公开(公告)号：US5333090A

公开(公告)日：1994-07-26

申请号：US959699

申请日：1992-10-13

Applicant: Philip Baumeister ,  Dennis Fischer ,  David Trost

Inventor： Philip Baumeister ,  Dennis Fischer ,  David Trost

IPC: G02B1/10 ,  G02B5/08 ,  G02B5/26 ,  G02B5/28 ,  G02B6/02 ,  G02B6/032 ,  B32B3/00 ,  G02B6/00

CPC classification number: G02B5/0833 ,  G02B5/0858 ,  Y10T428/24479 ,  Y10T428/24537

Abstract: A coated reflector reflective of radiation having two different wavelengths over a wide range of incidence angles, including grazing incidence angles. The coated reflector can be employed in a waveguide for laser radiation useful for medical or other applications, such as a combined HeNe and CO.sub.2 laser beam. Preferably, the coated reflector includes a metal substrate and a multi-layer stack thereon, the multi-layer stack consists of alternating dielectric layers of high and low refractive index material, each pair of adjacent high and low index layers of the stack has a combined matched optical thickness substantially equal to an incident short (e.g., visible) wavelength multiplied by a factor M/2, and the total matched optical thickness of the stack is substantially equal to (2N-1).lambda..sub.L /8, where M and N are positive integers and .lambda..sub.L is an incident long wavelength (such as the wavelength of a CO.sub.2 laser beam). Preferably, the substrate is silver, the high index dielectric is zinc sulfide, and the low index dielectric is yttrium fluoride or cerium fluoride. In other embodiments, the invention is a coated substrate having substantially parallel indentations along which it can be folded into a polygonal shape for use a waveguide.

Abstract translation: 反射辐射的涂覆反射体在宽范围的入射角上具有两个不同的波长，包括掠入射角。 涂覆的反射器可以用于可用于医疗或其他应用的激光辐射的波导中，例如组合的HeNe和CO 2激光束。 优选地，涂覆的反射器包括金属基板和其上的多层堆叠，多层堆叠由交替的高折射率材料和低折射率材料的电介质层组成，堆叠的每对相邻的高和低折射率层具有组合 匹配的光学厚度基本上等于乘以因子M / 2的入射短（例如可见）波长，并且叠层的总匹配光学厚度基本上等于（2N-1）λL / 8，其中M和N 是正整数，λL是入射长波长（例如CO 2激光束的波长）。 优选地，基底是银，高折射率电介质是硫化锌，低折射率电介质是氟化钇或氟化铈。 在其它实施例中，本发明是具有基本上平行的凹陷的涂覆的基底，沿着该凹陷可折叠成多边形形状以用于波导。

公开(公告)号：US5257992A

公开(公告)日：1993-11-02

申请号：US841426

申请日：1992-02-26

Applicant: Robert B. Estrada ,  David Trost

Inventor： Robert B. Estrada ,  David Trost

IPC: A61B18/20 ,  A61B19/00 ,  B23K26/02 ,  G02B7/182 ,  G02B26/08 ,  A61B17/36

CPC classification number: A61B18/20 ,  A61B34/72 ,  B23K26/02 ,  B23K26/035 ,  G02B26/0816 ,  G02B7/1824 ,  A61B2034/742 ,  Y10T74/20201

Abstract: An improved apparatus for manually manipulating a surgical laser beam is disclosed. The preferred embodiment of the invention includes a mirror nominally positioned at a 45 degree angle to the incident laser beam, a joy stick for manipulating the mirror, and a linkage interconnecting the two. The mirror is mounted to allow it to rotate about two mutually perpendicular and intersecting axes. The linkage operates to direct the reflected laser beam in two orthogonal dimensions such that a ratio between the movement of the reflected beam in each dimension is equivalent to the ratio of the movement of the joy stick in each dimension. This yields a reflected laser beam that moves a distance proportional to the amount of motion input to the joy stick. The reduction or amplification ratio between the input motion and the reflected laser beam motion remains constant, regardless of the direction of motion. In this manner, by moving the joy stick in a circular motion, the reflected laser beam also moves in a circular motion, rather than in an elliptical motion. A simplified joint that allows spherical rotation and axial translation between its two members is also disclosed. In the preferred embodiment, an adjustable hand rest is provided that moves out of the way when not in use.

