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41.发明授权Method of forming nano crystals and method of manufacturing organic light-emitting display apparatus including thin film having the same 有权形成纳米晶体的方法及其制造有机发光显示装置的方法包括具有该晶体的薄膜公开(公告)号：US09450199B2
公开(公告)日：2016-09-20
申请号：US13963662
申请日：2013-08-09
Applicant: Samsung Display Co., Ltd.
Inventor： Myung-Soo Huh , Cheol-Lae Roh , Seung-Ho Choi
CPC classification number: H01L51/5206 , C23C14/0036 , C23C14/086 , C23C14/5806 , H01L51/5221 , H01L51/5256 , H01L2251/5369
Abstract: A method of forming nanocrystals and a method of manufacturing an organic light-emitting display apparatus that includes a metal compound thin film having the nanocrystals. The method of forming nanocrystals includes forming a metal compound thin film under a first pressure by using a reactive sputtering process, and forming the nanocrystals in the metal compound thin film under a second pressure that is lower than the first pressure by using the reactive sputtering process.
Abstract translation: 一种形成纳米晶体的方法和一种制造包括具有纳米晶体的金属化合物薄膜的有机发光显示装置的方法。 形成纳米晶体的方法包括通过使用反应溅射工艺在第一压力下形成金属化合物薄膜，并且通过使用反应性溅射工艺在低于第一压力的第二压力下在金属化合物薄膜中形成纳米晶体 。
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42.发明申请公开(公告)号：US20160197305A1
公开(公告)日：2016-07-07
申请号：US15073354
申请日：2016-03-17
Applicant: Samsung Display Co., Ltd.
Inventor： Myung-Soo Huh , Sun-Ho Kim , Hyun-Woo Joo , Jae-Hyun Kim
CPC classification number: H01L51/5253 , H01L27/3244 , H01L51/001 , H01L51/5012 , H01L51/56 , H01L2251/558
Abstract: A deposition apparatus is configured to form a deposition layer on a substrate. The deposition apparatus includes a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate, a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate, and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus is also provided. The method includes spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus.
Abstract translation: 沉积装置被配置为在基底上形成沉积层。 沉积设备包括沉积源，其构造成面向基板的第一侧并且向基板喷射一个或多个沉积材料;冷却台，被配置为支撑基板的与基板的第一侧相对的第二面 以及硬化单元，其被配置为硬化从沉积源喷射并且已经到达基板的一个或多个沉积材料。 还提供了通过使用沉积设备在基板上形成薄膜沉积层的方法。 该方法包括通过使用沉积设备的沉积源将一种或多种沉积材料喷射到衬底，同时衬底位于沉积设备的冷却台上。
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公开(公告)号：US09299954B2
公开(公告)日：2016-03-29
申请号：US14331846
申请日：2014-07-15
Applicant: Samsung Display Co., Ltd.
Inventor： Myung-Soo Huh , Jae-Hyun Kim , Jin-Kwang Kim , Cheol-Lae Roh , Suk-Won Jung , Cheol-Min Jang
CPC classification number: H01L51/5256 , H01L51/5253
Abstract: An organic light-emitting apparatus including: a substrate; an organic light-emitting device disposed on the substrate and including a first electrode, a second electrode, and an intermediate layer disposed between the first electrode and the second electrode; and an encapsulation layer provided to cover the organic light-emitting device. The encapsulation layer includes a first inorganic layer including a first fracture point, and a first fracture control layer provided on the first inorganic layer to seal the first fracture point.
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公开(公告)号：US09184413B2
公开(公告)日：2015-11-10
申请号：US13670095
申请日：2012-11-06
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Joong Joo , Myung-Soo Huh , Suk-Won Jung
CPC classification number: H01L51/5256 , H05B33/04 , H05B33/10
Abstract: A flat panel display device provides a sealing structure for comprising and sealing a display unit disposed in a first region on a substrate. The display unit includes the first region and a second region, and a barrier is disposed in the first region on the substrate, on an outer side of the display unit, and adjacent to the second region. The sealing structure contacts the barrier, and includes at least one first layer of an inorganic material and at least one second layer of an organic material. A method of manufacturing the flat panel display device is also disclosed.
