公开(公告)号：US20230230815A1

公开(公告)日：2023-07-20

申请号：US18188095

申请日：2023-03-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jang-Yeob Lee ,  Sungyeol Kim ,  Jinyeong Yun ,  Minsung Kim ,  HoSun Yoo

IPC: H01J37/32

CPC classification number: H01J37/32568 ,  H01J37/32458 ,  H01J37/32642 ,  H01J37/32743 ,  H01J37/32715 ,  H01J37/3244 ,  H01J37/32798

Abstract: A plasma processing apparatus includes a chamber providing a space for processing a substrate, a substrate stage configured to support the substrate within the chamber and including a lower electrode, an upper electrode facing the lower electrode, a focus ring in or on an upper peripheral region of the substrate stage to surround the substrate, and a plasma adjustment assembly in at least one of a first position between the upper electrode and the lower electrode and a second position between the focus ring and the lower electrode, the plasma adjustment assembly including a photoreactive material layer and a plurality of light sources configured to irradiate light onto a local region of the photoreactive material layer. A capacitance of the local region is changed as the light is irradiated to the local region.

公开(公告)号：US20230194591A1

公开(公告)日：2023-06-22

申请号：US17975202

申请日：2022-10-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jinyeong Yun ,  Meehyun Lim ,  Sungjin Kim ,  Masahiko Yamabe ,  Sungyeol Kim ,  Sungyong Lim ,  Sunghwi Cho

IPC: G01R29/12 ,  H01L21/687 ,  H01L21/683 ,  H01L21/66

CPC classification number: G01R29/12 ,  H01L21/6833 ,  H01L21/68742 ,  H01L22/12

Abstract: An electric field measuring apparatus includes an electrostatic chuck with a through hole and holding a wafer, a lift pin picking up the wafer, a driver vertically moving the lift pin along the through hole, a probe in the lift pin and having a refractive index changed by an electric field of the wafer, the probe including an electro-optical crystal, an optical waveguide forming at least one internal path of light having a polarization characteristic changed by the changed refractive index between the probe and the wafer, and a control module controlling the lift pin and the driver. The lift pin moves to first and second positions. The control module calculates a strength of the electric field of the wafer, using electric field data measured using the probe at each of the first and second positions.

公开(公告)号：US20230187189A1

公开(公告)日：2023-06-15

申请号：US17864541

申请日：2022-07-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Myungsub Jung ,  Sungyeol Kim ,  Sungyong Lim ,  Jaehyun Choi ,  Kyungmin Lee ,  Seungkyu Lim

IPC: H01J37/32 ,  C23C16/52 ,  C23C16/509

CPC classification number: H01J37/32935 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32926 ,  C23C16/52 ,  C23C16/509 ,  H01J2237/24564 ,  H01J2237/3321 ,  H01J37/32183

Abstract: a plasma processing system includes a chamber providing a space for performing a plasma process on a substrate, a substrate stage having a seating surface for supporting the substrate, the substrate stage having a circular electrode and at least one annular electrode therein, an upper electrode provided over the substrate, a power supply configured to supply source power to the upper electrode, a first capacitance variator configured to vary a capacitance of the circular electrode based on an inputted first control signal, a second capacitance variator configured to vary a capacitance of the annular electrode based on an inputted second control signal, a sensor connected to the first and second capacitance variators respectively and configured to acquire electrical signal data of the circular electrode and the at least one annular electrode, and a controller configured to determine a thin film profile in first and second regions of the substrate corresponding to the circular electrode and the annular electrode respectively based on the electrical signal data obtained from the sensor, the controller being configured to output the first and second control signals respectively in order to obtain a desired thin film profile.

公开(公告)号：US20230118000A1

公开(公告)日：2023-04-20

申请号：US17970242

申请日：2022-10-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungyong Lim ,  Sungyeol Kim ,  Yongwon Cho ,  Younghwan Choi ,  Chunyoon Park ,  Seungbo Shim ,  Hyungjung Yong ,  Jaejoong Lee

IPC: H01J37/32

Abstract: A radio frequency (RF) generating device for generating RF output signals is provided. The RF generating device includes: a controller configured to generate an RF control signal and a gain control signal; a plurality of RF signal generators, each RF signal generator being configured to generate an RF signal having at least one of a frequency and a phase determined based on the RF control signal; a plurality of RF amplification modules, each RF amplification module being configured to receive the RF signal generated by a corresponding RF signal generator and generate an RF amplification signal by controlling a gain of the RF signal based on the gain control signal; an RF switch module configured to select at least one of the RF amplification signals generated by the RF amplification modules and generate an RF output signal in a form of a multi-level pulse based on the selected at least one of the RF amplification signals; and an impedance converter connected to an electrode of an external load and configured to convert a load impedance into a target impedance having a target range, the load impedance being an impedance of the external load.

