CONTROL APPARATUS AND CONTROL METHOD FOR SPATIAL LIGHT MODULATOR
    35.
    发明申请
    CONTROL APPARATUS AND CONTROL METHOD FOR SPATIAL LIGHT MODULATOR 有权
    空调光调制器的控制装置和控制方法

    公开(公告)号:US20160349496A1

    公开(公告)日:2016-12-01

    申请号:US15164052

    申请日:2016-05-25

    CPC classification number: G02B21/365 G02B21/06 G02F1/0121

    Abstract: A control apparatus includes a lens, an SLM presenting a modulation pattern on a modulation plane and outputting modulated light L2 for forming light spots P1 and P2 on a pupil plane of the lens, an imaging device imaging a fringe pattern image formed on a focal plane of the lens and generating image data Da indicating the fringe pattern image, a calculation unit calculating at least one kind of parameter among an intensity amplitude, a phase shift amount, and an intensity average from the image data Da, an analysis unit obtaining a deviation in relative positions of an optical axis of the lens and a reference coordinate of the modulation plane based on the parameter, and a changing unit changing an origin position of the reference coordinate so that the deviation in the relative positions is decreased.

    Abstract translation: 控制装置包括透镜,在调制平面上呈现调制图案的SLM,并输出用于在透镜的光瞳平面上形成光斑P1和P2的调制光L2,成像装置成像在焦平面上形成的条纹图案图像 并生成指示条纹图案图像的图像数据Da,计算单元从图像数据Da计算强度幅度,相移量和强度平均中的至少一种参数,获得偏差的分析单元 在透镜的光轴的相对位置和基于参数的调制平面的参考坐标,以及改变单元改变参考坐标的原点位置,使得相对位置的偏差减小。

    TOTAL INTERNAL REFLECTION LIGHT ILLUMINATION DEVICE
    36.
    发明申请
    TOTAL INTERNAL REFLECTION LIGHT ILLUMINATION DEVICE 有权
    总内部反射光照明装置

    公开(公告)号:US20160266368A1

    公开(公告)日:2016-09-15

    申请号:US15030413

    申请日:2014-10-20

    Abstract: A total internal reflection light illumination apparatus includes a light source providing illumination light L1, a spatial light modulator inputting the illumination light L1 and converging and outputting the illumination light L1 by presenting a lens pattern, an objective lens illuminating an object substrate with illumination light L2 converged and output by the spatial light modulator, and a calculation unit providing, to the spatial light modulator, the lens pattern corresponding to at least one of a desired polarization state, desired penetration length, desired shape, and desired light intensity of the evanescent light L3. The lens pattern converges the illumination light L2 on a pupil plane of the objective lens.

    Abstract translation: 全内反射光照明装置包括提供照明光L1的光源,输入照明光L1并通过呈现透镜图案会聚并输出照明光L1的空间光调制器,用照明光L2照射对象基板的物镜 由空间光调制器收敛和输出;以及计算单元,向空间光调制器提供对应于期望的偏振状态,期望的穿透长度,期望的形状和ev逝光的期望的光强度中的至少一个的透镜图案 L3。 透镜图案将照明光L2会聚在物镜的光瞳平面上。

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