PROCESSING APPARATUS AND GAS SUPPLY METHOD
    3.
    发明公开

    公开(公告)号:US20240183498A1

    公开(公告)日:2024-06-06

    申请号:US18441635

    申请日:2024-02-14

    发明人: Seiya NASU

    IPC分类号: F17C9/00 C23C14/22

    摘要: A processing apparatus includes: a processing container configured to accommodate a substrate; a storage tank connected to the processing container via a gas supply pipe; a pressure sensor configured to detect a pressure in the storage tank; a valve provided in the gas supply pipe between the processing container and the storage tank; and a controller configured to control an opening degree of the valve based on the pressure in the storage tank detected by the pressure sensor. The controller is further configured to control the opening degree of the valve to make a drop amount of the pressure become equal to a set discharge pressure, the drop amount being calculated by subtracting the detection value of the pressure sensor in a state where the valve is opened, from the detection value of the pressure sensor before the valve is opened.

    Process For the Reduction of Flaring/Venting Gases During Completions Operations

    公开(公告)号:US20230068476A1

    公开(公告)日:2023-03-02

    申请号:US17846527

    申请日:2022-06-22

    摘要: A process for the reduction of flaring/venting gases during completions operations on an oil/gas well, said process comprising providing a well in need of completion; providing a system to capture oil and gas generated by the well; the system including a primary separator to separate an incoming well stream into a plurality of streams wherein a first stream is sent to a pipeline and a second stream is sent for further processing. The process further includes flowing and collecting a third stream of gas in a gas pressure vessel; compressing the collected gas in the vessel until parameters of compressed gas are compressed to provide a constant feed to the pipeline; and transferring the compressed gas to the gas pipeline wherein the process reduces the amount of gas flared and/or vented during operation by over 80%.