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公开(公告)号：US20180231621A1
公开(公告)日：2018-08-16
申请号：US15705579
申请日：2017-09-15
Applicant: Kabushiki Kaisha Toshiba
Inventor： Yoshihiro HIGASHI , Michiko HARA , Tomohiko NAGATA , Shiori KAJI , Yoshihiko FUJI , Akiko YUZAWA , Kenji OTSU , Kazuaki OKAMOTO , Shotaro BABA
IPC: G01R33/09
CPC classification number: G01R33/093
Abstract: According to one embodiment, a sensor includes a first film, a first sensor portion, a driving portion, and a processor. The first sensor portion is provided at the first film. The first sensor portion includes a first magnetic layer, a second magnetic layer, and a first intermediate layer. The second magnetic layer is provided between the first film and the first magnetic layer. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. The driving portion causes the first film to deform at a first frequency. The processor outputs a third signal based on a first signal and a second signal. The first signal relates to the first frequency. The second signal is output from the first sensor portion.
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公开(公告)号：US20150271586A1
公开(公告)日：2015-09-24
申请号：US14584476
申请日：2014-12-29
Applicant: Kabushiki Kaisha Toshiba
Inventor： Hideaki FUKUZAWA , Masatoshi SAKURAI , Masayuki KII , Yoshihiko FUJI , Michiko HARA , Yoshihiro HIGASHI , Kenji OTSU , Akiko YUZAWA , Kazuaki OKAMOTO
CPC classification number: G01L9/0051 , G01L9/16 , H04R19/005 , H04R19/04
Abstract: According to one embodiment, a pressure sensor includes: a base body; a sensor section; and a processing circuit. The sensor section includes: a transducing thin film; a first strain sensing element; and a second strain sensing element. The transducing thin film has a film surface and is flexible. The processing circuit is configured to output as an output signal at least one of a first signal obtained from the first strain sensing element upon application of external pressure to the transducing thin film and a second signal obtained from the second strain sensing element upon application of the external pressure to the transducing thin film.
Abstract translation: 根据一个实施例，压力传感器包括：基体; 传感器部分; 和处理电路。 传感器部分包括：传感薄膜; 第一应变传感元件; 和第二应变传感元件。 换能薄膜具有膜表面并且是柔性的。 处理电路被配置为当施加外部压力到转换薄膜时从第一应变感测元件获得的第一信号中的至少一个输出作为输出信号，以及在应用第二应变感测元件时从第二应变感测元件获得的第二信号 对转换薄膜的外部压力。
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3.发明申请公开(公告)号：US20140090486A1
公开(公告)日：2014-04-03
申请号：US13927886
申请日：2013-06-26
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Yoshihiko FUJI , Hideaki FUKUZAWA , Michiko HARA , Yoshihiro HIGASHI , Akio HORI , Tomohiko NAGATA , Shiori KAJI , Akiko YUZAWA
IPC: G01L1/12
CPC classification number: G01L1/12 , G01L9/0044 , G01L9/0048 , G01L9/16 , H04R1/00 , H04R15/00 , H04R2410/00
Abstract: According to one embodiment, a pressure sensor includes a substrate, a first electrode, a second electrode, a first magnetic layer, a second magnetic, a spacer layer, a third magnetic layer. The substrate includes a first region and a second region. The first electrode is provided on the first region. The second electrode is provided on the first electrode. The first magnetic layer is provided between the first electrode and the second electrode. The second magnetic layer is provided between the first electrode and the first magnetic layer or between the first magnetic layer and the second electrode. The spacer layer is provided between the first magnetic layer and the second magnetic layer in a stacking direction of layers from the first electrode to the second electrode. The third magnetic layer is provided continuously with the second magnetic layer on the second region.
