公开(公告)号：US10833118B2

公开(公告)日：2020-11-10

申请号：US15001065

申请日：2016-01-19

申请人： XINTEC INC.

发明人： Tsang-Yu Liu ,  Chia-Ming Cheng

IPC分类号： H01L27/146

摘要： A manufacturing method of a chip package includes the following steps. A light transmissive substrate is bonded to a first surface of a wafer, such that a dam element between the light transmissive substrate and the wafer covers a conductive pad of the wafer. A second surface of the wafer facing away from the first surface is etched, such that a hollow region and a trench selectively communicated with the hollow region are synchronously formed in the wafer. A first isolation layer on the conductive pad is etched to expose the conductive pad through the hollow region.

公开(公告)号：US10109663B2

公开(公告)日：2018-10-23

申请号：US15258594

申请日：2016-09-07

申请人： XINTEC INC.

发明人： Yu-Lung Huang ,  Tsang-Yu Liu ,  Yi-Ming Chang ,  Hsin Kuan

IPC分类号： H01L27/146

摘要： A chip package including a substrate is provided. The substrate has a first surface and a second surface opposite thereto. The substrate includes a sensing region. A cover plate is on the first surface and covers the sensing region. A shielding layer covers a sidewall of the cover plate and extends towards the second surface. The shielding layer has an inner surface adjacent to the cover plate and has an outer surface away from the cover plate. The length of the outer surface extending towards the second surface is less than that of the inner surface extending towards the second surface, and is not less than that of the sidewall of the cover plate. A method of forming the chip package is also provided.

公开(公告)号：US10049252B2

公开(公告)日：2018-08-14

申请号：US14967153

申请日：2015-12-11

申请人： XINTEC INC.

发明人： Yen-Shih Ho ,  Shu-Ming Chang ,  Tsang-Yu Liu ,  Hsing-Lung Shen

IPC分类号： G06K9/00 ,  H01L21/48 ,  H01L23/498 ,  G06F3/041

摘要： A chip package includes a substrate, a capacitive sensing layer and a computing chip. The substrate has a first surface and a second surface opposite to the first surface, and the capacitive sensing layer is disposed above the second surface and having a third surface opposite to the second surface, which the capacitive sensing layer includes a plurality of capacitive sensing electrodes and a plurality of metal wires. The capacitive sensing electrodes are on the second surface, and the metal wires are on the capacitive sensing electrodes. The computing chip is disposed above the third surface and electrically connected to the capacitive sensing electrodes.

公开(公告)号：US09997473B2

公开(公告)日：2018-06-12

申请号：US15409289

申请日：2017-01-18

申请人： XINTEC INC.

发明人： Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Sheng Lin ,  Chaung-Lin Lai

IPC分类号： H01L23/00 ,  H01L21/78 ,  H01L21/52 ,  H01L21/54 ,  H01L23/18 ,  H01L23/055 ,  H01L21/48

CPC分类号： H01L23/562 ,  H01L21/4817 ,  H01L21/52 ,  H01L21/54 ,  H01L21/76898 ,  H01L21/78 ,  H01L23/055 ,  H01L23/18 ,  H01L23/3114 ,  H01L23/522 ,  H01L24/16 ,  H01L25/065 ,  H01L27/14618 ,  H01L27/14687 ,  H01L2224/16237

摘要： A chip package including a substrate is provided. The substrate has a first surface and a second surface opposite thereto. The substrate includes a sensing or device region which is adjacent to the first surface. A recess is in the substrate. The recess extends from the second surface towards the first surface, and vertically overlaps the sensing or device region. A redistribution layer is electrically connected to the sensing or device region, and extends from the second surface into the recess. A method of forming the chip package is also provided.

公开(公告)号：US09685354B2

公开(公告)日：2017-06-20

申请号：US14676478

申请日：2015-04-01

申请人： XINTEC INC.

发明人： Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Sheng Lin ,  Yi-Ming Chang

IPC分类号： B26D1/09 ,  H01L21/67 ,  H01L21/683 ,  B26D7/18

CPC分类号： H01L21/67092 ,  B26D1/095 ,  B26D7/1863 ,  H01L21/6838 ,  Y10T83/0267 ,  Y10T225/10 ,  Y10T225/12 ,  Y10T225/364

摘要： An embodiment of this invention provides a separation apparatus for separating a stacked article, such as a semiconductor chip package with sensing functions, comprising a substrate and a cap layer formed on the substrate. The separation apparatus comprises a vacuum nozzle head including a suction pad having a top surface and a bottom surface, a through hole penetrating the top surface and the bottom surface of the suction pad, and a hollow vacuum pipe connecting the through hole to a vacuum pump; a stage positing under the vacuum nozzle head and substantially aligning with the suction pad; a control means coupling to the vacuum nozzle head to lift upward or lower down the vacuum nozzle head; and a first cutter comprising a first cutting body and a first knife connecting to the first cutting body. The cap layer is pressed against by the bottom surface of the suction pad and sucked by the suction pad of the vacuum nozzle head after the vacuum pump begins to vacuum the air within the hollow vacuum pipe and the through hole. Then, the first cutter cuts into the interface between the substrate and the cap layer, and the cap lay is separated from the substrate by the suction force of the vacuum nozzle head and the lift force generated by the upward movement of the vacuum nozzle head.

