公开(公告)号：US11887971B2

公开(公告)日：2024-01-30

申请号：US17866598

申请日：2022-07-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Bongsoo Kim

IPC: H01L25/065 ,  H01L23/522 ,  H01L23/10 ,  H01L23/538

CPC classification number: H01L25/0657 ,  H01L23/10 ,  H01L23/5223 ,  H01L23/5384 ,  H01L23/5386

Abstract: A semiconductor package includes; a lower connection structure, a semiconductor chip on the lower connection structure, an intermediate connection structure on the lower connection structure, a sealing layer covering the semiconductor chip, and an upper connection structure including a first upper insulating layer on the sealing layer, a first upper conductive pattern layer on the first upper insulating layer, and a first upper via penetrating the first upper insulating layer to directly connect the first upper conductive pattern layer to the intermediate connection structure. A height from an upper surface of the lower connection structure to an upper surface of the sealing layer is less than or equal to a maximum height from the upper surface of the lower connection structure to an upper surface of the intermediate connection structure.

公开(公告)号：US20230232618A1

公开(公告)日：2023-07-20

申请号：US18123736

申请日：2023-03-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyosub Kim ,  Keunnam Kim ,  Dongoh Kim ,  Bongsoo Kim ,  Euna Kim ,  Chansic Yoon ,  Kiseok Lee ,  Hyeonok Jung ,  Sunghee Han ,  Yoosang Hwang

IPC: H10B12/00

CPC classification number: H10B12/488 ,  H10B12/34 ,  H10B12/053 ,  H10B12/315 ,  H10B12/482

Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.

公开(公告)号：US11183500B2

公开(公告)日：2021-11-23

申请号：US16826655

申请日：2020-03-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hoju Song ,  Seokhyun Kim ,  Youngjun Kim ,  Jinhyung Park ,  Hyeran Lee ,  Bongsoo Kim ,  Sungwoo Kim

IPC: H01L27/108

Abstract: A method of manufacturing a semiconductor memory device includes forming bit line structures extending in a first horizontal direction on a substrate, and insulating spacer structures covering opposite sidewalls of each bit line structure, forming a preliminary buried contact material layer and a mold layer to respectively fill lower and upper portions of a space between a pair of insulating spacer structures, patterning the mold layer and the preliminary buried contact material layer into mold patterns spaced apart from each other in a second horizontal direction and buried contacts spaced apart from each other in the second horizontal direction, forming insulating fences among the mold patterns separated from each other and among the buried contacts separated from each other, removing the mold patterns to expose the buried contacts, and forming landing pads on the exposed buried contacts, each landing pad connected to a corresponding one of the exposed buried contacts.

公开(公告)号：US20210066305A1

公开(公告)日：2021-03-04

申请号：US16896470

申请日：2020-06-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyosub Kim ,  Keunnam Kim ,  Dongoh Kim ,  Bongsoo Kim ,  Euna Kim ,  Chansic Yoon ,  Kiseok Lee ,  Hyeonok Jung ,  Sunghee Han ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L23/528

Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.