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21.
公开(公告)号:US11532635B1
公开(公告)日:2022-12-20
申请号:US17346083
申请日:2021-06-11
发明人: Rajeev Kumar Dokania , Noriyuki Sato , Tanay Gosavi , Pratyush Pandey , Debo Olaosebikan , Amrita Mathuriya , Sasikanth Manipatruni
IPC分类号: G11C11/22 , H01L27/11507 , H01L49/02
摘要: A high-density low voltage ferroelectric (or paraelectric) memory bit-cell that includes a planar ferroelectric or paraelectric capacitor. The memory bit-cell comprises 1T1C configuration, where a plate-line is parallel to a word-line, or the plate-line is parallel to a bit-line. The memory bit-cell can be 1TnC, where ‘n’ is a number. In a 1TnC bit-cell, the capacitors are vertically stacked allowing for multiple values to be stored in a single bit-cell. The memory bit-cell can be multi-element FE gain bit-cell. In a multi-element FE gain bit-cell, data sensing is done with signal amplified by a gain transistor in the bit-cell. As such, higher storage density is realized using multi-element FE gain bit-cells. In some examples, the 1T1C, 1TnC, and multi-element FE gain bit-cells are multi-level bit-cells. To realize multi-level bit-cells, the capacitor is placed in a partially switched polarization state by applying different voltage levels or different time pulse widths at the same voltage level.
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公开(公告)号:US12034086B1
公开(公告)日:2024-07-09
申请号:US17552269
申请日:2021-12-15
发明人: Somilkumar J. Rathi , Noriyuki Sato , Niloy Mukherjee , Rajeev Kumar Dokania , Amrita Mathuriya , Tanay Gosavi , Pratyush Pandey , Jason Y. Wu , Sasikanth Manipatruni
IPC分类号: H10B53/30 , H01L21/768 , H01L23/522 , H01L29/94 , H01L49/02
CPC分类号: H01L29/945 , H01L21/76834 , H01L21/7687 , H01L21/76877 , H01L23/5223 , H01L23/5226 , H01L28/57 , H01L28/65 , H01L28/75 , H10B53/30
摘要: A device includes, in a first region, a first conductive interconnect, an electrode structure on the first conductive interconnect, where the electrode structure includes a first conductive hydrogen barrier layer and a first conductive fill material. A trench capacitor including a ferroelectric material or a paraelectric material is on the electrode structure. A second dielectric includes an amorphous, greater than 90% film density hydrogen barrier material laterally surrounds the memory device. A via electrode including a second conductive hydrogen barrier material is on at least a portion of the memory device. A second region includes a conductive interconnect structure embedded within a less than 90% film density dielectric material.
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23.
公开(公告)号:US11961877B1
公开(公告)日:2024-04-16
申请号:US17550899
申请日:2021-12-14
发明人: Somilkumar J. Rathi , Noriyuki Sato , Niloy Mukherjee , Rajeev Kumar Dokania , Amrita Mathuriya , Tanay Gosavi , Pratyush Pandey , Jason Y. Wu , Sasikanth Manipatruni
CPC分类号: H01L28/57 , H01L28/65 , H01L28/75 , H10B53/30 , G11C11/221
摘要: A device includes, in a first region, a first conductive interconnect, an electrode structure on the first conductive interconnect, where the electrode structure includes a first conductive hydrogen barrier layer and a first conductive fill material. A trench capacitor including a ferroelectric material or a paraelectric material is on the electrode structure. A second dielectric includes an amorphous, greater than 90% film density hydrogen barrier material laterally surrounds the memory device. A via electrode including a second conductive hydrogen barrier material is on at least a portion of the memory device. A second region includes a conductive interconnect structure embedded within a less than 90% film density dielectric material.
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24.
