公开(公告)号：US08134124B2

公开(公告)日：2012-03-13

申请号：US12446420

申请日：2007-10-22

Applicant: Jeff Blackwood ,  Stacey Stone

Inventor： Jeff Blackwood ,  Stacey Stone

IPC: G01N1/28 ,  G01R31/305

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

Abstract translation: 一种用于S / TEM样品制备和分析的改进方法和装置。 本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。 新颖的样品结构和铣削图案的新颖应用允许产生薄至50nm的S / TEM样品，而没有显着的弯曲或翘曲。 本发明的优选实施方案提供了部分或全部自动化TEM样品制备的方法，使TEM样品的创建和分析过程减少劳动密集度，并提高TEM分析的产量和再现性。

公开(公告)号：US07923700B2

公开(公告)日：2011-04-12

申请号：US11960267

申请日：2007-12-19

Applicant: Hidetoshi Nishiyama

Inventor： Hidetoshi Nishiyama

IPC: H01J37/20

CPC classification number: G01N23/2251 ,  H01J37/20 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: Sample inspection apparatus, sample inspection method, and sample inspection system are offered which can give a stimulus to a sample held on a film when the sample is inspected by irradiating it with a primary beam (e.g., an electron beam or other charged-particle beam) via the film. The apparatus has the film, a vacuum chamber, primary beam irradiation column, signal detector, and a controller for controlling the operations of the beam irradiation column and signal detector. The sample is held on a first surface of the film opened to permit access to the film. The vacuum chamber reduces the pressure of the ambient in contact with a second surface of the film. The irradiation column irradiates the sample with the primary beam via the film from the second surface side. The detector detects a secondary signal produced from the sample in response to the irradiation.

Abstract translation: 提供样品检查装置，样品检查方法和样品检查系统，其可以通过用初级束（例如电子束或其他带电粒子束）照射样品来检查样品时对保持在膜上的样品的刺激 ）通过电影。 该装置具有膜，真空室，主光束照射柱，信号检测器和用于控制光束照射柱和信号检测器的操作的控制器。 样品被保持在薄膜的第一表面上，以允许接近薄膜。 真空室减小与膜的第二表面接触的环境的压力。 照射列从第二表面侧通过膜从主光束照射样品。 检测器响应于照射而检测从样品产生的二次信号。

公开(公告)号：US20110031396A1

公开(公告)日：2011-02-10

申请号：US12896274

申请日：2010-10-01

Applicant: Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

Inventor： Lyudmila Zaykova-Feldman ,  Thomas M. Moore ,  Gonzalo Amador ,  Matthew Hammer

IPC: G01N23/00

CPC classification number: G01N23/04 ,  H01J2237/208 ,  H01J2237/31745

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

Abstract translation: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

公开(公告)号：US20100213386A1

公开(公告)日：2010-08-26

申请号：US12707024

申请日：2010-02-17

Applicant: Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

Inventor： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

IPC: G21K5/10 ,  G21K5/08 ,  G21K1/00 ,  G21K5/04

CPC classification number: H01J37/20 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208

Abstract: A focused ion beam system includes a sample holder having a fixing plane for fixing a sample, a sample base on which the sample holder is provided, a focused ion beam irradiating mechanism that irradiates a focused ion beam to the sample, microtweezers that hold the sample and have the axial direction at a predetermined angle to a surface of the sample base, an opening/closing mechanism that opens and closes the microtweezers, a rotating mechanism that rotates the microtweezers about the axial direction, and a moving mechanism that moves the position of the microtweezers.

Abstract translation: 聚焦离子束系统包括具有用于固定样品的固定平面的样品保持器，其上设置有样品保持器的样品基底，将聚焦离子束照射到样品的聚焦离子束照射机构，保持样品的微量滴定器 并且具有与样品台的表面成预定角度的轴向方向，打开和关闭微型加热器的开闭机构，使微型加热器绕轴向旋转的旋转机构，以及移动机构， 微动员。

公开(公告)号：US07381968B2

公开(公告)日：2008-06-03

申请号：US11105584

申请日：2005-04-14

Applicant: Hiroyuki Tanaka ,  Mitsugu Sato ,  Masashi Sasaki ,  Yoshifumi Taniguchi

Inventor： Hiroyuki Tanaka ,  Mitsugu Sato ,  Masashi Sasaki ,  Yoshifumi Taniguchi

IPC: G21K5/10 ,  G21K5/08

CPC classification number: H01J37/20 ,  H01J2237/2001 ,  H01J2237/20292 ,  H01J2237/208

Abstract: Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.

Abstract translation: 样本架的信息或安装在样本架上的样本的信息被存储在安装到电子显微镜上的样本保持器内的存储器中。 访问存储器以将样本保持器的信息传送到电子显微镜，从而确保用户可以使用样本架而不会使样本架的特性错误，并且可以减少样本信息的错误记录的危险。

公开(公告)号：US20050230636A1

公开(公告)日：2005-10-20

申请号：US11105584

申请日：2005-04-14

Applicant: Hiroyuki Tanaka ,  Mitsugu Sato ,  Masashi Sasaki ,  Yoshifumi Taniguchi

Inventor： Hiroyuki Tanaka ,  Mitsugu Sato ,  Masashi Sasaki ,  Yoshifumi Taniguchi

IPC: G21K5/08 ,  G21K7/00 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/2001 ,  H01J2237/20292 ,  H01J2237/208

Abstract: Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.

