公开(公告)号：US11680800B2

公开(公告)日：2023-06-20

申请号：US17445487

申请日：2021-08-19

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ryunosuke Gando ,  Daiki Ono ,  Yasushi Tomizawa ,  Fumito Miyazaki ,  Shiori Kaji ,  Kei Masunishi ,  Hiroki Hiraga ,  Etsuji Ogawa

IPC: G01C19/5776 ,  G01C19/5783

CPC classification number: G01C19/5783 ,  G01C19/5776

Abstract: According to one embodiment, a sensor includes a sensor part including first and second sensor elements, and a circuit part. The first sensor element includes a first supporter, a first movable part capable of vibrating, first and second electrodes. The first electrode outputs a first signal corresponding to a vibration of the first movable part. The second electrode outputs a second signal corresponding to the vibration of the first movable part. The second sensor element includes a second supporter, a second movable part capable of vibrating, third and fourth electrodes. The third electrode outputs a third signal corresponding to a vibration of the second movable part. The fourth electrode outputs a fourth signal corresponding to the vibration of the second movable part. The circuit part includes a calculator. The calculator outputs a differential operation result between first and second processing signals.

公开(公告)号：US12019092B2

公开(公告)日：2024-06-25

申请号：US17680263

申请日：2022-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC: G01P15/097 ,  B81B3/00

CPC classification number: G01P15/097 ,  B81B3/0021 ,  B81B2201/0235

Abstract: According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

公开(公告)号：US09448255B2

公开(公告)日：2016-09-20

申请号：US14331927

申请日：2014-07-15

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Daiki Ono ,  Jun Deguchi

IPC: G01R27/26 ,  G01R1/44

CPC classification number: G01R1/44 ,  G01R27/2605

Abstract: According to one embodiment, a capacitance detection device includes a switched capacitor amplifying circuit including a variable capacitor and a reference capacitor, and a voltage applying circuit configured to apply, to the switched capacitor amplifying circuit, a reference voltage having a temperature characteristic for compensating fluctuation in an output voltage of the switched capacitor amplifying circuit due to a temperature characteristic of capacitance of the variable capacitor.

Abstract translation: 根据一个实施例，电容检测装置包括具有可变电容器和参考电容器的开关电容器放大电路，以及电压施加电路，被配置为向开关电容放大电路施加具有用于补偿波动的温度特性的参考电压 在开关电容放大电路的输出电压中，由于可变电容器的电容的温度特性。

公开(公告)号：US11834326B2

公开(公告)日：2023-12-05

申请号：US17461835

申请日：2021-08-30

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono

IPC: B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/0235 ,  B81B2201/0271 ,  B81B2201/0278 ,  B81B2203/04 ,  B81B2203/06

Abstract: According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.

公开(公告)号：US11656079B2

公开(公告)日：2023-05-23

申请号：US17445922

申请日：2021-08-25

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroki Hiraga ,  Ryunosuke Gando ,  Yasushi Tomizawa ,  Fumito Miyazaki ,  Daiki Ono ,  Kei Masunishi ,  Etsuji Ogawa

IPC: G01C19/5677 ,  G01C19/5733 ,  G01C19/5726

CPC classification number: G01C19/5677 ,  G01C19/5726 ,  G01C19/5733

Abstract: According to one embodiment, a sensor includes a sensor part. The sensor part includes a supporter and a movable part. The movable part includes a movable member located around the supporter in a first plane, and a plurality of structure members located between the supporter and the movable member. The structure members have bent shapes. The structure members connect the movable member with the supporter. The movable member is capable of vibrating. The movable part has the supporter as a center of rotational symmetry. The movable part has a plurality of mirror planes. The mirror planes pass through the center of the rotational symmetry and cross the first plane.