公开(公告)号:US11769790B2
公开(公告)日:2023-09-26
申请号:US17649665
申请日:2022-02-01
发明人: Niloy Mukherjee , Somilkumar J. Rathi , Jason Y. Wu , Pratyush Pandey , Zeying Ren , Fnu Atiquzzaman , Gabriel Antonio Paulius Velarde , Noriyuki Sato , Mauricio Manfrini , Tanay Gosavi , Rajeev Kumar Dokania , Amrita Mathuriya , Ramamoorthy Ramesh , Sasikanth Manipatruni
IPC分类号: H01L23/522 , H01L23/532 , H01L23/535 , H01L23/538 , H01L49/02 , H01L21/324 , H01L21/768 , H10B53/30 , H10N70/00
CPC分类号: H01L28/57 , H01L21/324 , H01L21/76832 , H01L28/65 , H01L28/75 , H10B53/30 , H10N70/8836
摘要: A memory device includes a first electrode comprising a first conductive nonlinear polar material, where the first conductive nonlinear polar material comprises a first average grain length. The memory device further includes a dielectric layer comprising a perovskite material on the first electrode, where the perovskite material includes a second average grain length. A second electrode comprising a second conductive nonlinear polar material is on the dielectric layer, where the second conductive nonlinear polar material includes a third grain average length that is less than or equal to the first average grain length or the second average grain length.
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25.
公开(公告)号:US20230246064A1
公开(公告)日:2023-08-03
申请号:US17649899
申请日:2022-02-03
发明人: Niloy Mukherjee , Somilkumar J. Rathi , Jason Y. Wu , Pratyush Pandey , Zeying Ren , FNU Atiquzzaman , Gabriel Antonio Paulius Velarde , Noriyuki Sato , Mauricio Manfrini , Tanay Gosavi , Rajeev Kumar Dokania , Amrita Mathuriya , Ramamoorthy Ramesh , Sasikanth Manipatruni
IPC分类号: H01L49/02 , H01L21/324 , H01L21/768 , H01L27/11507 , H01L45/00
CPC分类号: H01L28/75 , H01L21/324 , H01L21/76832 , H01L27/11507 , H01L28/57 , H01L28/65 , H01L45/147
摘要: A memory device includes a first electrode comprising a first conductive nonlinear polar material, where the first conductive nonlinear polar material comprises a first average grain length. The memory device further includes a dielectric layer comprising a perovskite material on the first electrode, where the perovskite material includes a second average grain length. A second electrode comprising a second conductive nonlinear polar material is on the dielectric layer, where the second conductive nonlinear polar material includes a third grain average length that is less than or equal to the first average grain length or the second average grain length.
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公开(公告)号:US11605411B1
公开(公告)日:2023-03-14
申请号:US17390796
申请日:2021-07-30
发明人: Rajeev Kumar Dokania , Noriyuki Sato , Tanay Gosavi , Pratyush Pandey , Debo Olaosebikan , Amrita Mathuriya , Sasikanth Manipatruni
IPC分类号: G11C11/22 , G11C11/417
摘要: A high-density low voltage ferroelectric (or paraelectric) memory bit-cell that includes a planar ferroelectric or paraelectric capacitor. The memory bit-cell comprises 1T1C configuration, where a plate-line is parallel to a word-line, or the plate-line is parallel to a bit-line. The memory bit-cell can be 1TnC, where ‘n’ is a number. In a 1TnC bit-cell, the capacitors are vertically stacked allowing for multiple values to be stored in a single bit-cell. The memory bit-cell can be multi-element FE gain bit-cell. In a multi-element FE gain bit-cell, data sensing is done with signal amplified by a gain transistor in the bit-cell. As such, higher storage density is realized using multi-element FE gain bit-cells. In some examples, the 1T1C, 1TnC, and multi-element FE gain bit-cells are multi-level bit-cells. To realize multi-level bit-cells, the capacitor is placed in a partially switched polarization state by applying different voltage levels or different time pulse widths at the same voltage level.