Abstract translation: 平板显示装置提供密封结构，用于包括并密封设置在基板上的第一区域中的显示单元。 所述显示单元包括所述第一区域和第二区域，并且所述屏障设置在所述基板的所述第一区域中，所述显示单元的外侧上并且与所述第二区域相邻。 密封结构与屏障接触，并且包括至少一个无机材料的第一层和至少一个有机材料的第二层。 还公开了一种制造平板显示装置的方法。
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公开(公告)号：US09153795B2
公开(公告)日：2015-10-06
申请号：US14298795
申请日：2014-06-06
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Myung-Soo Huh , Tae-Seung Yoon , Jeong-Ho Yi
CPC classification number: C23C14/34 , C23C14/541 , C23C14/568 , C23C16/042 , C23C16/463 , C23C16/54 , H01L51/001 , H01L51/5253 , H01L51/56
Abstract: A thin film encapsulation manufacturing apparatus includes a first cluster configured to form a first inorganic layer on a first substrate, on which an emission unit is formed, by a sputtering process; a second cluster configured to form a first organic layer on the first inorganic layer on the first substrate conveyed from the first cluster by an organic deposition process; a first connection module configured to connect the first cluster and the second cluster, configured to convey the first substrate on which the first inorganic layer is formed from the first cluster to the second cluster, and configured to cool the first substrate in a non-contact manner; and a third cluster configured to form a second inorganic layer on the first organic layer on the first substrate conveyed from the second cluster by a chemical vapor deposition (CVD) process or a plasma enhanced chemical vapor deposition (PECVD) process.
Abstract translation: 一种薄膜封装制造装置，包括：第一簇，被配置为通过溅射工艺在其上形成发光单元的第一基板上形成第一无机层; 第二簇，被配置为通过有机沉积工艺从所述第一簇输送的所述第一基板上的所述第一无机层上形成第一有机层; 第一连接模块，被配置为连接所述第一集群和所述第二集群，所述第一连接模块被配置为将其上形成有所述第一无机层的所述第一基板从所述第一集群传送到所述第二集群，并且被配置为以非接触方式冷却所述第一衬底 方式; 以及第三簇，其被配置为通过化学气相沉积（CVD）工艺或等离子体增强化学气相沉积（PECVD）工艺在由第二簇传送的第一有机层上的第一有机层上形成第二无机层。
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Patent Agency Ranking
公开(公告)号：US20150108435A1
公开(公告)日：2015-04-23
申请号：US14264234
申请日：2014-04-29
Applicant: Samsung Display Co., Ltd.
Inventor： Myung-Soo Huh , Sung-Chul Kim , Jae-Hyun Kim , Jin-Kwang Kim
IPC: H01L51/52
CPC classification number: H01L51/5256
Abstract: An organic light-emitting device includes a substrate, an organic light-emitting diode on the substrate and including a first electrode, a second electrode, and an intermediate layer between the first electrode and the second electrode, and an encapsulation layer covering the organic light-emitting diode. The encapsulation layer includes a first inorganic layer, a first stress control layer and a first organic layer which are sequentially stacked. A Young's modulus of the first stress control layer is greater than a Young's modulus of the first inorganic layer.
Abstract translation: 一种有机发光装置，在基板上具有基板，有机发光二极管，在第一电极和第二电极之间具有第一电极，第二电极和中间层，以及覆盖有机光的封装层 发光二极管。 封装层包括依次堆叠的第一无机层，第一应力控制层和第一有机层。 第一应力控制层的杨氏模量大于第一无机层的杨氏模量。
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公开(公告)号：US20140302626A1
公开(公告)日：2014-10-09
申请号：US13964020
申请日：2013-08-09
Applicant: Samsung Display Co., Ltd.
