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31.发明授权Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing 有权加热静电颗粒捕集器，用于原位真空管线清洗的底层处理公开(公告)号：US06354241B1
公开(公告)日：2002-03-12
申请号：US09354925
申请日：1999-07-15
申请人： Tsutomu Tanaka , Chau Nguyen , Hari Ponnekanti , Kevin Fairbairn , Sébastien Raoux , Mark Fodor
发明人： Tsutomu Tanaka , Chau Nguyen , Hari Ponnekanti , Kevin Fairbairn , Sébastien Raoux , Mark Fodor
IPC分类号： C23C1600
CPC分类号： C23C16/4412 , B01D49/00 , B01D51/02
摘要： An apparatus and method for preventing particulate matter and residue build-up within a vacuum exhaust line of a semiconductor-processing device. The apparatus includes a vessel chamber having an inlet, an outlet and a fluid conduit between the two that fluidly couples the outlet with the inlet. The fluid conduit includes first and second collection sections. The first collection section includes a first plurality of electrodes aligned parallel to a first plane and the second collection section includes a second plurality of electrodes aligned parallel to a second plane that is substantially perpendicular to the first plane. The electrodes are connected to a voltage differential to form an electrostatic particle collector that traps electrically charged particles and particulate matter flowing through the fluid conduit. Particles are collected on the electrodes within the fluid conduit during substrate processing operations such as CVD deposition steps. Then, during a chamber clean operation, unreacted etchant gases used to clean the substrate processing chamber are exhausted through the foreline and into the apparatus of the present invention where they react with the collected particles and powder to convert the solid material into gaseous matter that can be pumped through the foreline without damaging the vacuum pump or other processing equipment.
摘要翻译： 一种用于防止半导体处理装置的真空排气管线内的颗粒物质和残渣积聚的装置和方法。 该装置包括容器腔室，其具有入口，出口和两者之间的流体导管，以使出口与入口流体耦合。 流体导管包括第一和第二收集部分。 第一收集部分包括平行于第一平面排列的第一多个电极，第二收集部分包括平行于基本上垂直于第一平面的第二平面排列的第二多个电极。 电极连接到电压差以形成静电颗粒收集器，其捕获带电粒子和流过流体导管的颗粒物质。 在诸如CVD沉积步骤的衬底处理操作期间，将粒子收集在流体导管内的电极上。 然后，在室清洁操作期间，用于清洁基板处理室的未反应的蚀刻剂气体通过前级管线排出并进入本发明的装置中，它们与收集的颗粒和粉末反应，将固体材料转化成气态物质， 泵送通过前级管线，而不会损坏真空泵或其他加工设备。
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32.发明申请System and process for agglomeration and processing of carbonaceous fines and dust 失效碳质细粉和灰尘的聚集和加工的系统和工艺公开(公告)号：US20020014155A1
公开(公告)日：2002-02-07
申请号：US09768714
申请日：2001-01-24
IPC分类号： B01D047/00
摘要： A system and process for agglomerating and processing carbonaceous fines is provided. The process comprises powdering the carbonaceous fines, mixing the powdered carbonaceous fines with an organic liquid creating a slurry, adding a predetermined amount of an aqueous electrolyte to the slurry creating agglomerated particles, settling the large agglomerated particles resulting in a settled mixture of agglomerated coal fines and reagent liquor, and separating the agglomerated coal fines from the reagent liquor.
摘要翻译： 提供了一种用于聚集和处理碳质细粉的系统和方法。 该方法包括粉碎碳质细粉，将粉状碳质细粉与有机液体混合，产生浆料，向浆液中加入预定量的含水电解液，产生凝聚的颗粒，沉淀大的附聚颗粒，形成凝聚的粉煤灰的混合物 和试剂液，并将凝聚的煤粉与试剂液分离。
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公开(公告)号：US6099622A
公开(公告)日：2000-08-08
申请号：US370247
申请日：1999-08-09
CPC分类号： B01D50/002 , B01D51/02 , Y10S55/25
摘要： An agglomeration and precipitation assembly which includes an agglomeration device in combination with a precipitation device. The agglomeration device is intended to receive a turbulent gas stream containing fine suspended particles and to discharge the stream in which the major part of the fine particles have agglomerated in the form of larger particles. The precipitation device is provided downstream of the agglomeration device to receive the stream coming from the agglomeration device and to separate the larger particles from the gas stream. The fine particles can be separated from a turbulent gas stream by first agglomerating the fine particles in the form of larger particles, and then separating the larger particles by precipitation.
