公开(公告)号：US20160062076A1

公开(公告)日：2016-03-03

申请号：US14784802

申请日：2014-04-21

Applicant: LG INNOTEK CO. LTD.

Inventor： Yong Jun KO ,  Sang Won SEO ,  Jeong Gi SEO ,  Chul KIM ,  Don Han JUN ,  Wan Seop CHOI

IPC: G02B7/09 ,  B81B7/02 ,  H02N1/00 ,  G02B7/02

CPC classification number: G02B7/09 ,  B81B3/0024 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/047 ,  B81B2203/0163 ,  B81B2203/053 ,  G02B7/028 ,  G02B7/08 ,  G03B3/10 ,  H02N1/006

Abstract: The disclosure provides a MEMS device including: a fixed substrate having a cavity; a driving unit disposed in the cavity and floating above the fixed substrate; and an elastic unit for physically connecting the fixed substrate with the driving unit and varying the height of the driving unit according to a control current, wherein the elastic unit includes a bimorph driving unit connected to the fixed substrate and bent according to the control current, a spring connected to the driving unit, and a frame connecting the bimorph driving unit to the spring. Therefore, in order to overcome the limitations according to the power consumption and the size-reduction due to a coil and a magnet, the MEMS device drives one lens and thus can reduce the power consumption and the size thereof. Further, the MEMS device applies a thermal scheme which performs an automatic focusing function through vertical operation of a lens by a thermal expansion difference of different materials, thereby simplifying the structure thereof and reducing the cost.

Abstract translation: 本公开提供了一种MEMS器件，包括：具有空腔的固定衬底; 驱动单元，设置在所述空腔中，并且浮置在所述固定基板上; 以及用于将固定基板与驱动单元物理连接并根据控制电流改变驱动单元的高度的弹性单元，其中弹性单元包括连接到固定基板并根据控制电流弯曲的双压电晶片驱动单元， 连接到驱动单元的弹簧和将双压电晶片驱动单元连接到弹簧的框架。 因此，为了克服根据功率消耗和由于线圈和磁体引起的尺寸减小的限制，MEMS器件驱动一个透镜，从而可以降低功耗及其尺寸。 此外，MEMS器件通过不同材料的热膨胀差来应用通过透镜的垂直操作来执行自动聚焦功能的热方案，从而简化其结构并降低成本。

公开(公告)号：US20150061457A1

公开(公告)日：2015-03-05

申请号：US14389140

申请日：2013-03-28

Applicant: NATIONAL INSITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  ALPS ELECTRIC CO., LTD.

Inventor： Takushi Sugino ,  Kinji Asaka ,  Isao Takahashi ,  Tomomasa Takatsuka ,  Kenichi Mitsumori ,  Nobuaki Haga

IPC: H02N1/00 ,  H01B1/24

CPC classification number: H02N1/002 ,  B32B27/08 ,  B32B27/20 ,  B32B2262/106 ,  B32B2307/202 ,  B32B2457/00 ,  B81B3/0021 ,  B81B2201/032 ,  C08K3/041 ,  C08K3/044 ,  C08K3/046 ,  C08K5/315 ,  C08K5/3445 ,  C08K2201/011 ,  F03G7/005 ,  H01B1/24

Abstract: An object of this invention is to create an actuator in which the amount of deformation is maintained and no displacement in the reverse direction occurs, even when a constant voltage is continuously applied for a long period of time.As a means for achieving the above object, the invention provides a conductive thin film comprising a polymer gel containing at least one organic molecule selected from the group consisting of electron-donating organic molecules and electron-withdrawing organic molecules, a nano-carbon material, an ionic liquid, and a polymer.