公开(公告)号：US20230062441A1

公开(公告)日：2023-03-02

申请号：US17680263

申请日：2022-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC: G01P15/097 ,  B81B3/00

Abstract: According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

公开(公告)号：US08947279B2

公开(公告)日：2015-02-03

申请号：US14178012

申请日：2014-02-11

Applicant: Kabushiki Kaisha Toshiba

Inventor： Daiki Ono ,  Jun Deguchi

IPC: H03M3/00 ,  H03M1/12 ,  H03M7/30 ,  H03M1/00

CPC classification number: H03M3/434 ,  H03M1/00 ,  H03M1/12 ,  H03M3/458 ,  H03M7/30

Abstract: According to one embodiment, a delta/sigma modulator includes a first multiplier based on a reference capacitor having capacitance CR and a first variable capacitor having capacitance CS1 according to a distance between electrodes thereof, the first multiplier being defined by a first multiplier factor given by CR/CS1 and being supplied with a reference voltage, a second multiplier based on a second variable capacitor having capacitance CS2 and a third variable capacitor having capacitance CS3, the second multiplier being defined by a second multiplier factor given by CS3/CS2 and being provided in a feedback path, and an adder configured to add an output of the first multiplier and an output of the second multiplier, wherein CS1, CS2 and CS3 are the same.

Abstract translation: 根据一个实施例，Δ/Σ调制器包括基于具有电容CR的参考电容器的第一乘法器和根据其电极之间的距离的具有电容CS1的第一可变电容器，第一乘法器由第一乘法器定义为由 CR / CS1并被提供参考电压，第二乘法器基于具有电容CS2的第二可变电容器和具有电容CS3的第三可变电容器，第二乘法器由CS3 / CS2给出的第二乘数确定，并且被提供 以及加法器，被配置为将第一乘法器的输出和第二乘法器的输出相加，其中CS1，CS2和CS3相同。

公开(公告)号：US12095469B2

公开(公告)日：2024-09-17

申请号：US17940796

申请日：2022-09-08

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Tetsuro Itakura ,  Ryunosuke Gando ,  Daiki Ono ,  Kei Masunishi ,  Akihide Sai

IPC: H03L7/091 ,  H03L7/099

CPC classification number: H03L7/091 ,  H03L7/0992

Abstract: A resonance frequency detector has an adder that adds a correction term to an oscillation frequency of an output signal of an oscillator, and detects a predetermined resonance frequency of a resonance element. The correction term is generated based on a phase error in a phase locked loop and a degree of change in phase at the resonance frequency, and the phase locked loop generates a control signal based on the phase error between an output signal of the resonance element that resonates at the resonance frequency and the output signal of the oscillator that varies the oscillation frequency according to the control signal.

公开(公告)号：US11796319B2

公开(公告)日：2023-10-24

申请号：US17650749

申请日：2022-02-11

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Fumito Miyazaki ,  Yasushi Tomizawa ,  Ryunosuke Gando ,  Hiroki Hiraga ,  Kei Masunishi ,  Shiori Kaji ,  Daiki Ono ,  Etsuji Ogawa

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: According to one embodiment, a sensor includes a base body including a first surface including first and second base body regions, a first structure body provided in the first base body region, a second structure body provided in the second base body region, and a control device. The first structure body includes a first movable member configured to vibrate. The vibration of the first movable member includes first and second components. The second structure body includes a second movable member configured to vibrate. The control device includes a controller configured to perform a processing operation. The processing operation includes outputting a second rotation angle, The second rotation angle is obtained by correcting a first rotation angle based on a resonance frequency of the second movable member. The first rotation angle of the first movable member is obtained based on the first component and the second component.

公开(公告)号：US09274017B2

公开(公告)日：2016-03-01

申请号：US14188342

申请日：2014-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Naofumi Nakamura ,  Kei Masunishi ,  Yumi Hayashi ,  Yusaku Asano ,  Tamio Ikehashi ,  Jun Deguchi ,  Daiki Ono

IPC: G01L9/12 ,  G01L19/04 ,  G01L9/00

CPC classification number: G01L19/04 ,  G01L9/0072 ,  G01L9/0075

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.

Abstract translation: 根据一个实施例，公开了一种MEMS器件。 该器件包括衬底，衬底上的第一和第二MEMS元件。 第一和第二MEMS元件中的每一个包括基板上的固定电极，固定电极上方的可动电极，第一绝缘膜，第一绝缘膜和基板，其限定了容纳固定和​​可移动电极的空腔，以及 在所述腔内的所述第一绝缘膜的表面上的第一锚定件，并且将所述可动电极连接到所述第一绝缘膜。 第一MEMS元件的空腔是封闭的。 第二MEMS元件的空腔由通孔打开。