公开(公告)号：US11538697B2

公开(公告)日：2022-12-27

申请号：US17016881

申请日：2020-09-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang Ki Nam ,  Jang-Yeob Lee ,  Sungyeol Kim ,  Sunghyup Kim ,  Soonam Park ,  Siqing Lu

IPC: H01L21/67 ,  H01J37/32 ,  H01L21/3213

Abstract: A substrate processing apparatus, including a processing chamber including a first internal space and a second internal space arranged in a vertical direction, the first internal space being configured to receive process gas to generate plasma; an induction electrode configured to divide the processing chamber, and having a plurality of through-holes arranged to connect the first internal space and the second internal space, wherein the plurality of through-holes are configured to induce an ion beam extracted from ions included in the plasma generated in the first internal space; a radical supply located in the second internal space, and including a reservoir configured to receive chemical liquid in which an object to be processed is immersed, and a lower electrode configured to apply nanopulses to the reservoir to generate radicals from the chemical liquid; and a chemical liquid supply configured to supply the chemical liquid to the reservoir.

公开(公告)号：US20220270562A1

公开(公告)日：2022-08-25

申请号：US17742992

申请日：2022-05-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jonghoon JUNG ,  Sungyeol Kim ,  Seungyong Shin ,  Junsung Choi

IPC: G09G3/36 ,  G09G3/34

Abstract: A display apparatus includes a liquid crystal panel, a power supply, a backlight unit including a plurality of sub-blocks configured to radiate light to the liquid crystal panel, and a controller configured to determine a peak voltage and a source voltage supplied to each of the plurality of sub-blocks. Each of the plurality of sub-blocks includes a first switching element configured to receive the peak voltage as a gate voltage, and a second switching element including a drain terminal connected to a source terminal of the first switching element, the second switching element configured to receive an amount of charges corresponding to the source voltage through a gate terminal.

公开(公告)号：US20220260877A1

公开(公告)日：2022-08-18

申请号：US17733661

申请日：2022-04-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyungsoo PARK ,  Sungyeol Kim ,  Chunsoon Park ,  Kyehoon Lee

IPC: G02F1/1335 ,  H01L25/075 ,  H01L33/10 ,  H01L33/50 ,  H01L33/56

Abstract: A display apparatus and light source device thereof are provided. The light source device includes an optical dome having a specifically defined shape to be able to maintain an optical profile of a light source. According to the disclosure, a display apparatus includes a printed circuit board (PCB), a light emitting diode (LED) chip mounted on the PCB and configured to emit light, an optical dome formed to enclose the LED chip by being dispensed on the LED chip, and a liquid crystal panel configured to block or pass light output from the LED chip, wherein the optical dome may be formed to satisfy 1.70

公开(公告)号：US11262620B1

公开(公告)日：2022-03-01

申请号：US17340521

申请日：2021-06-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungyeol Kim ,  Kyungsoo Park ,  Chunsoon Park ,  Kyehoon Lee

IPC: G02F1/13357 ,  F21K9/64 ,  F21Y105/16 ,  F21Y115/10

Abstract: Disclosed is a display apparatus and light source device which includes an optical dome having a specifically defined shape to be able to maintain an optical profile of a light source. A display apparatus includes a printed circuit board (PCB), a light emitting diode (LED) chip mounted on the PCB and emitting light, an optical dome formed to enclose the LED chip by being dispensed on the LED chip, a liquid crystal panel blocking or passing light output from the LED chip, and an optical film arranged between the LED chip and the liquid crystal panel, wherein a ratio of height of the optical dome to a diameter of a bottom surface of the optical dome may be 0.25 to 0.31.

公开(公告)号：US12278256B2

公开(公告)日：2025-04-15

申请号：US18379404

申请日：2023-10-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungyeol Kim ,  Kyehoon Lee ,  Punjae Choi ,  Sooyoung Park ,  Chunsoon Park ,  Junsung Choi

IPC: H01L27/15 ,  G02F1/1335 ,  G02F1/13357 ,  H01L25/065 ,  G02F1/017 ,  H01L33/06 ,  H01L33/38 ,  H01L33/46

Abstract: A display apparatus, includes: a liquid crystal panel; and a backlight configured to provide light to the liquid crystal panel, the backlight including a substrate and a light-emitting diode (LED) that is mounted on the substrate. The LED includes a plurality of light-emitting layers configured to emit light of different wavelengths. A wavelength of light emitted from each of the plurality of light-emitting layers is greater than or equal to 430 nm and less than or equal to 480 nm.

公开(公告)号：US12230746B2

公开(公告)日：2025-02-18

申请号：US18195534

申请日：2023-05-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyukjun Jang ,  Sungyeol Kim ,  Jaewoo Kim ,  Taeyeon Kim ,  Junsung Choi

IPC: H01L33/58 ,  G02F1/1335 ,  G02F1/13357 ,  H01L25/13

Abstract: Disclosed herein is a display apparatus. The display apparatus includes: a liquid crystal panel; and a backlight unit configured to emit light to the liquid crystal panel. The backlight unit includes: a substrate extending along a first direction; a light emitting diode provided on the substrate; a refractive cover provided on the light emitting diode to refract light emitted from the light emitting diode; and a lens provided on the substrate and the refractive cover, the lens comprising a bottom surface having a first length in the first direction that is less than a second length in a second direction perpendicular to the first direction.