公开(公告)号：US09653422B2

公开(公告)日：2017-05-16

申请号：US14673657

申请日：2015-03-30

申请人： XINTEC INC.

发明人： Chia-Lun Shen ,  Yi-Ming Chang ,  Tsang-Yu Liu ,  Yen-Shih Ho

IPC分类号： H01L23/00 ,  H01L21/78 ,  H01L21/306 ,  H01L21/48

CPC分类号： H01L24/32 ,  H01L21/30604 ,  H01L21/48 ,  H01L21/78 ,  H01L24/05 ,  H01L24/09 ,  H01L24/33 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L24/83 ,  H01L2224/02371 ,  H01L2224/02373 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/32057 ,  H01L2224/32225 ,  H01L2224/451 ,  H01L2224/48091 ,  H01L2224/48106 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2224/8385 ,  H01L2224/8389 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/12042 ,  H01L2924/37001 ,  H01L2924/00 ,  H01L2224/45099

摘要： A method for forming a chip package is provided. The method includes providing a first substrate and a second substrate. The first substrate is attached onto the second substrate by an adhesive layer. A first opening is formed to penetrate the first substrate and the adhesive layer and separate the first substrate and the adhesive layer into portions. A chip package formed by the method is also provided.

公开(公告)号：US09640488B2

公开(公告)日：2017-05-02

申请号：US15008202

申请日：2016-01-27

申请人： XINTEC INC.

发明人： Yi-Min Lin ,  Yi-Ming Chang ,  Shu-Ming Chang ,  Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Ming Cheng

IPC分类号： H01L23/552 ,  H01L21/48 ,  H01L21/78 ,  H01L29/06 ,  H01L23/00 ,  H01L23/544 ,  H01L25/065

CPC分类号： H01L23/552 ,  H01L21/4814 ,  H01L21/78 ,  H01L23/544 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/45 ,  H01L24/48 ,  H01L24/85 ,  H01L24/92 ,  H01L25/0657 ,  H01L29/0657 ,  H01L2223/5446 ,  H01L2224/02313 ,  H01L2224/0235 ,  H01L2224/02371 ,  H01L2224/0239 ,  H01L2224/03614 ,  H01L2224/04042 ,  H01L2224/04105 ,  H01L2224/05548 ,  H01L2224/05571 ,  H01L2224/451 ,  H01L2224/48225 ,  H01L2224/48227 ,  H01L2224/4847 ,  H01L2224/92 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10157 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/01078 ,  H01L2924/01028 ,  H01L2924/0105 ,  H01L2924/01013 ,  H01L2924/01047 ,  H01L2924/01022 ,  H01L2924/01074 ,  H01L2924/00012 ,  H01L2224/85 ,  H01L2924/014 ,  H01L2224/85399 ,  H01L2224/05599

摘要： An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and a second surface; a first recess extending from the first surface towards the second surface; a second recess extending from a bottom of the first recess towards the second surface, wherein a sidewall and the bottom of the first recess and a second sidewall and a second bottom of the second recess together form an exterior side surface of the semiconductor substrate; a wire layer disposed over the first surface and extending into the first recess and/or the second recess; an insulating layer positioned between the wire layer and the semiconductor substrate; and a metal light shielding layer disposed over the first surface and having at least one hole, wherein a shape of the at least one hole is a quadrangle.

公开(公告)号：US09601460B2

公开(公告)日：2017-03-21

申请号：US14618413

申请日：2015-02-10

申请人： XINTEC INC.

发明人： Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Sheng Lin ,  Chia-Ming Cheng ,  Shu-Ming Chang ,  Tzu-Wen Tseng

IPC分类号： H01L23/06 ,  H01L23/00 ,  H01L23/31 ,  H01L29/06 ,  H01L23/525

CPC分类号： H01L24/94 ,  H01L23/3114 ,  H01L23/3178 ,  H01L23/525 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L29/0657 ,  H01L2224/0224 ,  H01L2224/02245 ,  H01L2224/02255 ,  H01L2224/0226 ,  H01L2224/02375 ,  H01L2224/02379 ,  H01L2224/0345 ,  H01L2224/03462 ,  H01L2224/03464 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05548 ,  H01L2224/05571 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/06165 ,  H01L2224/10135 ,  H01L2224/10145 ,  H01L2224/94 ,  H01L2924/3512 ,  H01L2224/03 ,  H01L2924/00014 ,  H01L2924/00012 ,  H01L2924/0665

摘要： A chip package including a semiconductor substrate is provided. A recess is in the semiconductor substrate and adjoins a side edge of the semiconductor substrate, wherein the semiconductor substrate has at least one spacer protruding from the bottom of the recess. A conducting layer is disposed on the semiconductor substrate and extends into the recess.