Abstract translation: 根据一个实施例，压力传感器包括基板，第一电极，第二电极，第一磁性层，第二磁性体，间隔层，第三磁性层。 衬底包括第一区域和第二区域。 第一电极设置在第一区域上。 第二电极设置在第一电极上。 第一磁性层设置在第一电极和第二电极之间。 第二磁性层设置在第一电极和第一磁性层之间或第一磁性层和第二电极之间。 间隔层在从第一电极到第二电极的层的堆叠方向上设置在第一磁性层和第二磁性层之间。 第三磁性层与第二区域上的第二磁性层连续地提供。
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公开(公告)号：US20170094419A1
公开(公告)日：2017-03-30
申请号：US15373011
申请日：2016-12-08
Applicant: Kabushiki Kaisha Toshiba
Inventor： Yoshihiro HIGASHI , Yoshihiko FUJI , Michiko HARA , Akiko YUZAWA , Shiori KAJI , Tomohiko NAGATA , Akio HORI , Hideaki FUKUZAWA
Abstract: According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.
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公开(公告)号：US20160258824A1
公开(公告)日：2016-09-08
申请号：US14925494
申请日：2015-10-28
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Yoshihiko FUJI , Akio HORI , Kei MASUNISHI , Hideaki FUKUZAWA , Akiko YUZAWA , Kazuaki OKAMOTO
IPC: G01L1/12
CPC classification number: G01L1/12 , G01B7/24 , G01L1/125 , G01L1/20 , G01L9/0051 , G01L9/007 , H04R19/04 , H04R2201/003
Abstract: According to one embodiment, a strain sensing element provided at a deformable film part, includes a stacked body, a first electrode, and a second electrode. The stacked body includes a first magnetic layer, a second magnetic layer, and an intermediate layer provided between the first magnetic layer and the second magnetic layer. A magnetization direction of the first magnetic layer changes in accordance with a deformation of the film part. The first electrode includes a first alloy layer including a first alloy including Ta and Mo. The first electrode is electrically connected to the stacked body. The second electrode is electrically connected to the stacked body.
Abstract translation: 根据一个实施例，设置在可变形膜部分处的应变感测元件包括堆叠体，第一电极和第二电极。 层叠体包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的中间层。 第一磁性层的磁化方向根据膜部的变形而变化。 第一电极包括包括包括Ta和Mo的第一合金的第一合金层。第一电极电连接到层叠体。 第二电极与层叠体电连接。
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Patent Agency Ranking
6.发明申请PRESSURE SENSOR, MICROPHONE, ULTRASONIC SENSOR, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权压力传感器，麦克风，超声波传感器，血压传感器和触控面板公开(公告)号：US20150338293A1
公开(公告)日：2015-11-26
申请号：US14721497
申请日：2015-05-26
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Kei MASUNISHI , Hideaki FUKUZAWA , Yoshihiko FUJI , Akiko YUZAWA , Kazuaki OKAMOTO
CPC classification number: G01L1/22 , A61B5/021 , A61B5/02141 , A61B5/05 , A61B5/6898 , A61B5/7475 , A61B2562/0204 , A61B2562/0247 , A61B2562/028 , G01L1/125 , G01L9/007
Abstract: According to an embodiment, a pressure sensor includes a substrate, a support part, a flexible membrane part, and a magnetoresistive element. The support part is adhered on the substrate by using a first adhesive material with a first Young's modulus and a second adhesive material with a second Young's modulus different from the first Young's modulus. The membrane part is supported by the support part. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
Abstract translation: 根据实施例，压力传感器包括基板，支撑部分，柔性膜部分和磁阻元件。 通过使用具有第一杨氏模量的第一粘合材料和具有与第一杨氏模量不同的第二杨氏模量的第二粘合材料将支撑部分附着在基底上。 膜部由支撑部支撑。 磁阻元件设置在膜部分上，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的间隔层。
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公开(公告)号：US20150088008A1
公开(公告)日：2015-03-26
申请号：US14469876
申请日：2014-08-27
Applicant: Kabushiki Kaisha Toshiba
Inventor： Yoshihiko FUJI , Hideaki FUKUZAWA , Michiko HARA , Tomohiko NAGATA , Akio HORI , Shiori KAJI , Yoshihiro HIGASHI , Akiko YUZAWA
CPC classification number: G01L9/16 , A61B5/021 , A61B5/02141 , A61B5/6824 , A61B2562/0247 , G01L9/0001 , G06F3/0414 , H04R19/005 , H04R19/04 , H04R31/00
Abstract: According to one embodiment, a pressure sensor includes a support, a film unit supported by the support, having an upper surface, and capable of being deformed, and a first sensing element provided on the upper surface. The first sensing element includes a first magnetic layer, a second magnetic layer provided apart from the first magnetic layer and a first intermediate unit including a first intermediate layer including a portion provided between the first and second magnetic layers. The first magnetic layer extends in a first direction parallel to the upper surface, and a first major axis length of the first magnetic layer is longer than a first minor axis length. The second magnetic layer extends in a second direction parallel to the upper surface and crossing the first direction, and a second major axis length of the second magnetic layer is longer than a second minor axis length.
