公开(公告)号：US20150338293A1

公开(公告)日：2015-11-26

申请号：US14721497

申请日：2015-05-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Hideaki FUKUZAWA ,  Yoshihiko FUJI ,  Akiko YUZAWA ,  Kazuaki OKAMOTO

IPC: G01L1/22 ,  A61B5/021

CPC classification number: G01L1/22 ,  A61B5/021 ,  A61B5/02141 ,  A61B5/05 ,  A61B5/6898 ,  A61B5/7475 ,  A61B2562/0204 ,  A61B2562/0247 ,  A61B2562/028 ,  G01L1/125 ,  G01L9/007

Abstract: According to an embodiment, a pressure sensor includes a substrate, a support part, a flexible membrane part, and a magnetoresistive element. The support part is adhered on the substrate by using a first adhesive material with a first Young's modulus and a second adhesive material with a second Young's modulus different from the first Young's modulus. The membrane part is supported by the support part. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.

Abstract translation: 根据实施例，压力传感器包括基板，支撑部分，柔性膜部分和磁阻元件。 通过使用具有第一杨氏模量的第一粘合材料和具有与第一杨氏模量不同的第二杨氏模量的第二粘合材料将支撑部分附着在基底上。 膜部由支撑部支撑。 磁阻元件设置在膜部分上，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的间隔层。

公开(公告)号：US20240019248A1

公开(公告)日：2024-01-18

申请号：US18175238

申请日：2023-02-27

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroki HIRAGA ,  Yasushi TOMIZAWA ,  Kengo UCHIDA ,  Kei MASUNISHI ,  Fumito MIYAZAKI ,  Ryunosuke GANDO ,  Shiori KAJI ,  Etsuji OGAWA ,  Daiki ONO

IPC: G01C19/5769 ,  G01C19/5733

CPC classification number: G01C19/5769 ,  G01C19/5733

Abstract: According to one embodiment, a sensor includes a base body including a first face, a first support portion, a first movable portion, and a first insulating member. The first face includes a first base region, a second base region, and a third base region. The first support portion is fixed to the third base region. The first movable portion is supported by the first support portion. The first movable portion includes a first movable region and a second movable region. A first gap is provided between the first base region and the first movable region. The first insulating member is fixed to the second base region, and located between the second base region and the second movable region in a first direction from the third base region to the first support portion. A second gap is provided between the first insulating member and the second movable region.

公开(公告)号：US20190041285A1

公开(公告)日：2019-02-07

申请号：US16145763

申请日：2018-09-28

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko FUJI ,  Michiko HARA ,  Kei MASUNISHI ,  Yoshihiro HIGASHI ,  Shiori KAJI ,  Akiko YUZAWA ,  Akio HORI ,  Tomohiko NAGATA ,  Kazuaki OKAMOTO ,  Kenji OTSU ,  Shotaro BABA

IPC: G01L9/00 ,  A61B5/00 ,  H04R1/46 ,  A61B5/021

CPC classification number: G01L9/0091 ,  A61B5/021 ,  A61B5/6898 ,  A61B2562/0247 ,  A61B2562/12 ,  H04R1/46 ,  H04R15/00 ,  H04R2201/003 ,  H04R2499/11

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

公开(公告)号：US20180156683A1

公开(公告)日：2018-06-07

申请号：US15888324

申请日：2018-02-05

Applicant: Kabushiki Kaisha Toshiba

Inventor： Kenji OTSU ,  Michiko HARA ,  Yoshihiko FUJI ,  Kei MASUNISHI ,  Akiko YUZAWA ,  Tomohiko NAGATA ,  Shiori KAJI ,  Yoshihiro HIGASHI ,  Kazuaki OKAMOTO ,  Shotaro BABA

IPC: G01L7/02 ,  G01B7/16

CPC classification number: G01L7/02 ,  G01B7/18 ,  G01L1/2287 ,  G01L9/0051

Abstract: According to one embodiment, a sensor includes a film portion and a first sensor portion. The film portion is deformable. The first sensor portion is provided at the film portion. The first sensor portion includes a first conductive layer, a second conductive layer, a first magnetic layer, a second magnetic layer, and a first intermediate layer. The second conductive layer is provided between the first conductive layer and the film portion. The first magnetic layer is provided between the first conductive layer and the second conductive layer. The second magnetic layer is provided between the first magnetic layer and the second conductive layer. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. A curvature of the first conductive layer is different from a curvature of at least a portion of the film portion.

公开(公告)号：US20170067791A1

公开(公告)日：2017-03-09

申请号：US15248412

申请日：2016-08-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko FUJI ,  Michiko HARA ,  Kei MASUNISHI ,  Yoshihiro HIGASHI ,  Shiori KAJI ,  Akiko YUZAWA ,  Akio HORI ,  Tomohiko NAGATA ,  Kazuaki OKAMOTO ,  Kenji OTSU ,  Shotaro BABA

IPC: G01L9/00 ,  A61B5/021 ,  A61B5/00 ,  H04R1/46

CPC classification number: G01L9/0091 ,  A61B5/021 ,  A61B5/6898 ,  A61B2562/0247 ,  A61B2562/12 ,  H04R1/46 ,  H04R15/00 ,  H04R2201/003 ,  H04R2499/11