Abstract translation: 样本架的信息或安装在样本架上的样本的信息被存储在安装到电子显微镜上的样本保持器内的存储器中。 访问存储器以将样本保持器的信息传送到电子显微镜，从而确保用户可以使用样本架而不会使样本架的特性错误，并且可以减少样本信息的错误记录的危险。

公开(公告)号：US20040246465A1

公开(公告)日：2004-12-09

申请号：US10839508

申请日：2004-05-05

Inventor： Kouji Iwasaki ,  Yo Yamamoto

IPC: G01N001/00

CPC classification number: H01J37/20 ,  G01N1/32 ,  H01J2237/208

Abstract: The invention is directed to a more positive pick up of a micro sample by means of a microscope system with manipulator. The microscope system with manipulator incorporates therein a low-vibration probe rotary mechanism, which is used for precisely correcting the rotational direction of the micro sample without applying vibrations thereto.

Abstract translation: 本发明涉及通过具有操纵器的显微镜系统对微量样品进行更积极的拾取。 具有操纵器的显微镜系统包括低振动探针旋转机构，其用于精确校正微型样品的旋转方向而不对其施加振动。

公开(公告)号：US06717156B2

公开(公告)日：2004-04-06

申请号：US10078397

申请日：2002-02-21

Applicant: Masakazu Sugaya ,  Hiroyasu Shichi ,  Muneyuki Fukuda ,  Kaoru Umemura ,  Hidemi Koike

Inventor： Masakazu Sugaya ,  Hiroyasu Shichi ,  Muneyuki Fukuda ,  Kaoru Umemura ,  Hidemi Koike

IPC: H01J37256

CPC classification number: H01J37/20 ,  H01J2237/208 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01L21/68707

Abstract: There are disclosed a method for fabricating (processing) a micro-sample used for the observation, analysis, and measurement by, for example, a transmission electron microscope (TEM), and an equipment for specimen fabrication (processing) used for carrying out the method. With the method for specimen fabrication (processing) of the present invention, a micro-sample to be separated and extracted from a specimen substrate is sandwiched and held between a plurality of branch beams formed at the tip of a beam. The beam holding the micro-sample is transferred onto a sample holder, and the micro-sample is mounted (firmly held) on the sample holder. After mounting the micro-sample on the sample holder, the beam is detached and separated from the mounted micro-sample. By adopting such a method, it is possible to fabricate a specimen for high reliability observation, analysis, and measurement entailing less contamination, in a shorter time and with efficiency.

Abstract translation: 公开了用于制造（处理）用于观察，分析和测量的微量样品的方法，例如通过透射电子显微镜（TEM）和用于进行 方法。 通过本发明的试样制造（处理）的方法，将从试样基板分离并取出的微量样品夹持并保持在形成在梁的顶端的多个分支梁之间。 将保持微量样品的束转移到样品保持器上，并将微量样品安装（牢固地保持）在样品架上。 将微型样品安装在样品架上后，将光束从安装的微量样品上拆下并分离。 通过采用这种方法，可以在更短的时间和效率下制造用于高可靠性观察，分析和测量所需的较少污染的样品。

公开(公告)号：US20020166976A1

公开(公告)日：2002-11-14

申请号：US10078397

申请日：2002-02-21

Inventor： Masakazu Sugaya ,  Hiroyasu Shichi ,  Muneyuki Fukuda ,  Kaoru Umemura ,  Hidemi Koike

IPC: H01J037/20

CPC classification number: H01J37/20 ,  H01J2237/208 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01L21/68707

Abstract: There are disclosed a method for fabricating (processing) a micro-sample used for the observation, analysis, and measurement by, for example, a transmission electron microscope (TEM), and an equipment for specimen fabrication (processing) used for carrying out the method. With the method for specimen fabrication (processing) of the present invention, a micro-sample to be separated and extracted from a specimen substrate is sandwiched and held between a plurality of branch beams formed at the tip of a beam. The beam holding the micro-sample is transferred onto a sample holder, and the micro-sample is mounted (firmly held) on the sample holder. After mounting the micro-sample on the sample holder, the beam is detached and separated from the mounted micro-sample. By adopting such a method for separating, extracting, and mounting the micro-sample, it is possible to separate and extract the minute micro-sample from a desired region on the specimen substrate with precision and stability, and to fabricate a specimen for high reliability observation, analysis, and measurement entailing less contamination, in a shorter time and with efficiency.

Abstract translation: 公开了用于制造（处理）用于观察，分析和测量的微量样品的方法，例如通过透射电子显微镜（TEM）和用于进行 方法。 通过本发明的试样制造（处理）的方法，将从试样基板分离并取出的微量样品夹持并保持在形成在梁的顶端的多个分支梁之间。 将保持微量样品的束转移到样品保持器上，并将微量样品安装（牢固地保持）在样品架上。 将微型样品安装在样品架上后，将光束从安装的微量样品上拆下并分离。 通过采用这种分离，提取和安装微量样品的方法，可以精确和稳定地从样品基板上的期望区域分离并提取微小样品，并制造高可靠性的样品 观察，分析和测量需要较少的污染，在更短的时间和效率。

公开(公告)号：US20240203686A1

公开(公告)日：2024-06-20

申请号：US18366355

申请日：2023-08-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kilho Lee

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/20214 ,  H01J2237/20278 ,  H01J2237/208

Abstract: A guide pin includes a support part and a frictional column coupled to the support part, and the support part includes a lower support member including a screw structure on an outer surface thereof, and an upper support member on the lower support member. The frictional column surrounds an outer surface of the upper support member. A hardness of the frictional column is lower than a hardness of the support part.