摘要翻译： 凝聚和沉淀组合，其包括与沉淀装置组合的附聚装置。 凝聚装置旨在接收含有细小悬浮颗粒的湍流气流并排出其中大部分细颗粒以较大颗粒的形式凝聚的物流。 沉淀装置设置在附聚装置的下游，以接收来自附聚装置的流并将较大颗粒与气流分离。 可以通过首先以更大的颗粒的形式使微粒团聚，然后通过沉淀分离较大的颗粒，从而将细颗粒与湍流气流分离。
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公开(公告)号：US5246472A
公开(公告)日：1993-09-21
申请号：US37709
申请日：1993-03-25
CPC分类号： F01N3/0217 , B01D46/2411 , B01D51/02 , F01N13/1894 , F01N3/0211 , F01N2330/10 , F01N2450/24 , F01N2450/30 , F01N2470/02 , F01N2470/14 , F01N2470/18 , Y02T10/20 , Y10S55/30
摘要： An engine exhaust filtering system (10) filters carbon particles from exhaust gases. A length of pipe (12) leads from the engine to promote the agglomeration of carbon particles in the exhaust gases. The exhaust gases then pass through a diffuser (36) having a series of chokes (38) to promote further turbulence and agglomeration of the carbon particles. A diffuser (36) directs particles for uniform distribution over a filter cartridge (22). After passing through the filter cartridge (22), the filtered exhaust gases are then expelled into the atmosphere. The filter cartridge (22) is removable and can be reused after the particles are removed.
摘要翻译： 发动机排气过滤系统（10）从废气中过滤碳颗粒。 管道（12）的长度从发动机引出，以促进废气中的碳颗粒的聚集。 然后废气通过具有一系列扼流圈（38）的扩散器（36），以促进碳颗粒的进一步湍流和附聚。 扩散器（36）引导颗粒均匀分布在过滤器滤芯（22）上。 在通过过滤器滤芯（22）之后，将过滤的废气排出到大气中。 过滤器滤芯（22）是可移除的，并且可以在颗粒被去除之后重新使用。
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公开(公告)号：US4428866A
公开(公告)日：1984-01-31
申请号：US409686
申请日：1982-08-19
摘要： A mixture of an alkyl amine, e.g., tri-n-propylamine and an SO.sub.3 -containing acid, preferably, sulfamic acid is injected into the flue gas stream of a coal-fired utility boiler to reduce the electrical resistivity of the fly-ash particles and to increase their mean particle size, thereby improving their recovery by electrostatic precipitation or by mechanical separation, with consequent reduction in stack emission.
摘要翻译： 将烷基胺，例如三正丙胺和含SO 3的酸，优选氨基磺酸的混合物注入燃煤公用事业锅炉的烟道气流中，以降低飞灰颗粒的电阻率 并增加它们的平均粒径，从而通过静电沉淀或机械分离来改善它们的恢复，从而减少堆叠发射。
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公开(公告)号：US4352747A
公开(公告)日：1982-10-05
申请号：US25327
申请日：1979-03-30
摘要： A mixture of an alkyl amine, e.g., tri-n-propylamine and an SO.sub.3 -containing acid, preferably, sulfamic acid is injected into the flue gas stream of a coal-fired utility boiler to reduce the electrical resistivity of the fly-ash particles and to increase their mean particle size, thereby improving their recovery by electrostatic precipitation or by mechanical separation, with consequent reduction in stack emissions.
摘要翻译： 将烷基胺，例如三正丙胺和含SO 3的酸，优选氨基磺酸的混合物注入燃煤公用事业锅炉的烟道气流中，以降低飞灰颗粒的电阻率 并增加其平均粒度，从而通过静电沉淀或机械分离改善其回收率，从而减少堆排放。
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37.发明授权Method and apparatus for separating and collecting fine particles in gas with stream of falling molten metal drops 失效用于分离和收集具有下降的金属液体流的气体中的精细颗粒的方法和装置
公开(公告)号：US3823530A
公开(公告)日：1974-07-16
申请号：US31600372
申请日：1972-12-18
申请人： NIPPON KOKAN KK
发明人： MIYASHITA T , CHAUSSY L
摘要： A method and apparatus for separating fine particles such as soot contained in hot gases, in which the gas is passed upward countercurrently to contact with the descending molten metal drops, whereby fine particles contained in the gas are attached to the falling molten metal drops and are thus separated from the gas.
