SEMICONDUCTOR DEVICE
    22.
    发明公开

    公开(公告)号:US20240339378A1

    公开(公告)日:2024-10-10

    申请号:US18473665

    申请日:2023-09-25

    发明人: Jong Ryeol YOO

    IPC分类号: H01L23/48 H01L21/768

    摘要: A semiconductor device includes a substrate including a substrate having a first side and a second side, a source/drain pattern on a fin-shaped pattern and connected to the fin-shaped pattern, a source/drain contact on the source/drain pattern and connected to the source/drain pattern, and a buried conductive pattern includes a first portion and a second portion, the second portion of between the first portion of the buried conductive pattern and a contact connecting via, at the first portion of the buried conductive pattern a width of the buried conductive pattern in a third direction decreases as the buried conductive pattern goes away from a back wiring line, and at the second portion of the buried conductive pattern, the width of the buried conductive pattern in the third direction increases, as the buried conductive pattern goes away from the back wiring line.

    SEMICONDUCTOR DEVICE
    25.
    发明公开

    公开(公告)号:US20240332186A1

    公开(公告)日:2024-10-03

    申请号:US18609065

    申请日:2024-03-19

    发明人: Jinbum KIM

    摘要: A semiconductor device includes a substrate having opposite first and second surfaces, a fin-type active pattern on the first surface of the substrate, a gate structure intersecting the fin-type active pattern, a source/drain region on the fin-type active pattern at a side of the gate structure, a contact structure connected to the source/drain region, a buried conductive structure electrically connected to the contact structure and extending in a direction perpendicular to the first surface, and a conductive through structure extending from the second surface of the substrate toward the first surface of the substrate and contacting with the buried conductive structure, the conductive through structure has a first width at a level adjacent to the first surface, narrower than a second width at a level adjacent to the second surface.