Abstract translation: 本发明的目的在于，即使长时间连续施加恒定电压，也能够形成维持变形量且不发生相反方向位移的致动器。 作为实现上述目的的手段，本发明提供一种导电性薄膜，其包含聚合物凝胶，该聚合物凝胶含有选自由供电子性有机分子和吸电子性有机分子组成的组中的至少一种有机分子，纳米碳材料， 离子液体和聚合物。

公开(公告)号：US20140295365A1

公开(公告)日：2014-10-02

申请号：US14362285

申请日：2012-11-29

Applicant: Commissariat à I'énergie atomique et aux énergies alternatives

Inventor： Fabrice Casset

IPC: F24J3/00

CPC classification number: F24V99/00 ,  B81B3/0024 ,  B81B3/0081 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2201/032 ,  F03G7/06 ,  H01L41/1136 ,  H02N2/18

Abstract: A device for generating a second temperature variation ΔT2 from a first use temperature variation ΔT1, includes an elastocaloric material layer, having an internal temperature which is able to vary by ΔT2 in response to a given mechanical stress variation Δσ applied to the elastocaloric material layer. The variation Δσ being induced by the first use temperature variation ΔT1 There is a suspended element in mechanical contact with the elastocaloric material layer so as to apply to this layer a mechanical stress that varies in response to the use temperature variation ΔT1. The suspended element is arranged so as to make the mechanical stress applied to the elastocaloric material layer vary by Δσ in response to the temperature variation ΔT1 to generate the second temperature variation ΔT2.

Abstract translation: 用于从第一使用温度变化＆Dgr; T1产生第二温度变化＆gt; T2的装置包括弹性体材料层，其具有响应于给定的机械应力变化＆Dgr能够变化为＆Dgr; T2的内部温度; ＆sgr 应用于弹性材料层。 变化与变化 由第一使用温度变化引起的; Dgr; T1具有与弹性体材料层机械接触的悬浮元件，以便向该层施加响应于使用温度变化＆Dgr; T1变化的机械应力。 悬挂元件布置成使得施加到弹性材料层的机械应力变化为＆Dgr; 响应于温度变化＆Dgr; T1以产生第二温度变化＆Dgr; T2。

公开(公告)号：US20140125431A1

公开(公告)日：2014-05-08

申请号：US14071173

申请日：2013-11-04

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee

IPC: H01L41/09 ,  H01G5/18 ,  B81B7/02 ,  H03H9/46

CPC classification number: H01G5/18 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2201/0271 ,  B81B2201/032 ,  H03H9/02275 ,  H03H9/02409 ,  H03H9/2405 ,  H03H9/2463 ,  H03H9/462 ,  H03H9/467 ,  H03H2009/241

Abstract: A MEMS device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. Notably, the piezoelectric layer is a bimorph including a first bimorph layer and a second bimorph layer. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with the first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the substrate, such that the second electrode is in contact with the second bimorph layer of the piezoelectric layer. The second electrode may include a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.

Abstract translation: MEMS器件包括衬底，形成在衬底的第一表面上的一个或多个锚固体和通过一个或多个锚固件悬挂在衬底的第一表面上的压电层。 值得注意的是，压电层是包括第一双晶片层和第二双晶片层的双晶片。 第一电极可以设置在面对基板的第一表面的压电层的第一表面上，使得第一电极与压电层的第一双压电晶片层接触。 第二电极可以设置在与衬底相对的压电层的第二表面上，使得第二电极与压电层的第二双压电晶片层接触。 第二电极可以包括第一导电部分和第二导电部分，其在数字上分散在第二表面上。

公开(公告)号：US20130063530A1

公开(公告)日：2013-03-14

申请号：US13697994

申请日：2011-04-27

Applicant: Kusunoki Higashino ,  Shinya Matsuda

Inventor： Kusunoki Higashino ,  Shinya Matsuda

IPC: B41J2/045 ,  H01L41/09

CPC classification number: H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0127 ,  H01L41/0475

Abstract: An electromechanical transducer (1) has a pressurizing chamber (21) and a side-chamber (23) formed in a plate (11). On a driven film (13) forming the upper wall surface (21a) of the pressurizing chamber (21) and the side-chamber (23), a lower electrode (33), a driving member, and an upper electrode (35) are formed in this order. The driving member is composed of an operation section (31p) located over the pressurizing chamber (21), and an extended section (31a) extending from the operation section (31p) to over the side-chamber (23). The side-chamber (23) has a smaller width than the pressurizing chamber (21) in a second direction perpendicular to a first direction in which the side-chamber (23) is located beside the pressurizing chamber (21). The extended section (31a) of the driving member has a smaller width than the side-chamber (23) in the second direction.