Abstract translation: 根据一个实施例，压力传感器包括支撑件，由支撑件支撑的膜单元，具有上表面并且能够变形，以及设置在上表面上的第一感测元件。 第一感测元件包括第一磁性层，与第一磁性层分开设置的第二磁性层和包括第一中间层的第一中间单元，第一中间层包括设置在第一和第二磁性层之间的部分。 第一磁性层在平行于上表面的第一方向上延伸，第一磁性层的第一长轴长度比第一短轴长度长。 第二磁性层在平行于上表面并与第一方向相交的第二方向上延伸，第二磁性层的第二长轴长度比第二短轴长度长。
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8.发明申请STRAIN SENSING ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权应变感应元件，压力传感器，麦克风，血压传感器和触控面板公开(公告)号：US20150082918A1
公开(公告)日：2015-03-26
申请号：US14471694
申请日：2014-08-28
Applicant: Kabushiki Kaisha Toshiba
Inventor： Yoshihiko FUJI , Hideaki FUKUZAWA , Shiori KAJI , Akio HORI , Tomohiko NAGATA , Michiko HARA , Yoshihiro HIGASHI , Akiko YUZAWA
CPC classification number: A61B5/02141 , A61B5/6824 , A61B2562/0247 , G01L1/125 , G01L9/0041 , G01L9/16
Abstract: According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.
Abstract translation: 根据一个实施例，应变感测元件设置在被配置为变形的胶片单元上。 应变感测元件包括功能层，第一磁性层，第二磁性层和间隔层。 功能层包括氧化物和氮化物中的至少一种。 第二磁性层设置在功能层和第一磁性层之间。 第二磁性层的磁化根据膜单元的变形而变化。 间隔层设置在第一磁性层和第二磁性层之间。 第二磁性层的至少一部分是无定形的并且包括硼。
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公开(公告)号：US20190041285A1
公开(公告)日：2019-02-07
申请号：US16145763
申请日：2018-09-28
Applicant: Kabushiki Kaisha Toshiba
Inventor： Yoshihiko FUJI , Michiko HARA , Kei MASUNISHI , Yoshihiro HIGASHI , Shiori KAJI , Akiko YUZAWA , Akio HORI , Tomohiko NAGATA , Kazuaki OKAMOTO , Kenji OTSU , Shotaro BABA
CPC classification number: G01L9/0091 , A61B5/021 , A61B5/6898 , A61B2562/0247 , A61B2562/12 , H04R1/46 , H04R15/00 , H04R2201/003 , H04R2499/11
Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.
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公开(公告)号：US20180156683A1
公开(公告)日：2018-06-07
申请号：US15888324
申请日：2018-02-05
Applicant: Kabushiki Kaisha Toshiba
Inventor： Kenji OTSU , Michiko HARA , Yoshihiko FUJI , Kei MASUNISHI , Akiko YUZAWA , Tomohiko NAGATA , Shiori KAJI , Yoshihiro HIGASHI , Kazuaki OKAMOTO , Shotaro BABA
CPC classification number: G01L7/02 , G01B7/18 , G01L1/2287 , G01L9/0051
Abstract: According to one embodiment, a sensor includes a film portion and a first sensor portion. The film portion is deformable. The first sensor portion is provided at the film portion. The first sensor portion includes a first conductive layer, a second conductive layer, a first magnetic layer, a second magnetic layer, and a first intermediate layer. The second conductive layer is provided between the first conductive layer and the film portion. The first magnetic layer is provided between the first conductive layer and the second conductive layer. The second magnetic layer is provided between the first magnetic layer and the second conductive layer. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. A curvature of the first conductive layer is different from a curvature of at least a portion of the film portion.
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