Invention Grant
US09450199B2 Method of forming nano crystals and method of manufacturing organic light-emitting display apparatus including thin film having the same
有权
形成纳米晶体的方法及其制造有机发光显示装置的方法包括具有该晶体的薄膜
- Patent Title: Method of forming nano crystals and method of manufacturing organic light-emitting display apparatus including thin film having the same
- Patent Title (中): 形成纳米晶体的方法及其制造有机发光显示装置的方法包括具有该晶体的薄膜
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Application No.: US13963662Application Date: 2013-08-09
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Publication No.: US09450199B2Publication Date: 2016-09-20
- Inventor: Myung-Soo Huh , Cheol-Lae Roh , Seung-Ho Choi
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2013-0014649 20130208
- Main IPC: H01L51/52
- IPC: H01L51/52 ; C23C14/00 ; C23C14/08 ; C23C14/58
Abstract:
A method of forming nanocrystals and a method of manufacturing an organic light-emitting display apparatus that includes a metal compound thin film having the nanocrystals. The method of forming nanocrystals includes forming a metal compound thin film under a first pressure by using a reactive sputtering process, and forming the nanocrystals in the metal compound thin film under a second pressure that is lower than the first pressure by using the reactive sputtering process.
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