Abstract translation: 公开了一种用于手动操作外科激光束的改进的装置。 本发明的优选实施例包括一个与入射激光束成45度角的镜子，用于操纵反射镜的操纵杆以及将两者相互连接的连杆。 镜子被安装成允许其围绕两个相互垂直和相交的轴线旋转。 联动操作以将反射的激光束引导成两个正交的尺寸，使得反射光束在每个维度上的运动之间的比率等于每个维度中的操纵杆的移动比。 这产生一个反射激光束，该反射激光束与输入到操纵杆的运动量成正比的距离。 输入运动与反射激光束运动之间的减小或放大比率保持恒定，而与运动方向无关。 以这种方式，通过以圆周运动来移动操纵杆，反射的激光束也以圆周运动而不是椭圆运动而移动。 还公开了允许其两个构件之间的球面旋转和轴向平移的简化接头。 在优选实施例中，提供了可调节的扶手，其在不使用时移动。

公开(公告)号：US4506205A

公开(公告)日：1985-03-19

申请号：US502998

申请日：1983-06-10

Applicant: David Trost ,  Daniel Galburt

Inventor： David Trost ,  Daniel Galburt

IPC: H01L21/30 ,  G03F7/20 ,  G03F9/00 ,  G05D3/00 ,  H01L21/027 ,  H01L21/68 ,  G05B1/06

CPC classification number: G03F7/70716

Abstract: This invention is directed to electromagnetic alignment apparatus, which is particularly adapted, among many other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination three or more spaced magnets, three or more coil assemblies mounted to pass through the magnetic fields of the magnets respectively, means for controlling the flow of current through the coil assemblies respectively, said coil assemblies being joined together to form a structure movable with respect to the magnets and adapted to carry an object thereon, the coil assemblies being wound with respect to each other so that by controlling the supply of current to the coils the structure can be moved selectively in three degrees of freedom.

Abstract translation: 本发明涉及电磁对准装置，其特别适用于许多其他可能的用途，用于在微光刻系统中对准晶片，所述装置包括组合三个或更多间隔的磁体，三个或更多个线圈组件安装成通过 分别通过磁体的磁场，用于分别控制通过线圈组件的电流的装置，所述线圈组件被连接在一起以形成相对于磁体可移动的结构，并适于在其上承载物体，线圈组件 相对于彼此缠绕，使得通过控制向线圈的电流的供应，结构可以以三个自由度选择性地移动。

公开(公告)号：US06555829B1

公开(公告)日：2003-04-29

申请号：US09481103

申请日：2000-01-10

Applicant: James P. Spallas ,  Lawrence P. Muray ,  David Trost ,  Ho-Seob Kim ,  Tai-Hon P. Chang

Inventor： James P. Spallas ,  Lawrence P. Muray ,  David Trost ,  Ho-Seob Kim ,  Tai-Hon P. Chang

IPC: G01B902

CPC classification number: B23Q1/34 ,  B23Q1/621 ,  H01J37/023 ,  H01J2237/20264 ,  H01L21/68

Abstract: Disclosed is a positioning stage for precisely positioning an object within a limited range of travel (e.g. 100 &mgr;m). By way of example, the stage can be used to position an electron source such as a field emitter in an electron beam microcolumn. The stage includes a block which defines a channel to allow flexure along a first axis. The block also defines another channel to allow flexure along a second axis perpendicular to the first axis. Using actuators in the channels to flex a portion of the block, the object supported by the block can be precisely positioned to a desired location in a horizontal plane defined by the first and second axes.

