- 专利标题: Automatic refill system for ultra pure or contamination sensitive chemicals
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申请号: US10211940申请日: 2002-08-02
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公开(公告)号: US06604555B2公开(公告)日: 2003-08-12
- 发明人: Christopher S. Blatt , Richard H. Pearce , Graham Williams , Edward H. Wentworth, III
- 申请人: Christopher S. Blatt , Richard H. Pearce , Graham Williams , Edward H. Wentworth, III
- 主分类号: F17C1300
- IPC分类号: F17C1300
摘要:
A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system with fail-safe redundancy; and an evacuation system which leaves the system's manifold and transfer lines relatively free of chemical fire hazards; leaves them free of oxygen contamination; and leaves the composition of the system's carrier gas unaffected, between refills.
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