Invention Grant
- Patent Title: Sensor and electronic device
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Application No.: US17461835Application Date: 2021-08-30
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Publication No.: US11834326B2Publication Date: 2023-12-05
- Inventor: Kei Masunishi , Yasushi Tomizawa , Etsuji Ogawa , Ryunosuke Gando , Shiori Kaji , Hiroki Hiraga , Fumito Miyazaki , Daiki Ono
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP 21023043 2021.02.17
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.
Public/Granted literature
- US20220259035A1 SENSOR AND ELECTRONIC DEVICE Public/Granted day:2022-08-18
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