公开(公告)号：US09437478B2

公开(公告)日：2016-09-06

申请号：US14339360

申请日：2014-07-23

申请人： XINTEC INC.

发明人： Yen-Shih Ho ,  Tsang-Yu Liu ,  Shu-Ming Chang ,  Yu-Lung Huang ,  Chao-Yen Lin ,  Wei-Luen Suen ,  Chien-Hui Chen ,  Ho-Yin Yiu

IPC分类号： H01L21/768 ,  H01L23/31 ,  H01L21/56 ,  G06K9/00 ,  H01L23/00 ,  H01L23/525 ,  H01L23/532

CPC分类号： H01L21/76802 ,  G06K9/00053 ,  H01L21/561 ,  H01L21/76877 ,  H01L23/3121 ,  H01L23/3135 ,  H01L23/3192 ,  H01L23/525 ,  H01L23/5329 ,  H01L24/05 ,  H01L24/06 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L2224/02166 ,  H01L2224/02381 ,  H01L2224/024 ,  H01L2224/04042 ,  H01L2224/05548 ,  H01L2224/05554 ,  H01L2224/05558 ,  H01L2224/05567 ,  H01L2224/05572 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05687 ,  H01L2224/0569 ,  H01L2224/06135 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/48611 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48655 ,  H01L2224/48669 ,  H01L2224/48687 ,  H01L2224/4869 ,  H01L2224/73265 ,  H01L2224/8592 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/181 ,  H01L2224/03 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/05552

摘要： A chip package including a chip is provided. The chip includes a sensing region or device region adjacent to an upper surface of the chip. A sensing array is located in the sensing region or device region and includes a plurality of sensing units. A plurality of first openings is located in the chip and correspondingly exposes the sensing units. A plurality of conductive extending portions is disposed in the first openings and is electrically connected to the sensing units, wherein the conductive extending portions extend from the first openings onto the upper surface of the chip. A method for forming the chip package is also provided.

摘要翻译： 提供了包括芯片的芯片封装。 芯片包括与芯片的上表面相邻的感测区域或器件区域。 感测阵列位于感测区域或设备区域中并且包括多个感测单元。 多个第一开口位于芯片中并且相应地暴露感测单元。 多个导电延伸部分设置在第一开口中并且电连接到感测单元，其中导电延伸部分从第一开口延伸到芯片的上表面上。 还提供了一种用于形成芯片封装的方法。

公开(公告)号：US09355975B2

公开(公告)日：2016-05-31

申请号：US14339355

申请日：2014-07-23

申请人： XINTEC INC.

发明人： Yen-Shih Ho ,  Tsang-Yu Liu ,  Shu-Ming Chang ,  Yu-Lung Huang ,  Chao-Yen Lin ,  Wei-Luen Suen ,  Chien-Hui Chen ,  Chi-Chang Liao

IPC分类号： H01L23/00 ,  H01L21/78 ,  H01L21/768 ,  H01L23/31 ,  H01L21/56 ,  H01L29/06 ,  H01L23/525 ,  H01L23/532 ,  H01L25/065

CPC分类号： H01L24/05 ,  H01L21/561 ,  H01L21/76838 ,  H01L21/78 ,  H01L23/3121 ,  H01L23/3192 ,  H01L23/525 ,  H01L23/5329 ,  H01L24/16 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L29/0657 ,  H01L2224/02381 ,  H01L2224/024 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05548 ,  H01L2224/05558 ,  H01L2224/05567 ,  H01L2224/05572 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05687 ,  H01L2224/0569 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/48227 ,  H01L2224/48611 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48655 ,  H01L2224/48669 ,  H01L2224/48687 ,  H01L2224/4869 ,  H01L2224/73203 ,  H01L2224/73265 ,  H01L2224/94 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10253 ,  H01L2924/10523 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/3701 ,  H01L2224/03 ,  H01L2924/00 ,  H01L2224/05552 ,  H01L2924/00012

摘要： A chip package including a chip having an upper surface, a lower surface and a sidewall is provided. The chip includes a signal pad region adjacent to the upper surface. A first recess extends from the upper surface toward the lower surface along the sidewall. At least one second recess extends from a first bottom of the first recess toward the lower surface. The first and second recesses further laterally extend along a side of the upper surface, and a length of the first recess extending along the side is greater than that of the second recess extending along the side. A redistribution layer is electrically connected to the signal pad region and extends into the second recess. A method for forming the chip package is also provided.

摘要翻译： 提供了包括具有上表面，下表面和侧壁的芯片的芯片封装。 芯片包括与上表面相邻的信号焊盘区域。 第一凹部沿着侧壁从上表面向下表面延伸。 至少一个第二凹部从第一凹部的第一底部向下表面延伸。 第一和第二凹部沿着上表面的侧面进一步横向延伸，并且沿着侧面延伸的第一凹部的长度大于沿着侧面延伸的第二凹部的长度。 再分配层电连接到信号焊盘区域并延伸到第二凹槽中。 还提供了一种用于形成芯片封装的方法。