摘要:
A method for purging a manifold for the delivery of a high purity chemical by injecting of a purge gas into the manifold under vacuum conditions. In one embodiment, the method comprises a first step of injecting a purge gas into the manifold at a first end while applying vacuum at a second end; a second step of closing the first end and evacuating the manifold by applying vacuum at the second end; and a third step of opening the first end and injecting purge gas into the manifold at the first end while applying vacuum at the second end, causing a turbulent flow of the purge gas along the internal walls of the manifold due to the pressure differential between the purge gas and the evacuated manifold. An effective removal of residuals of the high purity chemical within the manifold is thereby achieved.
摘要:
A method for purging a manifold for the delivery of a high purity chemical by injecting of a purge gas into the manifold under vacuum conditions. In one embodiment, the method comprises a first step of injecting a purge gas into the manifold at a first end while applying vacuum at a second end; a second step of closing the first end and evacuating the manifold by applying vacuum at the second end; and a third step of opening the first end and injecting purge gas into the manifold at the first end while applying vacuum at the second end, causing a turbulent flow of the purge gas along the internal walls of the manifold due to the pressure differential between the purge gas and the evacuated manifold. An effective removal of residuals of the high purity chemical within the manifold is thereby achieved.
摘要:
A gas storage and dispensing system, including multi-vessel arrays of gas dispensing vessels that require successive change-over to provide ongoing supply of gas to a gas-consuming process, with a pump coupled in gas flow communication with the array. The system is provided with capability for time delay auto-switchover sequencing of the switchover operation in which an endpoint limit sensing of an on-stream gas dispensing vessel is responsively followed by termination of gas flow to the pump, inactivation of the pump, autoswitching of vessels, reinitiation of gas flow to the pump and reactivation of the pump. The system minimizes the occurrence of pressure spikes at the pump outlet in response to pressure variation at the pump inlet incident to switchover of gas supply from one vessel to another in the multi-vessel array.
摘要:
Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.
摘要:
A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system with fail-safe redundancy; and an evacuation system which leaves the system's manifold and transfer lines relatively free of chemical fire hazards; leaves them free of oxygen contamination; and leaves the composition of the system's carrier gas unaffected, between refills.
摘要:
A method of filling a cylinder with a target weight of a gas. The method includes successively measuring weight of the cylinder at periodic time intervals to obtain successive actual weights of the cylinder; opening a first valve and filling the cylinder with the gas at a high flow rate; and closing the first valve after reaching a predetermined weight difference between the target weight and an actual weight. After closing the first valve, the method opens a second valve and fills the cylinder with the gas at a low flow rate. After opening the second valve to fill the cylinder with the gas, the method adjustably controls, via an adjustable valve, the flow of gas to the cylinder. The method differences each successively measured actual weight from the target weight of the gas to obtain multiple first difference values. The method also differences adjacently measured actual weights to obtain multiple second difference values. The flow of gas to the cylinder is adjustably controlled based on each first difference value and a corresponding second difference value.
摘要:
A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system with fail-safe redundancy; and an evacuation system which leaves the system's manifold and transfer lines relatively free of chemical fire hazards; leaves them free of oxygen contamination; and leaves the composition of the system's carrier gas unaffected, between refills.
摘要:
Apparatus for the recovery of an inert gas, preferably for the recovery of CO2, for use in counterpressure filling machines, the filling elements of whichnullprior to introduction of a liquid filling material into a containernullevacuate this container and at least prepressurize this container with an inert gas under pressure from the pressurizing gas distribution channel and which elements, during the subsequent introduction of a filling material, conduct the inert gas containing return gas displaced from a corresponding container into a return gas collection channel, wherein a first evacuation system is provided with which the air can be removed from the bottle, and then there is carried out a prepressurizing of the bottles using an inert gas; and a second independent evacuation system is provided with which can be removed and collected, independently of the first evacuation, the inert gas that is being removed by suction.
摘要:
A cylinder-filling system includes plural manifolds, for respectively coupling to groups of product containers to be filled, each manifold being connected through suitable valving and pumps to sources of different compressed gases. Respectively connected to the manifolds are reference cylinders which are in turn connected to load cells. A processor, coupled to a touch screen display, executes a program routine which enables user selection of the gas or gas mixture to be added through each manifold, including the identity and proportions of gases in each mixture and the order in which they are to be added, a number of operating parameters including vent and evacuation pressures, number of purge cycles, purge gas, alarm levels and pump and valve operating delay times. The processor controls automatic calculation of gas mixture fill weights from mixture proportions, and controls manual or automatic filling of the containers. The processor recalculates target weights for the gases based upon a predetermined fraction of variance between original target weights and fill amounts after a settling time, and controls the rate of filling separately for each gas based on the target amount of the gas to be added.
摘要:
A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.