Abstract translation: 公开了一种用于在有限的旅行范围内（例如，100mum）精确地定位物体的定位台。 作为示例，该级可用于将诸如场致发射体的电子源定位在电子束微柱中。 舞台包括限定通道以允许沿着第一轴弯曲的块。 该块还限定另一个通道，以允许沿垂直于第一轴线的第二轴线弯曲。 使用通道中的致动器来弯曲块的一部分，由块支撑的物体可精确地定位在由第一和第二轴限定的水平平面中的期望位置。

公开(公告)号：US5784925A

公开(公告)日：1998-07-28

申请号：US766271

申请日：1996-12-13

Applicant: David Trost ,  Lee Veneklasen

Inventor： David Trost ,  Lee Veneklasen

IPC: F16C29/00 ,  F16C29/02 ,  F16C32/06 ,  G03F7/20 ,  H01J37/20 ,  H01J37/305 ,  H01L21/027 ,  G05G11/00 ,  F16C33/06 ,  F16J15/52

CPC classification number: F16C32/06 ,  F16C29/025 ,  F16C32/0603 ,  F16C33/748 ,  G03F7/70716 ,  G03F7/70816 ,  H01J37/20 ,  F16C2300/62 ,  H01J2237/20221 ,  H01J2237/3175 ,  Y10S277/913 ,  Y10T74/20354

Abstract: A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.

Abstract translation: 具有流体轴承的真空兼容的直线运动装置包含在具有明显小于一个大气压的工作压力的真空室内。 流体轴承包含在真空室内的真空外壳内，并保持在比真空室高的压力，但小于一个大气压，因此基本上隔离流体轴承。 可移动有效载荷耦合到线性运动装置，使得在装置的长轴方向上的线性运动被提供给可移动的有效载荷。

公开(公告)号：US5558666A

公开(公告)日：1996-09-24

申请号：US183111

申请日：1994-01-14

Applicant: David A. Dewey ,  Michael Arnett ,  Dale E. Koop ,  David Trost

Inventor： David A. Dewey ,  Michael Arnett ,  Dale E. Koop ,  David Trost

IPC: A61B18/20 ,  A61N5/06

CPC classification number: A61B18/203 ,  A61B18/201 ,  A61B2018/00452 ,  A61B2018/2025

Abstract: A handpiece for use in delivering the output beam of a laser to the surface of a patient's skin for performing a dermatological procedure. In a first and second embodiment of the present invention, the handpiece provides a highly collimated beam of a fixed, non-variable spot size which is largely insensitive to movement of the handpiece over a range of working positions. In a third embodiment the handpiece provides a highly collimated and well defined focused laser spot of variable size where for a selected spot size, the size is largely insensitive to movement of the handpiece over a range of working positions. In all of the embodiments, the highly collimated laser beam permits the surgeon performing the procedure to move the handpiece over a range of positions without significantly defocusing or altering the spot size of the beam.

Abstract translation: 用于将激光的输出光束传送到患者皮肤表面以进行皮肤病学手术的手持件。 在本发明的第一和第二实施例中，手持件提供固定的，不可变的光斑尺寸的高度准直的光束，其大大不敏感于在一定范围的工作位置上的手持件的移动。 在第三实施例中，手持件提供可变尺寸的高度准直和良好限定的聚焦激光光斑，其中对于所选择的光点尺寸，该尺寸对于在一定范围的工作位置上的手持件的移动很大程度上不敏感。 在所有实施例中，高度准直的激光束允许外科医生执行过程以将手持件移动到一定范围的位置，而不会明显地散焦或改变光束的光点尺寸。

公开(公告)号：US5321715A

公开(公告)日：1994-06-14

申请号：US57125

申请日：1993-05-04

Applicant: David Trost

Inventor： David Trost

IPC: A61B17/00 ,  A61B18/20 ,  A61B18/24 ,  H01S3/09

CPC classification number: A61B18/24 ,  A61B18/201 ,  A61B2017/00154 ,  A61B2017/00176

Abstract: A pulse format for a laser system is disclosed for maximizing the energy delivered to a target immersed in an absorbing liquid. A first pulse is generated having an energy sufficient to initiate the formation of a vapor bubble in the liquid medium adjacent the end of the delivery device. A second, high energy pulse is generated after the vapor bubble initiated by the first pulse has expanded an amount sufficient to displace the liquid between the delivery device and the target. In this manner, the second pulse is delivered directly to the target and little energy is lost to the liquid medium.

