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1.发明申请THIN FILM DEPOSITION DEVICE INCLUDING DEPOSITION-PREVENTING UNIT AND METHOD OF REMOVING DEPOSITS THEREOF 审中-公开薄膜沉积装置，包括沉积单元及其沉积物的方法公开(公告)号：US20140227442A1
公开(公告)日：2014-08-14
申请号：US13924456
申请日：2013-06-21
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Myung-Soo Huh , Sun-Ho Kim , Cheol-Rae Jo , Hyun-Woo Joo
IPC: C23C16/44
CPC classification number: C23C16/4407 , C23C14/564 , C23C16/4401
Abstract: Provided is a thin film deposition device including a deposition-preventing unit and a method of removing deposits thereof. The method includes: separating a deposition-preventing unit including at least one deposition-preventing plate and a deformation unit coupled to an outer surface of the at feast one deposition-preventing plate from a chamber of the thin film deposition device; and removing a film formation layer from the deposition-preventing plate.
Abstract translation: 本发明提供一种薄膜沉积装置，其包括防沉积单元及其沉积物的去除方法。 该方法包括：将包括至少一个防沉积板和变形单元的沉积防止单元与薄膜沉积装置的室耦合到一个防沉积板的外表面; 以及从防沉积板去除成膜层。
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2.发明申请公开(公告)号：US20160197305A1
公开(公告)日：2016-07-07
申请号：US15073354
申请日：2016-03-17
Applicant: Samsung Display Co., Ltd.
Inventor： Myung-Soo Huh , Sun-Ho Kim , Hyun-Woo Joo , Jae-Hyun Kim
CPC classification number: H01L51/5253 , H01L27/3244 , H01L51/001 , H01L51/5012 , H01L51/56 , H01L2251/558
Abstract: A deposition apparatus is configured to form a deposition layer on a substrate. The deposition apparatus includes a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate, a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate, and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus is also provided. The method includes spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus.
Abstract translation: 沉积装置被配置为在基底上形成沉积层。 沉积设备包括沉积源，其构造成面向基板的第一侧并且向基板喷射一个或多个沉积材料;冷却台，被配置为支撑基板的与基板的第一侧相对的第二面 以及硬化单元，其被配置为硬化从沉积源喷射并且已经到达基板的一个或多个沉积材料。 还提供了通过使用沉积设备在基板上形成薄膜沉积层的方法。 该方法包括通过使用沉积设备的沉积源将一种或多种沉积材料喷射到衬底，同时衬底位于沉积设备的冷却台上。
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3.发明授权公开(公告)号：US09590207B2
公开(公告)日：2017-03-07
申请号：US15073354
申请日：2016-03-17
Applicant: Samsung Display Co., Ltd.
Inventor： Myung-Soo Huh , Sun-Ho Kim , Hyun-Woo Joo , Jae-Hyun Kim
CPC classification number: H01L51/5253 , H01L27/3244 , H01L51/001 , H01L51/5012 , H01L51/56 , H01L2251/558
Abstract: A deposition apparatus is configured to form a deposition layer on a substrate. The deposition apparatus includes a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate, a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate, and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus is also provided. The method includes spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus.
Abstract translation: 沉积装置被配置为在基底上形成沉积层。 沉积设备包括沉积源，其构造成面向基板的第一侧并且向基板喷射一个或多个沉积材料;冷却台，被配置为支撑基板的与基板的第一侧相对的第二面 以及硬化单元，其被配置为硬化从沉积源喷射并且已经到达基板的一个或多个沉积材料。 还提供了通过使用沉积设备在基板上形成薄膜沉积层的方法。 该方法包括通过使用沉积设备的沉积源将一种或多种沉积材料喷射到衬底，同时衬底位于沉积设备的冷却台上。
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4.发明授权公开(公告)号：US09306192B2
公开(公告)日：2016-04-05
申请号：US13965182
申请日：2013-08-12
Applicant: Samsung Display Co., LTD
Inventor： Myung-Soo Huh , Sun-Ho Kim , Hyun-Woo Joo , Jae-Hyun Kim
CPC classification number: H01L51/5253 , H01L27/3244 , H01L51/001 , H01L51/5012 , H01L51/56 , H01L2251/558
Abstract: A deposition apparatus is configured to form a deposition layer on a substrate. The deposition apparatus includes a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate, a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate, and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus is also provided. The method includes spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus.
Abstract translation: 沉积装置被配置为在基底上形成沉积层。 沉积设备包括沉积源，其构造成面向基板的第一侧并且向基板喷射一个或多个沉积材料;冷却台，被配置为支撑基板的与基板的第一侧相对的第二面 以及硬化单元，其被配置为硬化从沉积源喷射并且已经到达基板的一个或多个沉积材料。 还提供了通过使用沉积设备在基板上形成薄膜沉积层的方法。 该方法包括通过使用沉积设备的沉积源将一种或多种沉积材料喷射到衬底，同时衬底位于沉积设备的冷却台上。
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公开(公告)号：US20180305809A1
公开(公告)日：2018-10-25
申请号：US16024626
申请日：2018-06-29
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Sun-Ho Kim , Myung-Soo Huh , Jeong-Ho Yi , Cheol-Rae Jo , Hyun-Woo Joo , Yong-Suk Lee
CPC classification number: C23C14/564 , C23C14/24 , C23C16/4412 , H01L21/56 , H01L51/0008
Abstract: A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening.
