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公开(公告)号：US10283342B2
公开(公告)日：2019-05-07
申请号：US15360397
申请日：2016-11-23
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Matthew Panzer , Anant Chimmalgi , Lauren Wilson , Joshua Wittenberg
Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
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公开(公告)号：US10032620B2
公开(公告)日：2018-07-24
申请号：US14699781
申请日：2015-04-29
Applicant: KLA-Tencor Corporation
Inventor： Lauren Wilson , Anant Chimmalgi , Matthew Panzer , Ilya Bezel
Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
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公开(公告)号：US09887076B2
公开(公告)日：2018-02-06
申请号：US15207136
申请日：2016-07-11
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
CPC classification number: H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas containment structure, and a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb-less gas containment structure. Further, the plasma is generated within a concave region of the collector element, where the collector element includes an opening through the collector element for propagating a portion of a plume of the plasma from a first region of the bulb-less gas containment structure to a second region of the bulb-less gas containment structure, wherein the first region of the bulb-less gas containment structure and the second region of the bulb-less gas containment structure are at least partially separated by a surface of the collector element.
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24.发明申请公开(公告)号：US20170345639A1
公开(公告)日：2017-11-30
申请号：US15223335
申请日：2016-07-29
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Kenneth P. Gross , Lauren Wilson , Rahul Yadav , Joshua Wittenberg , Aizaz Bhuiyan , Anatoly Shchemelinin , Anant Chimmalgi , Richard Solarz
Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.
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公开(公告)号：US09530636B2
公开(公告)日：2016-12-27
申请号：US14660849
申请日：2015-03-17
Applicant: KLA-Tencor Corporation
Inventor： Sebaek Oh , Anant Chimmalgi , Rahul Yadav , Matthew Derstine , Ilya Bezel
CPC classification number: H01J65/00 , H01J61/025 , H01J61/32 , H01J65/04
Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.
Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。
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Patent Agency Ranking
26.发明申请Method and System for Controlling Convective Flow in a Light-Sustained Plasma 有权用于控制轻维持等离子体中对流的方法和系统公开(公告)号：US20160322211A1
公开(公告)日：2016-11-03
申请号：US15207136
申请日：2016-07-11
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
CPC classification number: H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。
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公开(公告)号：US09263238B2
公开(公告)日：2016-02-16
申请号：US14670210
申请日：2015-03-26
Applicant: KLA-Tencor Corporation
Inventor： Lauren Wilson , Anant Chimmalgi , Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Gildardo Delgado
CPC classification number: H01J37/32339 , H01J37/32449 , H01J65/04
Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
Abstract translation: 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内的对流气体流到空腔部分外部的区域，使得通过气流将一部分持续等离子体从空腔部分移除。
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28.发明授权公开(公告)号：US09110037B2
公开(公告)日：2015-08-18
申请号：US14521977
申请日：2014-10-23
Applicant: KLA-Tencor Corporation
Inventor： Anant Chimmalgi , Younus Vora , Rudolf Brunner
IPC: G01N21/00 , G01N21/95 , G01N21/88 , G03F7/20 , G01N21/956
CPC classification number: G01N21/9501 , G01N21/8806 , G01N2021/8845 , G01N2021/95676 , G01N2201/0612 , G03F7/70483
Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. At least some of the laser diode arrays form two dimensional stacks that have different wavelength ranges from each other. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.
Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 至少一些激光二极管阵列形成彼此具有不同波长范围的二维叠层。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。
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29.发明授权公开(公告)号：US08896827B2
公开(公告)日：2014-11-25
申请号：US13924216
申请日：2013-06-21
Applicant: KLA-Tencor Corporation
Inventor： Anant Chimmalgi , Younus Vora , Rudolf Brunner
IPC: G01N21/00 , G03F7/20 , G01N21/88 , G01N21/95 , G01N21/956
CPC classification number: G01N21/9501 , G01N21/8806 , G01N2021/8845 , G01N2021/95676 , G01N2201/0612 , G03F7/70483
Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.
Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。
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30.发明申请公开(公告)号：US20130342825A1
公开(公告)日：2013-12-26
申请号：US13924216
申请日：2013-06-21
Applicant: KLA-Tencor Corporation
Inventor： Anant Chimmalgi , Younus Vora , Rudolf Brunner
IPC: G01N21/95
CPC classification number: G01N21/9501 , G01N21/8806 , G01N2021/8845 , G01N2021/95676 , G01N2201/0612 , G03F7/70483
Abstract: Disclosed are methods and apparatus for performing inspection or metrology of a semiconductor device. The apparatus includes a plurality of laser diode arrays that are configurable to provide an incident beam having different wavelength ranges. The apparatus also includes optics for directing the incident beam towards the sample, a detector for generating an output signal or image based on an output beam emanating from the sample in response to the incident beam, and optics for directing the output beam towards the detector. The apparatus further includes a controller for configuring the laser diode arrays to provide the incident beam at the different wavelength ranges and detecting defects or characterizing a feature of the sample based on the output signal or image.
Abstract translation: 公开了用于执行半导体器件的检查或计量的方法和装置。 该装置包括可配置为提供具有不同波长范围的入射光束的多个激光二极管阵列。 该装置还包括用于将入射光束引向样品的光学器件，用于响应于入射光束而从样品发出的输出光束产生输出信号或图像的检测器，以及用于将输出光束引向检测器的光学器件。 该装置还包括控制器，用于配置激光二极管阵列以在不同波长范围提供入射光束，并基于输出信号或图像检测缺陷或表征样本的特征。
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