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

Abstract translation: 根据一个实施例，传感器包括可变形膜部分，第一感测元件和第二感测元件。 第一感测元件被固定到膜部分，并且包括第一材料的第一磁性层，第一相对磁性层和第一中间层。 第一中间层设置在第一磁性层和第一相对的磁性层之间。 第二传感元件固定在胶片部分上，并包括第二材料的第二磁性层，第二相对磁性层和第二中间层。 第二种材料与第一种材料不同。 第二中间层设置在第二磁性层和第二相对磁性层之间。

公开(公告)号：US20170067787A1

公开(公告)日：2017-03-09

申请号：US15254377

申请日：2016-09-01

Applicant: Kabushiki Kaisha Toshiba

Inventor： Kei MASUNISHI ,  Akiko YUZAWA ,  Yoshihiko FUJI ,  Michiko HARA ,  Yoshihiro HIGASHI ,  Kazuaki OKAMOTO ,  Kenji OTSU

IPC: G01L1/22 ,  A61B8/00 ,  A61B5/021

CPC classification number: A61B8/44 ,  A61B5/02141 ,  A61B2562/0247 ,  G01L9/0042 ,  G01L9/0054 ,  G06F3/0414 ,  H04R15/00 ,  H04R2201/003 ,  H04R2410/00

Abstract: A pressure sensor of an embodiment includes a support portion, a transformable membrane part and a sensor portion. The membrane part includes an end portion supported by the support portion, and a first area and a second area. The first area is positioned between a center of the membrane part and the end portion and has a first rigidity. The second area is positioned between the first area and the end portion, and has a second rigidity lower than the first rigidity. The sensor portion is provided at the first area and includes a first magnetic layer, a second magnetic layer and a first intermediate layer provided between the first magnetic layer and the second magnetic layer. An end-side distance between the first area and the end portion is shorter than a center-side distance between the second area and the center of the membrane part.

Abstract translation: 实施例的压力传感器包括支撑部分，可变形膜部分和传感器部分。 膜部包括由支撑部支撑的端部，以及第一区域和第二区域。 第一区域位于膜部分的中心和端部之间并且具有第一刚性。 第二区域位于第一区域和端部之间，并且具有比第一刚性低的第二刚性。 传感器部分设置在第一区域处，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的第一中间层。 第一区域和端部之间的端侧距离比第二区域和膜部分的中心之间的中心侧距离短。

公开(公告)号：US20170059424A1

公开(公告)日：2017-03-02

申请号：US15246964

申请日：2016-08-25

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akiko YUZAWA ,  Hideaki FUKUZAWA ,  Kei MASUNISHI ,  Yoshihiro HIGASHI ,  Michiko HARA ,  Yoshihiko FUJI

IPC: G01L1/22

CPC classification number: G01L1/2206 ,  G01L1/125 ,  G01L1/2287 ,  G01L9/16

Abstract: According to one embodiment, a sensor includes a first sensor unit, a first stacked body, and a film unit. The first sensor unit includes a first magnetic layer, a second magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer. The first stacked body includes a third magnetic layer, a fourth magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer. The film unit is deformable. A portion of the film unit is disposed between the first sensor unit and the first stacked body.

Abstract translation: 根据一个实施例，传感器包括第一传感器单元，第一堆叠体和胶片单元。 第一传感器单元包括第一磁性层，第二磁性层和第一中间层，第一中间层设置在第一磁性层和第二磁性层之间。 第一层叠体包括第三磁性层，第四磁性层和第二中间层，第二中间层设置在第三磁性层和第四磁性层之间。 胶片单元是可变形的。 胶片单元的一部分设置在第一传感器单元和第一堆叠体之间。

公开(公告)号：US20240219178A1

公开(公告)日：2024-07-04

申请号：US18455887

申请日：2023-08-25

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroki HIRAGA ,  Yasushi TOMIZAWA ,  Kei MASUNISHI

IPC: G01C19/5705

CPC classification number: G01C19/5705

Abstract: According to one embodiment, a sensor includes a housing, a sensor section, and a plurality of first fixing members. The housing includes a housing base. The sensor section is surrounded by the housing. The sensor section includes a sensor base, a support portion fixed to the sensor base, a movable portion supported by the support portion, and a plurality of fixed electrodes fixed to the sensor base and facing the movable portion. A first gap is provided between the sensor base and the movable portion. The fixed electrodes are provided in n-rotational symmetry in a first plane perpendicular to a first direction from the sensor base to the support portion. The n is an integer of 2 or more. The plurality of first fixing members fix the sensor base to the housing base. The first fixing members are provided in the n-rotational symmetry in the first plane.

公开(公告)号：US20240085451A1

公开(公告)日：2024-03-14

申请号：US18175242

申请日：2023-02-27

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Etsuji OGAWA ,  Yasushi TOMIZAWA ,  Fumito MIYAZAKI ,  Daki ONO ,  Kengo UCHIDA ,  Hiroki HIRAGA ,  Shiori KAJI ,  Hideaki MURASE

IPC: G01P15/097 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/18

Abstract: According to one embodiment, a sensor includes a base body, a support portion fixed to the base body, and a first member supported by the support portion. A gap is provided between the base body and a part of the first member. The first member includes a supported region, a first movable region, a first structure, a first support structure, a first connection structure, a first connect portion, and a first beam. The support portion is located between the base body and the supported region in a first direction from the base body to the support portion. The first beam extends along a second direction crossing the first direction. A first beam position of the first beam is located between a first movable region position of the first movable region and a support portion position of the support portion in the second direction.

公开(公告)号：US20230062441A1

公开(公告)日：2023-03-02

申请号：US17680263

申请日：2022-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC: G01P15/097 ,  B81B3/00

Abstract: According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.