公开(公告)号：US12019092B2

公开(公告)日：2024-06-25

申请号：US17680263

申请日：2022-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC: G01P15/097 ,  B81B3/00

CPC classification number: G01P15/097 ,  B81B3/0021 ,  B81B2201/0235

Abstract: According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

公开(公告)号：US11531042B2

公开(公告)日：2022-12-20

申请号：US17249462

申请日：2021-03-02

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki

IPC: G01P15/097 ,  B81B3/00 ,  G01P15/125

Abstract: According to one embodiment, a sensor includes a base body, a first supporter fixed to the base body, and a first movable part separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, and a first movable beam. The first movable beam includes a first beam, a first movable conductive part, and a first connection region. The first beam includes a first beam portion, a second beam portion, and a third beam portion between the first beam portion and the second beam portion. The first beam portion is connected with the first movable base part. The second beam portion is connected with the second movable base part. The first connection region connects the third beam portion and the first movable conductive part.

公开(公告)号：US20220137085A1

公开(公告)日：2022-05-05

申请号：US17446587

申请日：2021-08-31

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiraki Hiraga ,  Fumito Miyazaki

IPC: G01P15/08

Abstract: According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.

公开(公告)号：US11092440B2

公开(公告)日：2021-08-17

申请号：US16112961

申请日：2018-08-27

Applicant: Kabushiki Kaisha Toshiba

Inventor： Ryunosuke Gando ,  Tamio Ikehashi ,  Etsuji Ogawa ,  Tetsuro Itakura ,  Yohei Hatakeyama ,  Yasushi Tomizawa

IPC: G01C19/5719 ,  B81C1/00 ,  B81B3/00 ,  G01C19/5726 ,  G01C19/5755

Abstract: According to one embodiment, a method for controlling a vibration device includes a movable body capable of vibrating in a first direction, and a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction, wherein in a condition that tc is a time from a rise start time point to a rise end time point of an applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and td is a period of the free vibration in the first direction of the movable body, the time tc is longer than the time td.

公开(公告)号：US11834326B2

公开(公告)日：2023-12-05

申请号：US17461835

申请日：2021-08-30

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono

IPC: B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/0235 ,  B81B2201/0271 ,  B81B2201/0278 ,  B81B2203/04 ,  B81B2203/06

Abstract: According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.

公开(公告)号：US11656079B2

公开(公告)日：2023-05-23

申请号：US17445922

申请日：2021-08-25

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroki Hiraga ,  Ryunosuke Gando ,  Yasushi Tomizawa ,  Fumito Miyazaki ,  Daiki Ono ,  Kei Masunishi ,  Etsuji Ogawa

IPC: G01C19/5677 ,  G01C19/5733 ,  G01C19/5726

CPC classification number: G01C19/5677 ,  G01C19/5726 ,  G01C19/5733

Abstract: According to one embodiment, a sensor includes a sensor part. The sensor part includes a supporter and a movable part. The movable part includes a movable member located around the supporter in a first plane, and a plurality of structure members located between the supporter and the movable member. The structure members have bent shapes. The structure members connect the movable member with the supporter. The movable member is capable of vibrating. The movable part has the supporter as a center of rotational symmetry. The movable part has a plurality of mirror planes. The mirror planes pass through the center of the rotational symmetry and cross the first plane.

公开(公告)号：US11630121B2

公开(公告)日：2023-04-18

申请号：US17446587

申请日：2021-08-31

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei Masunishi ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki

IPC: G01P15/08

Abstract: According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.

公开(公告)号：US20230062441A1

公开(公告)日：2023-03-02

申请号：US17680263

申请日：2022-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC: G01P15/097 ,  B81B3/00

Abstract: According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

公开(公告)号：US12209865B2

公开(公告)日：2025-01-28

申请号：US17886065

申请日：2022-08-11

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Shiori Kaji ,  Ryunosuke Gando ,  Yasushi Tomizawa

IPC: G01C19/60

Abstract: According to one embodiment, a sensor includes a base body, a first fixed portion, a movable portion, and first and second fixed electrodes. The first fixed portion is fixed to the base body. The movable portion is supported by the first fixed portion. The movable portion includes annular portions and connecting portions. The annular portions are concentric with the first fixed portion as a center in a first plane. One of the connecting portions connects one of the annular portions and an other one of the annular portions. The annular portions include first to third annular portions. The second annular portion includes a first movable portion electrode. The first fixed electrode is fixed to the base body and faces a part of the first annular portion. The second fixed electrode is fixed to the base body and faces the first movable portion electrode.

公开(公告)号：US11680800B2

公开(公告)日：2023-06-20

申请号：US17445487

申请日：2021-08-19

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ryunosuke Gando ,  Daiki Ono ,  Yasushi Tomizawa ,  Fumito Miyazaki ,  Shiori Kaji ,  Kei Masunishi ,  Hiroki Hiraga ,  Etsuji Ogawa

IPC: G01C19/5776 ,  G01C19/5783

CPC classification number: G01C19/5783 ,  G01C19/5776

Abstract: According to one embodiment, a sensor includes a sensor part including first and second sensor elements, and a circuit part. The first sensor element includes a first supporter, a first movable part capable of vibrating, first and second electrodes. The first electrode outputs a first signal corresponding to a vibration of the first movable part. The second electrode outputs a second signal corresponding to the vibration of the first movable part. The second sensor element includes a second supporter, a second movable part capable of vibrating, third and fourth electrodes. The third electrode outputs a third signal corresponding to a vibration of the second movable part. The fourth electrode outputs a fourth signal corresponding to the vibration of the second movable part. The circuit part includes a calculator. The calculator outputs a differential operation result between first and second processing signals.