Abstract translation: 机电换能器（1）具有形成在板（11）中的加压室（21）和侧室（23）。 在形成加压室（21）的上壁面（21a）和侧室（23）的从动膜（13）上，下电极（33），驱动部件和上电极（35） 按此顺序形成。 驱动部件由位于加压室（21）的上方的操作部（31p）和从操作部（31p）延伸到侧室（23）的延伸部（31a）构成。 侧室（23）在垂直于侧室（23）位于加压室（21）旁边的第一方向的第二方向上具有比加压室（21）更小的宽度。 驱动构件的延伸部（31a）在第二方向上具有比侧室（23）更小的宽度。

公开(公告)号：US20100259130A1

公开(公告)日：2010-10-14

申请号：US12310620

申请日：2007-08-29

Applicant: Gerald Eckstein ,  Ingo Kühne

Inventor： Gerald Eckstein ,  Ingo Kühne

IPC: H02N2/18 ,  H01L41/053

CPC classification number: H01L41/1138 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0127

Abstract: An apparatus, in particular a microsystem, includes a device for energy conversion. The device for energy conversion has a piezoelectric, mechanically vibrating diaphragm structure for converting mechanical energy into electrical energy and/or vice versa, the diaphragm structure being arranged encapsulated in an environment which has a predetermined pressure which is, in particular, lower than an isostatic pressure.

Abstract translation: 一种装置，特别是微系统，包括用于能量转换的装置。 用于能量转换的装置具有用于将机械能转换成电能的压电机械振动膜结构和/或反之亦然，所述隔膜结构被封装在具有预定压力的环境中，所述预定压力尤其低于等静压 压力。

公开(公告)号：US20100231652A1

公开(公告)日：2010-09-16

申请号：US12786268

申请日：2010-05-24

Applicant: Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

Inventor： Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

IPC: B41J2/05

CPC classification number: B41J2/14427 ,  B41J2002/14435 ,  B41J2202/03 ,  B41J2202/15 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/052

Abstract: An inkjet nozzle assembly comprises: a nozzle chamber having a nozzle opening and an ink inlet; and a thermal bend actuator for ejecting ink through the nozzle opening. The actuator comprises: an active beam for connection to drive circuitry; a first passive beam fused to the active beam; and a second passive beam fused to the second first passive beam. The first passive beam is sandwiched between the active beam and the second passive beam such that when a current is passed through the active beam, the active beam expands relative to the passive beams, resulting in bending of the actuator and ejection of ink through the nozzle opening.

Abstract translation: 喷墨喷嘴组件包括：具有喷嘴开口和墨入口的喷嘴室; 以及用于通过喷嘴开口喷射墨水的热弯曲致动器。 致动器包括：用于连接到驱动电路的主动梁; 与激活光束融合的第一被动束; 和与第二第一无源光束融合的第二无源光束。 第一无源光束夹在有源光束和第二无源光束之间，使得当电流通过有源光束时，有源光束相对于被动光束扩展，导致致动器弯曲并通过喷嘴喷射墨水 开放

公开(公告)号：US07758979B2

公开(公告)日：2010-07-20

申请号：US12155015

申请日：2008-05-29

Applicant: Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

Inventor： Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

IPC: B32B9/00

CPC classification number: B81B3/0021 ,  B81B2201/0271 ,  B81B2201/032 ,  H01L41/0815 ,  H01L41/094 ,  H01L41/1136 ,  H01L41/187 ,  H01L41/316 ,  H03H9/02015 ,  H03H9/02574 ,  H03H9/173

Abstract: A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has.