Inventor： Cheol-Rae Jo , Myung-Soo Huh , Suk-Won Jung , Choel-Min Jang , Jeong-Ho Yi
IPC: H01L51/56
CPC classification number: H01L51/0011 , H01L2251/566
Abstract: Provided are a method of manufacturing a display that may reduce deposition nonuniformity while concurrently manufacturing a plurality of displays, and a deposition apparatus that may be used in the method, wherein the method includes: preparing a mother substrate having a plurality of regions in a matrix pattern, the mother substrate being for forming a plurality of display units corresponding to the plurality of regions; inserting the mother substrate into a deposition chamber, wherein a deposition source is in the deposition chamber; depositing a material on the mother substrate by using a mask including a plurality of parallel stripe-shaped masking sheets extending in a first direction; and cutting the mother substrate along a periphery of each of the plurality of display units to obtain the plurality of displays.
Abstract translation: 提供一种制造可以减少沉积不均匀性同时制造多个显示器的显示器的方法，以及可用于该方法的沉积设备，其中该方法包括：制备具有矩阵中多个区域的母基板 所述母体衬底用于形成对应于所述多个区域的多个显示单元; 将母基板插入沉积室，其中沉积源在沉积室中; 通过使用包括沿第一方向延伸的多个平行的条状掩模片的掩模将材料沉积在母体衬底上; 以及沿着所述多个显示单元中的每一个的周边切割所述母体基板以获得所述多个显示器。
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公开(公告)号：US20130328480A1
公开(公告)日：2013-12-12
申请号：US13670095
申请日：2012-11-06
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Sung-Joong Joo , Myung-Soo Huh , Suk-Won Jung
CPC classification number: H01L51/5256 , H05B33/04 , H05B33/10
Abstract: A flat panel display device provides a sealing structure for comprising and sealing a display unit disposed in a first region on a substrate. The display unit includes the first region and a second region, and a barrier is disposed in the first region on the substrate, on an outer side of the display unit, and adjacent to the second region. The sealing structure contacts the barrier, and includes at least one first layer of an inorganic material and at least one second layer of an organic material. A method of manufacturing the flat panel display device is also disclosed.
Abstract translation: 平板显示装置提供密封结构，用于包括并密封设置在基板上的第一区域中的显示单元。 所述显示单元包括所述第一区域和第二区域，并且所述屏障设置在所述基板的所述第一区域中，所述显示单元的外侧上并且与所述第二区域相邻。 密封结构与屏障接触，并且包括至少一个无机材料的第一层和至少一个有机材料的第二层。 还公开了一种制造平板显示装置的方法。
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公开(公告)号：US10944082B2
公开(公告)日：2021-03-09
申请号：US16045909
申请日：2018-07-26
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Myung-Soo Huh , Suk-Won Jung , Jin-Kwang Kim , In-Kyo Kim , Choel-Min Jang
IPC: H01L51/56 , H01J37/32 , C23C16/452
Abstract: A vapor deposition apparatus for forming a deposition layer on a substrate, the vapor deposition apparatus includes a supply unit configured to receive a first source gas, a reaction space connected to the supply unit, a plasma generator in the reaction space, a first injection unit configured to inject a deposition source material to the substrate, the deposition source material including the first source gas, and a filament unit in the reaction space, the filament unit being connected to a power source.
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公开(公告)号：US10266941B2
公开(公告)日：2019-04-23
申请号：US15261629
申请日：2016-09-09
Applicant: Samsung Display Co., Ltd.
Inventor： Yong-Suk Lee , Myung-Soo Huh , Suk-Won Jung , Jeong-Ho Yi , Mi-Ra An
Abstract: A monomer vaporizing device and a method of controlling the same are disclosed. The monomer vaporizing device includes: a first vaporizer and a second vaporizer that receive a purge gas and vaporize a first monomer and a second monomer, respectively; a first flow pipe and a second flow pipe that are connected to the respective vaporizers and allow the first monomer and the second monomer, vaporized by the respective vaporizers, to flow therethrough; a transition tube that is connected to the first flow pipe and the second flow pipe and supplies at least one of the first monomer and the second monomer to a deposition chamber; and a control valve apparatus that regulates monomer flow into the deposition chamber. The device facilitates smooth and uninterrupted application of monomer to the interior of a deposition chamber.
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