摘要翻译： 一种用于分离热气体中所含的微粒例如煤气的方法和装置，其中气体逆流地向上流动以与下降的熔融金属液滴接触，由此气体中包含的细颗粒附着在下落的熔融金属液滴上，并且是 从而与气体分离。
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公开(公告)号：US3722187A
公开(公告)日：1973-03-27
申请号：US3722187D
申请日：1970-08-21
申请人： WORTHINGTON CORP
CPC分类号： B01D51/02 , F04C29/026
摘要： A liquid and gas separating assembly for an air compressor. The assembly includes an outer shell, an inner shell within the outer shell and a liquid-gas separating element within the inner shell. A gas laden with liquid particles, such as oil laden air from an air compressor, is admitted to the outer shell in which a large amount of the entrained liquid settles out of the gas into a pool of stored liquid partially submerging the inner shell in the lower portion of the outer shell. The gas passes into the inner shell through an inlet above the pool of liquid and then through the liquid-gas separating element. The separated gas and liquid are removed from the two shells through different outlets.
摘要翻译： 一种用于空气压缩机的液体和气体分离组件。 组件包括外壳，外壳内的内壳和内壳内的液气分离元件。 含有液体颗粒的气体，例如来自空气压缩机的含油空气，被允许进入外壳，其中大量夹带的液体从气体中沉淀到储存的液体池中，部分地将内壳浸没在 外壳的下部。 气体通过液体池上方的入口进入内壳，然后通过液气分离元件。 分离的气体和液体通过不同的出口从两个壳体中去除。
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公开(公告)号：US09675979B2
公开(公告)日：2017-06-13
申请号：US14733674
申请日：2015-06-08
发明人： James Clyde Hassell
IPC分类号： B01D45/00 , B01D53/14 , B03C1/30 , B01D51/02 , B01D45/16 , B01D47/06 , B01D50/00 , C10L3/10 , F17D3/01 , F17D3/12 , F17D3/16
CPC分类号： B03C1/30 , B01D45/16 , B01D47/06 , B01D50/004 , B01D51/02 , C10L3/101 , C10L2290/54 , C10L2290/545 , F17D1/088 , F17D1/16 , F17D3/00 , F17D3/01 , F17D3/12 , F17D3/16
摘要： Black powder flowing with hydrocarbons in a hydrocarbon pipeline is converted into a magnetorheological slurry by implementing wet scrubbing in the hydrocarbon pipeline. A flow of the magnetorheological slurry through the hydrocarbon pipeline is controlled.
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公开(公告)号：US08398744B2
公开(公告)日：2013-03-19
申请号：US12886627
申请日：2010-09-21
IPC分类号： B03C3/019
摘要： A method, apparatus and system for minimizing a quantity of particulate matter entrained within a gas stream is provided. A coarse filter removes at least a portion of particulate matter having a relatively-large particle size from the gas stream. An agglomerator agglomerates particulate matter having a relatively-small particle size remaining in the gas stream into particulate clusters after the portion of the particulate matter having the relatively-large particle size has been removed by the coarse filter. An injector introduces an agglomerating material into the gas stream before the gas stream enters the agglomerator. The agglomerating material promotes agglomeration of the particulate matter having the relatively-small particle size into the particulate clusters. And a second filter receives the gas stream and removes at least a portion of the particulate clusters entrained within the gas stream exiting the agglomerator.
摘要翻译： 提供了一种用于使携带在气流内的颗粒物质的量最小化的方法，装置和系统。 粗过滤器从气流中除去至少一部分具有相对较大颗粒尺寸的颗粒物质。 在通过粗过滤器去除了具有相对较大粒径的颗粒物的部分之后，团聚体将具有残留在气流中的相对小粒径的颗粒物质聚集成颗粒团。 在气流进入附聚器之前，喷射器将附聚物引入气流中。 附聚材料促进具有相对小的粒度的颗粒物质聚集成颗粒团。 并且第二过滤器接收气流并除去夹带在离开凝聚器的气流内的至少一部分颗粒团。
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