Abstract translation: 本发明的压电薄膜包括含有钪的氮化铝薄膜。 假设钪原子的总数和铝原子数为100原子％，则氮化铝薄膜中的钪的含有比例为0.5原子％〜50原子％。 根据该结构，本发明的压电薄膜能够在保持氮化铝薄膜的弹性波传播速度，Q值和频率 - 温度系数的特性的同时提高压电响应。

公开(公告)号：US20090251027A1

公开(公告)日：2009-10-08

申请号：US12363284

申请日：2009-01-30

Applicant: Yuji KUDOH

Inventor： Yuji KUDOH

IPC: H01L41/04 ,  B32B37/12 ,  H01L41/22

CPC classification number: F03G7/005 ,  B81B3/0075 ,  B81B2201/032 ,  B81B2203/0118 ,  Y10S310/80 ,  Y10T29/42

Abstract: Adhesive properties between an electrically conductive polymer membrane and a solid electrolyte membrane to each other are improved, and thus the operation of an electrically conductive polymer actuator which effects a bending motion is ensured.An electrically conductive polymer actuator having a laminated structure including: a solid electrolyte membrane constituted with a mixture of an ionic liquid, and an organic polymer that contains at least one or more of a vinylidene fluoride/hexafluoropropylene copolymer [P(VDF/HFP)], polyvinylidene fluoride (PVDF), a perfluorosulfonic acid/PTFE copolymer, polymethyl methacrylate (PMMA), polyethylene oxide (PEO) and polyacrylonitrile (PAN); and an electrically conductive polymer membrane constituted with a mixture of polystyrene sulfonic acid (PSS) and polyethylenedioxythiophene (PEDOT) on at least one face of the solid electrolyte membrane, characterized in that polyethylene glycol is included in the electrically conductive polymer membrane.

Abstract translation: 导电性高分子膜与固体电解质膜之间的粘合性能提高，能够确保实现弯曲动作的导电性聚合物致动器的动作。 一种具有叠层结构的导电聚合物致动器，包括：由离子液体和含有至少一种或多种偏二氟乙烯/六氟丙烯共聚物[P（VDF / HFP）]的混合物的混合物构成的固体电解质膜， ，聚偏二氟乙烯（PVDF），全氟磺酸/ PTFE共聚物，聚甲基丙烯酸甲酯（PMMA），聚环氧乙烷（PEO）和聚丙烯腈（PAN）; 以及在所述固体电解质膜的至少一个面上由聚苯乙烯磺酸（PSS）和聚亚乙基二氧噻吩（PEDOT）的混合物构成的导电性聚合物膜，其特征在于，在所述导电性高分子膜中包含聚乙二醇。

公开(公告)号：US07471184B1

公开(公告)日：2008-12-30

申请号：US11866154

申请日：2007-10-02

Applicant: Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

Inventor： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

IPC: H01H61/01 ,  H01L23/58 ,  H01L31/04 ,  H01L21/00

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

Abstract: An apparatus comprising a microelectromechanical system (MEMS) device. The MEMS device includes a substrate having an anchoring pad thereon and a structural element. The structural element has a beam that includes a first part and a second part. The first part is attached to both the anchoring pad and to the second part. The second part is movable with respect to the substrate and made of an electrically conductive material. Additionally, at least one of the following conditions hold: the first part is made of a material having: a first yield stress that is greater than a second yield stress of the electrically conductive material of the second part; a fatigue resistance that is greater than a second fatigue resistance of the electrically conductive material of the second part; or, a creep rate that is less than a second creep rate of the electrically conductive material of the second part.

Abstract translation: 一种包括微机电系统（MEMS）装置的装置。 MEMS器件包括其上具有锚定垫的衬底和结构元件。 结构元件具有包括第一部分和第二部分的梁。 第一部分连接到锚固垫和第二部分。 第二部分可相对于基板移动并由导电材料制成。 另外，以下条件中的至少一个成立：第一部分由具有第二部分的导电材料的第二屈服应力的第一屈服应力的材料制成; 大于第二部分的导电材料的第二耐疲劳性的耐疲劳性; 或者小于第二部分的导电材料的第二蠕变速率的蠕变速率。