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公开(公告)号：US20160066402A1
公开(公告)日：2016-03-03
申请号：US14935774
申请日：2015-11-09
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine
Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The transmission element of the plasma cell is at least partially transparent to at least a portion of the illumination generated by the illumination source and at least a portion of broadband radiation emitted by the plasma. The plasma cell also includes one or more gas return channels formed within the transmission element for transferring gas from a region above the plasma generation region to a region below the plasma generation region.
Abstract translation: 用于控制对流的等离子体单元包括被配置为从照明源接收照明的传输元件，以便在气体体积的等离子体产生区域内产生等离子体。 等离子体单元的透射元件对于照明源产生的照明的至少一部分和由等离子体发射的宽带辐射的至少一部分至少部分透明。 等离子体单元还包括形成在传输元件内的一个或多个气体返回通道，用于将气体从等离子体产生区域上方的区域传送到等离子体产生区域下方的区域。
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公开(公告)号：US09263238B2
公开(公告)日：2016-02-16
申请号：US14670210
申请日：2015-03-26
Applicant: KLA-Tencor Corporation
Inventor： Lauren Wilson , Anant Chimmalgi , Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Gildardo Delgado
CPC classification number: H01J37/32339 , H01J37/32449 , H01J65/04
Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
Abstract translation: 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内的对流气体流到空腔部分外部的区域，使得通过气流将一部分持续等离子体从空腔部分移除。
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公开(公告)号：US20150282288A1
公开(公告)日：2015-10-01
申请号：US14675322
申请日：2015-03-31
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Richard Solarz , Sebaek Oh , Matthew Derstine
IPC: H05G2/00
CPC classification number: H05G2/003 , H01J61/025 , H01J61/302 , H01J65/042 , H05G2/001 , H05G2/008
Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.
Abstract translation: 用于横向等离子体泵浦的激光维持等离子体光源包括被配置为产生泵浦照明的泵浦源，一个或多个照明光学元件和被配置为容纳一定体积的气体的气体容纳结构。 一个或多个照明光学元件被配置为通过沿着泵路径将泵浦照明引导到气体体积内的一个或多个焦点，来维持气体容纳结构的气体体积内的等离子体。 一个或多个收集光学元件被配置为收集由等离子体沿着收集路径发射的宽带辐射。 此外，照明光学元件被配置为限定泵路径，使得泵照明沿着横向于收集路径的发射宽带光的传播方向的方向照射等离子体，使得泵浦照明基本上与发射的宽带 辐射。
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公开(公告)号：US20130106275A1
公开(公告)日：2013-05-02
申请号：US13647680
申请日：2012-10-09
Applicant: KLA- Tencor Corporation
Inventor： Anant Chimmalgi , Anatoly Shchemelinin , Ilya Bezel , Rajeev Patil
CPC classification number: H01J61/526 , H01J61/28 , H01J65/04
Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.
Abstract translation: 用于激光维持等离子体光源的可再填充等离子体单元包括等离子体灯泡，灯泡由对所选波长的辐射基本上透明的玻璃材料形成，气体端口组件可操作地连接到 所述灯泡并且设置在所述气体灯泡的第一部分处，其中所述灯泡构造成经由所述气体端口组件选择性地从气体源接收气体。
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公开(公告)号：US11035727B2
公开(公告)日：2021-06-15
申请号：US16296437
申请日：2019-03-08
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin
Abstract: A spectrometer apparatus is disclosed. The apparatus may include light source and the light source may include a chamber for sustaining a plasma within the internal volume of the chamber. The apparatus may also include a spectrometer cavity and a windowless entrance slit. The windowless entrance slit may fluidically and optically couple the spectrometer cavity and the internal volume of the chamber of the light source. Further, the apparatus may include a diffractive element disposed within the spectrometer cavity and a window positioned at an opposite end of the spectrometer cavity from the windowless slit. The apparatus may also include a camera and a spectrometer.
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Patent Agency Ranking
公开(公告)号：US10806016B2
公开(公告)日：2020-10-13
申请号：US16036660
申请日：2018-07-16
Applicant: KLA-Tencor Corporation
Inventor： Oleg Khodykin , Ilya Bezel
Abstract: A system for generating broadband radiation is disclosed. The system includes a target material source configured to deliver one or more of a liquid or solid state target material to a plasma-forming region of a chamber. The system further includes a pump source configured to generate pump radiation to excite the target material in the plasma forming region of the chamber to generate broadband radiation. The system is further configured to transmit at least a portion of the broadband radiation generated in the plasma-forming region of the chamber out of the chamber through a windowless aperture.
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公开(公告)号：US10714327B2
公开(公告)日：2020-07-14
申请号：US16283379
申请日：2019-02-22
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Eugene Shifrin , Matthew Derstine
Abstract: A system for pumping laser sustained plasma and enhancing one or more selected wavelengths of output illumination generated by the laser sustained plasma is disclosed. In embodiments, the system includes one or more pump modules configured to generate pump illumination for the laser sustained plasma and one or more enhancing illumination sources configured to generate enhancing illumination at one or more selected wavelengths. The pump illumination may be directed along one or more pump illumination paths that are non-collinear to an output illumination path of the output illumination. The enhancing illumination may be directed along an illumination path that is collinear to the output illumination path of the output illumination so that the enhancing illumination is combined with the output illumination, thereby enhancing the output illumination at the one or more selected wavelengths.
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公开(公告)号：US10714307B2
公开(公告)日：2020-07-14
申请号：US16141150
申请日：2018-09-25
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Eugene Shifrin , Gildardo Delgado , Rudy F. Garcia
IPC: H01J37/26 , H01J37/08 , H01J37/304 , H01J37/28 , H01J37/317 , H01J37/00
Abstract: An imaging system utilizing atomic atoms is provided. The system may include a neutral atom source configured to generate a beam of neutral atoms. The system may also include an ionizer configured to collect neutral atoms scattered from the surface of a sample. The ionizer may also be configured to ionize the collected neutral atoms. The system may also include a selector configured to receive ions from the ionizer and selectively filter received ions. The system may also include one or more optical elements configured to direct selected ions to a detector. The detector may be configured to generate one or more images of the surface of the sample based on the received ions.
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公开(公告)号：US10522340B2
公开(公告)日：2019-12-31
申请号：US16042887
申请日：2018-07-23
Applicant: KLA-Tencor Corporation
Inventor： Lauren Wilson , Anant Chimmalgi , Matthew Panzer , Ilya Bezel
Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
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40.发明申请公开(公告)号：US20190373709A1
公开(公告)日：2019-12-05
申请号：US16051559
申请日：2018-08-01
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine
Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.
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