公开(公告)号：US12019092B2

公开(公告)日：2024-06-25

申请号：US17680263

申请日：2022-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC: G01P15/097 ,  B81B3/00

CPC classification number: G01P15/097 ,  B81B3/0021 ,  B81B2201/0235

Abstract: According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

公开(公告)号：US11680800B2

公开(公告)日：2023-06-20

申请号：US17445487

申请日：2021-08-19

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ryunosuke Gando ,  Daiki Ono ,  Yasushi Tomizawa ,  Fumito Miyazaki ,  Shiori Kaji ,  Kei Masunishi ,  Hiroki Hiraga ,  Etsuji Ogawa

IPC: G01C19/5776 ,  G01C19/5783

CPC classification number: G01C19/5783 ,  G01C19/5776

Abstract: According to one embodiment, a sensor includes a sensor part including first and second sensor elements, and a circuit part. The first sensor element includes a first supporter, a first movable part capable of vibrating, first and second electrodes. The first electrode outputs a first signal corresponding to a vibration of the first movable part. The second electrode outputs a second signal corresponding to the vibration of the first movable part. The second sensor element includes a second supporter, a second movable part capable of vibrating, third and fourth electrodes. The third electrode outputs a third signal corresponding to a vibration of the second movable part. The fourth electrode outputs a fourth signal corresponding to the vibration of the second movable part. The circuit part includes a calculator. The calculator outputs a differential operation result between first and second processing signals.

公开(公告)号：US11796319B2

公开(公告)日：2023-10-24

申请号：US17650749

申请日：2022-02-11

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Fumito Miyazaki ,  Yasushi Tomizawa ,  Ryunosuke Gando ,  Hiroki Hiraga ,  Kei Masunishi ,  Shiori Kaji ,  Daiki Ono ,  Etsuji Ogawa

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: According to one embodiment, a sensor includes a base body including a first surface including first and second base body regions, a first structure body provided in the first base body region, a second structure body provided in the second base body region, and a control device. The first structure body includes a first movable member configured to vibrate. The vibration of the first movable member includes first and second components. The second structure body includes a second movable member configured to vibrate. The control device includes a controller configured to perform a processing operation. The processing operation includes outputting a second rotation angle, The second rotation angle is obtained by correcting a first rotation angle based on a resonance frequency of the second movable member. The first rotation angle of the first movable member is obtained based on the first component and the second component.

公开(公告)号：US11531042B2

公开(公告)日：2022-12-20

申请号：US17249462

申请日：2021-03-02

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki

IPC: G01P15/097 ,  B81B3/00 ,  G01P15/125

Abstract: According to one embodiment, a sensor includes a base body, a first supporter fixed to the base body, and a first movable part separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, and a first movable beam. The first movable beam includes a first beam, a first movable conductive part, and a first connection region. The first beam includes a first beam portion, a second beam portion, and a third beam portion between the first beam portion and the second beam portion. The first beam portion is connected with the first movable base part. The second beam portion is connected with the second movable base part. The first connection region connects the third beam portion and the first movable conductive part.

公开(公告)号：US20220137085A1

公开(公告)日：2022-05-05

申请号：US17446587

申请日：2021-08-31

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiraki Hiraga ,  Fumito Miyazaki

IPC: G01P15/08

Abstract: According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.

公开(公告)号：US11834326B2

公开(公告)日：2023-12-05

申请号：US17461835

申请日：2021-08-30

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono

IPC: B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/0235 ,  B81B2201/0271 ,  B81B2201/0278 ,  B81B2203/04 ,  B81B2203/06

Abstract: According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.

公开(公告)号：US11656079B2

公开(公告)日：2023-05-23

申请号：US17445922

申请日：2021-08-25

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroki Hiraga ,  Ryunosuke Gando ,  Yasushi Tomizawa ,  Fumito Miyazaki ,  Daiki Ono ,  Kei Masunishi ,  Etsuji Ogawa

IPC: G01C19/5677 ,  G01C19/5733 ,  G01C19/5726

CPC classification number: G01C19/5677 ,  G01C19/5726 ,  G01C19/5733

Abstract: According to one embodiment, a sensor includes a sensor part. The sensor part includes a supporter and a movable part. The movable part includes a movable member located around the supporter in a first plane, and a plurality of structure members located between the supporter and the movable member. The structure members have bent shapes. The structure members connect the movable member with the supporter. The movable member is capable of vibrating. The movable part has the supporter as a center of rotational symmetry. The movable part has a plurality of mirror planes. The mirror planes pass through the center of the rotational symmetry and cross the first plane.

公开(公告)号：US11630121B2

公开(公告)日：2023-04-18

申请号：US17446587

申请日：2021-08-31

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki

IPC: G01P15/08

Abstract: According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.

公开(公告)号：US20230062441A1

公开(公告)日：2023-03-02

申请号：US17680263

申请日：2022-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC: G01P15/097 ,  B81B3/00

Abstract: According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.