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公开(公告)号:US11532342B1
公开(公告)日:2022-12-20
申请号:US17367210
申请日:2021-07-02
发明人: Rajeev Kumar Dokania , Noriyuki Sato , Tanay Gosavi , Pratyush Pandey , Debo Olaosebikan , Amrita Mathuriya , Sasikanth Manipatruni
IPC分类号: G11C11/22 , G11C11/417
摘要: A high-density low voltage ferroelectric (or paraelectric) memory bit-cell that includes a planar ferroelectric or paraelectric capacitor. The memory bit-cell comprises 1T1C configuration, where a plate-line is parallel to a word-line, or the plate-line is parallel to a bit-line. The memory bit-cell can be 1TnC, where ‘n’ is a number. In a 1TnC bit-cell, the capacitors are vertically stacked allowing for multiple values to be stored in a single bit-cell. The memory bit-cell can be multi-element FE gain bit-cell. In a multi-element FE gain bit-cell, data sensing is done with signal amplified by a gain transistor in the bit-cell. As such, higher storage density is realized using multi-element FE gain bit-cells. In some examples, the 1T1C, 1TnC, and multi-element FE gain bit-cells are multi-level bit-cells. To realize multi-level bit-cells, the capacitor is placed in a partially switched polarization state by applying different voltage levels or different time pulse widths at the same voltage level.
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28.
公开(公告)号:US11521666B1
公开(公告)日:2022-12-06
申请号:US17346087
申请日:2021-06-11
发明人: Rajeev Kumar Dokania , Noriyuki Sato , Tanay Gosavi , Pratyush Pandey , Debo Olaosebikan , Amrita Mathuriya , Sasikanth Manipatruni
IPC分类号: G11C11/22 , H01L27/11514 , H01L27/11504 , G11C5/10
摘要: A high-density low voltage ferroelectric (or paraelectric) memory bit-cell that includes a planar ferroelectric or paraelectric capacitor. The memory bit-cell comprises 1T1C configuration, where a plate-line is parallel to a word-line, or the plate-line is parallel to a bit-line. The memory bit-cell can be 1TnC, where ‘n’ is a number. In a 1TnC bit-cell, the capacitors are vertically stacked allowing for multiple values to be stored in a single bit-cell. The memory bit-cell can be multi-element FE gain bit-cell. In a multi-element FE gain bit-cell, data sensing is done with signal amplified by a gain transistor in the bit-cell. As such, higher storage density is realized using multi-element FE gain bit-cells. In some examples, the 1T1C, 1TnC, and multi-element FE gain bit-cells are multi-level bit-cells. To realize multi-level bit-cells, the capacitor is placed in a partially switched polarization state by applying different voltage levels or different time pulse widths at the same voltage level.
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公开(公告)号:US11514966B1
公开(公告)日:2022-11-29
申请号:US17367172
申请日:2021-07-02
发明人: Rajeev Kumar Dokania , Noriyuki Sato , Tanay Gosavi , Pratyush Pandey , Debo Olaosebikan , Amrita Mathuriya , Sasikanth Manipatruni
IPC分类号: G11C11/22 , G11C11/417
摘要: A high-density low voltage ferroelectric (or paraelectric) memory bit-cell that includes a planar ferroelectric or paraelectric capacitor. The memory bit-cell comprises 1T1C configuration, where a plate-line is parallel to a word-line, or the plate-line is parallel to a bit-line. The memory bit-cell can be 1TnC, where ‘n’ is a number. In a 1TnC bit-cell, the capacitors are vertically stacked allowing for multiple values to be stored in a single bit-cell. The memory bit-cell can be multi-element FE gain bit-cell. In a multi-element FE gain bit-cell, data sensing is done with signal amplified by a gain transistor in the bit-cell. As such, higher storage density is realized using multi-element FE gain bit-cells. In some examples, the 1T1C, 1TnC, and multi-element FE gain bit-cells are multi-level bit-cells. To realize multi-level bit-cells, the capacitor is placed in a partially switched polarization state by applying different voltage levels or different time pulse widths at the same voltage level.
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