METHODS FOR FABRICATING SUPERCONDUCTING INTEGRATED CIRCUITS

    公开(公告)号:US20230240154A1

    公开(公告)日:2023-07-27

    申请号:US18010283

    申请日:2021-06-22

    CPC classification number: H10N60/01 H10N60/80

    Abstract: Methods of forming superconducting integrated circuits are discussed. The method includes depositing a first superconducting metal layer to overlie at least a portion of a substrate, depositing a dielectric layer to cover a first region of the first superconducting metal layer, pattering the dielectric layer to expose at least a portion of the first region of the first superconducting metal layer and form an opening, and depositing a second superconducting metal layer at an ambient temperature that is less than a melting temperature of the second superconducting metal layer such that the second superconducting metal layer fills the opening and conductively contacts the at least a portion of the first region of the first superconducting metal layer.

    SIDE-GATED SEMICONDUCTOR-SUPERCONDUCTOR HYBRID DEVICES

    公开(公告)号:US20230147168A1

    公开(公告)日:2023-05-11

    申请号:US17907530

    申请日:2020-03-31

    CPC classification number: H10N60/10 H10N69/00 H10N60/01 H10N60/85

    Abstract: One aspect provides semiconductor-superconductor hybrid device comprises a substrate, a first semiconductor component arranged on the substrate, a superconductor component arranged to be capable of energy level hybridisation with the first semiconductor component, and a second semiconductor component arranged as a gate electrode for gating the first semiconductor component. Another aspect provides a semiconductor-superconductor hybrid device, comprising: a substrate; a semiconductor component arranged on the substrate; a gate electrode for gating the semiconductor component; and a superconductor component capable of undergoing energy level hybridisation with the semiconductor component; wherein the gate electrode is arranged in a channel in the substrate. Also provided are methods of fabricating the semiconductor-superconductor hybrid devices.

    PROGRESSIVE THERMAL DRYING CHAMBER FOR QUANTUM CIRCUITS

    公开(公告)号:US20240298550A1

    公开(公告)日:2024-09-05

    申请号:US18661609

    申请日:2024-05-11

    CPC classification number: H10N60/01 G06N10/00 H01L21/67034 H10N69/00

    Abstract: Techniques are described herein that are capable of progressively thermally drying a quantum circuit. An inert gas is progressively heated by a heater element to provide a heated inert gas. Heated ambient air and the heated inert gas combine in a heating channel, causing a combination of the heated ambient air and the heated inert gas to flow into a probe compartment to progressively thermally dry a quantum circuit therein. A flow rate of the inert gas is controlled to cause the combination to have a relative humidity less than or equal to a threshold. A temperature of the heater element may be controlled to be approximately equal to a progressively increasing target temperature within a tolerance of 3.0° C. Heating of the inert gas may be initiated based on detection of the inert gas, and the flow and heating of the inert gas may be automatically discontinued.

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