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Patent Agency Ranking
公开(公告)号：US10081862B2
公开(公告)日：2018-09-25
申请号：US14012916
申请日：2013-08-28
Applicant: Samsung Display Co., Ltd.
Inventor： Sun-Ho Kim , Myung-Soo Huh , Jeong-Ho Yi , Cheol-Rae Jo , Hyun-Woo Joo , Yong-Suk Lee
CPC classification number: C23C14/564 , C23C14/24 , C23C16/4412 , H01L21/56 , H01L51/0008
Abstract: A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening.
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公开(公告)号：US09653701B2
公开(公告)日：2017-05-16
申请号：US14987962
申请日：2016-01-05
Applicant: Samsung Display Co., Ltd.
Inventor： Seung-Ho Choi , Hyun-Woo Joo , Myung-Soo Huh
CPC classification number: H01L51/5246 , H01L21/7806 , H01L51/0021 , H01L51/003 , H01L51/0097 , H01L51/5206 , H01L51/5221 , H01L51/5275 , H01L51/56 , H01L2251/5338 , H01L2251/558 , Y02E10/549 , Y02P70/521
Abstract: A flexible display apparatus includes a flexible substrate, a display layer disposed on one surface of the flexible substrate and including a plurality of pixels, graphene disposed on a surface opposing the one surface of the flexible substrate, and an encapsulation layer covering the display layer.
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公开(公告)号：US20160133871A1
公开(公告)日：2016-05-12
申请号：US14987962
申请日：2016-01-05
Applicant: Samsung Display Co., Ltd.
Inventor： Seung-Ho Choi , Hyun-Woo Joo , Myung-Soo Huh
CPC classification number: H01L51/5246 , H01L21/7806 , H01L51/0021 , H01L51/003 , H01L51/0097 , H01L51/5206 , H01L51/5221 , H01L51/5275 , H01L51/56 , H01L2251/5338 , H01L2251/558 , Y02E10/549 , Y02P70/521
Abstract: A flexible display apparatus includes a flexible substrate, a display layer disposed on one surface of the flexible substrate and including a plurality of pixels, graphene disposed on a surface opposing the one surface of the flexible substrate, and an encapsulation layer covering the display layer.
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公开(公告)号：US09263698B2
公开(公告)日：2016-02-16
申请号：US14313009
申请日：2014-06-24
Applicant: Samsung Display Co., Ltd.
Inventor： Seung-Ho Choi , Hyun-Woo Joo , Myung-Soo Huh
IPC: H01L21/301 , H01L51/52 , H01L51/56 , H01L51/00 , H01L21/78
CPC classification number: H01L51/5246 , H01L21/7806 , H01L51/0021 , H01L51/003 , H01L51/0097 , H01L51/5206 , H01L51/5221 , H01L51/5275 , H01L51/56 , H01L2251/5338 , H01L2251/558 , Y02E10/549 , Y02P70/521
Abstract: A flexible display apparatus includes a flexible substrate, a display layer disposed on one surface of the flexible substrate and including a plurality of pixels, graphene disposed on a surface opposing the one surface of the flexible substrate, and an encapsulation layer covering the display layer.
Abstract translation: 柔性显示装置包括柔性基板，设置在柔性基板的一个表面上并且包括多个像素的显示层，设置在与柔性基板的一个表面相对的表面上的石墨烯以及覆盖显示层的封装层。
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公开(公告)号：US20150188080A1
公开(公告)日：2015-07-02
申请号：US14313009
申请日：2014-06-24
Applicant: Samsung Display Co., Ltd.
Inventor： Seung-Ho Choi , Hyun-Woo Joo , Myung-Soo Huh
CPC classification number: H01L51/5246 , H01L21/7806 , H01L51/0021 , H01L51/003 , H01L51/0097 , H01L51/5206 , H01L51/5221 , H01L51/5275 , H01L51/56 , H01L2251/5338 , H01L2251/558 , Y02E10/549 , Y02P70/521
Abstract: A flexible display apparatus includes a flexible substrate, a display layer disposed on one surface of the flexible substrate and including a plurality of pixels, graphene disposed on a surface opposing the one surface of the flexible substrate, and an encapsulation layer covering the display layer.
Abstract translation: 柔性显示装置包括柔性基板，设置在柔性基板的一个表面上并且包括多个像素的显示层，设置在与柔性基板的一个表面相对的表面上的石墨烯以及覆盖显示层的封装层。
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