。 作为照明装置的光谱，将通过多色
调色剂处理的整个波长范围在Echelle多色分光器的横向狭缝上以可忽略的像差完全成像。 照明装置的分散体沿着梯形多色板的棱镜的横向分散方向延伸。 用于由多色
调色板处理的整个波长区域的照明装置的光谱的色散引起的几何宽度小于Echelle多色
调色板的横向狭缝的宽度。 照明装置的光谱束的一部分光束被Echelle多色分光器的横向狭缝遮断。

公开(公告)号：US5087123A

公开(公告)日：1992-02-11

申请号：US526779

申请日：1990-05-17

Applicant: Edgar Gerlacher ,  Carl G. Dencks ,  Uwe Gunther ,  Gunther Rodel

Inventor： Edgar Gerlacher ,  Carl G. Dencks ,  Uwe Gunther ,  Gunther Rodel

IPC: G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G01J3/36 ,  G01J3/443 ,  G01N21/73 ,  G01N21/74

CPC classification number: G01J3/1809 ,  G01J3/443 ,  G01J2003/1208 ,  G01J2003/2869 ,  G01J3/36 ,  G01N21/73 ,  G01N21/74

Abstract: A method of and a device for multi-element measurement of elements in a sample with correction for background emission. The method starts with atomizing a sample and then exciting the transformed atoms to emit light containing characteristic spectral lines for each element, followed by generating a spectrum of spectral lines characteristic of the elements, followed by measuring the intensity of selected spectral lines falling within a predetermined measuring range without changing their intensity. The next steps are sensing the background emission adjacent the selected spectral lines simultaneously with measuring the intensity of selected spectral lines and determining the concentration of each element from the measured intensity of the corresponding spectral line and sensed background emission.

Abstract translation: 用于多元素测量样本中的元素的方法和装置，其具有用于背景发射的校正。 该方法开始于对样品进行雾化，然后激发转化的原子以发射含有每个元素的特征谱线的光，随后产生元素特征谱带的频谱，随后测量落在预定的范围内的所选谱线的强度 测量范围而不改变它们的强度。 接下来的步骤是通过测量所选谱线的强度同时测量与所选谱线相邻的背景发射，并从相应光谱线的测量强度和感测到的背景辐射确定每个元素的浓度。

公开(公告)号：US4995721A

公开(公告)日：1991-02-26

申请号：US488293

申请日：1990-03-05

Applicant: Robert J. Krupa ,  R. Calvin Owen

Inventor： Robert J. Krupa ,  R. Calvin Owen

IPC: G01J3/18 ,  G01J3/28 ,  G02B17/06

CPC classification number: G01J3/1809 ,  G02B17/0621 ,  G01J2003/1814 ,  G01J3/2803

Abstract: A double-pass two-dimensional spectrometer utilizes a telescope wich contains only reflective optical components and is therefore free of chromatic aberrations. The telescope is so used in combination with dispersing optics as to allow double-pass use of the combination. The telescope has a state of correction such that, for example, an image which is diffraction-limited at 800 nm is produced over a flat field, corresponding to a wide-angle object coverage. This state of correction is accomplished with only two mirrors, one of which is a conic (e.g., hyperbolic) surface of revolution, while the other is a reflecting generalized polynomial aspheric corrector; and both mirrors are rotationally symmetric surfaces of revolution, each about its own axis of revolution. The double-pass nature of the system allows for a compact optical system consisting of only two reflecting surfaces, plus the dispersing optics, and there are no internal obscurations, thus avoiding negative effects of diffraction off of internal structures. The invention is shown for its applicability to each of several types of spectrometer-design configurations.

公开(公告)号：US4986658A

公开(公告)日：1991-01-22

申请号：US341748

申请日：1989-04-21

Applicant: Yong W. Kim

Inventor： Yong W. Kim

IPC: G01J3/443 ,  G01J3/02 ,  G01J3/04 ,  G01J3/18 ,  G01J3/28 ,  G01N21/17 ,  G01N21/69 ,  G01N21/71 ,  G01N21/73

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/28 ,  G01J3/2889 ,  G01N21/718 ,  G01J2003/1828 ,  G01N2021/695

Abstract: A method and apparatus for in-process transient spectroscopic analysis of a molten metal, wherein a probe containing a pulsed high-power laser producing a pulsed laser beam having a substantially triangular pulse waveshape is immersed in the molten metal and irradiates a representative quantity of the molten metal. The pulsed laser beam vaporizes a portion of the molten metal to produce a plasma plume having an elemental composition representative of the elemental composition of the molten metal. Before the plasma plume reaches thermal equilibrium shortly after termination of the laser pulse, a spectroscopic detector in the probe detects spectral line reversals, as caused by absorption of radiation emitted by the hotter inner portion of the plasma plume to relatively coller outer portions of the plasma plume, during a short first time window. Thereafter, when the afterglow plasma is in thermal equilibrium, a second spectroscopic detector also in the probe performs a second short time duration spectroscopic measurement. A rangefinder measures and controls the distance between the molten metal surface and the pulsed laser.

Abstract translation: 一种用于熔融金属的在线瞬态光谱分析的方法和装置，其中包含产生具有基本三角形脉冲波形的脉冲激光束的脉冲大功率激光的探针被浸入熔融金属中并照射代表量的 熔融金属。 脉冲激光束蒸发熔融金属的一部分以产生具有代表熔融金属的元素组成的元素组成的等离子体羽流。 在等离子体羽毛在激光脉冲终止之后不久达到热平衡之前，探针中的光谱检测器检测光谱线反转，这是由等离子体羽流的较热的内部部分的辐射吸收到等离子体的相对较冷的外部部分引起的 羽毛，在短暂的第一时间窗口。 此后，当余辉等离子体处于热平衡时，也在探针中的第二光谱检测器进行第二短时间光谱测量。 测距仪可测量和控制熔融金属表面与脉冲激光之间的距离。

公开(公告)号：US4820048A

公开(公告)日：1989-04-11

申请号：US123025

申请日：1987-11-19

Applicant: Thomas W. Barnard

Inventor： Thomas W. Barnard

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/28 ,  G01J3/36 ,  H01L21/66 ,  H01L27/146 ,  H01L27/148

CPC classification number: G01J3/1809 ,  G01J3/2803

Abstract: A novel solid state array detector is useful in an optical spectrometer of the type that includes a crossed dispersion system receptive of radiation for producing a pair of two dimensional displays of spectral lines characteristic of at least one atomic element. One display is ultraviolet and the other is visible. A solid-state chip has on the front surface a two dimensional array of photosensitive pixels receptive of radiation of selected spectral lines and proximate background radiation. The pixels are arranged in a plurality of sub-arrays with each sub-array consisting of at least one of the pixels and are positioned at a projection location on the front surface of at least one of the selected spectral lines. Electronic components formed on the chip among the sub-arrays are operatively connected to the pixels for producing readout signals correlating with intensities of the selected spectral lines.