Abstract translation: 公开了一种激光系统的脉冲格式，用于最大限度地提供传递到浸在吸收液体中的目标物质的能量。 产生第一脉冲，其具有足以在邻近输送装置末端的液体介质中开始形成蒸气泡的能量。 在由第一脉冲启动的蒸汽气泡膨胀足以使输送装置和靶之间的液体移位的量之后，产生第二高能量脉冲。 以这种方式，第二脉冲被直接输送到靶，并且很少的能量损失到液体介质。

公开(公告)号：US5312398A

公开(公告)日：1994-05-17

申请号：US867895

申请日：1992-04-13

Applicant: James L. Hobart ,  David Trost

Inventor： James L. Hobart ,  David Trost

IPC: A61B18/20 ,  G02B17/06 ,  A61B17/36 ,  A61B17/24

CPC classification number: A61B18/201 ,  G02B19/0023 ,  G02B19/0033 ,  G02B19/009

Abstract: A beam delivery apparatus, including a set of focusing mirrors (or transmissive lenses) mounted along an endoscope channel. A laser beam can be focused into an input end of the channel with a smaller F number (wider cone angle) than is possible in a conventional endoscope. As the beam propagates down the channel, it is reflected (or transmitted) a finite number of times by the focusing elements. The focusing elements act as a periscope to focus and refocus the beam as it propagates along the channel, with little loss of beam power. The invention enables delivery of the beam to the channel's distal end with a smaller F number than can be achieved using a conventional endoscope. In a preferred embodiment, a pair of reflecting strips are mounted the channel, the surface of each strip defines six focusing mirrors, and the beam undergoes a total of twelve reflections from the mirrors as it propagates down the channel. Preferably, the surface of each mirror has a curvature selected to prevent the introduction of astigmatic distortion during each beam reflection.

Abstract translation: 一种束输送装置，包括沿着内窥镜通道安装的一组聚焦镜（或透射透镜）。 激光束可以以比传统内窥镜中可能的更小的F数（更宽的锥角）聚焦到通道的输入端。 随着光束向下传播，它被聚焦元件反射（或传输）有限次数。 聚焦元件用作潜望镜，以便当光束沿着通道传播时聚焦和重新聚焦光束，光束功率损失很小。 本发明使得能够以比使用常规内窥镜可以实现的更小的F数将束传送到通道的远端。 在优选实施例中，一对反射条安装在通道上，每个条的表面限定六个聚焦反射镜，并且当光束沿着通道向下传播时，该光束经过总共十二次反射。 优选地，每个反射镜的表面具有选择的曲率，以防止在每个光束反射期间引入散光变形。

公开(公告)号：US4485339A

公开(公告)日：1984-11-27

申请号：US502997

申请日：1983-06-10

Applicant: David Trost

Inventor： David Trost

IPC: H01L21/30 ,  G03F7/20 ,  G03F9/00 ,  G05D3/00 ,  H01L21/027 ,  H01L21/68 ,  H02K41/02 ,  G05B1/06

CPC classification number: G03F7/70716 ,  H02K41/031 ,  H02K2201/18

Abstract: This invention is directed to electro-magnetic alignment devices, which are particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said devices comprising in combination a base plate, a first current carrying coil assembly mounted on the base plate, a second current carrying coil assembly mounted on the base plate in spaced relationship with respect to the first coil assembly, a first magnet mounted adjacent the first coil assembly and a second magnet mounted adjacent the second coil assembly, an upper connecting piece connecting the first and second magnets, a mount for receiving an object on the upper connecting piece, the base plate and magnets and upper connecting piece coacting to form a magnetic circuit, a controller for controlling the flow and direction of current through the coil assemblies to move the magnets and upper connecting piece with respect to the base plate, a plurality of linear actuators mounted between the magnets and the upper connecting piece respectively for moving the connecting piece with respect to the magnets.

Abstract translation: 本发明涉及电磁对准装置，其特别适用于在微光刻系统中对准晶片的其它可能用途，所述装置包括基板，安装在所述第一载流线圈组件上的第一载流线圈组件 基板，相对于第一线圈组件以间隔的关系安装在基板上的第二载流线圈组件，邻近第一线圈组件安装的第一磁体和邻近第二线圈组件安装的第二磁体，连接 第一和第二磁体，用于接收上连接件上的物体的安装座，基板和磁体以及上连接件共同形成磁路;控制器，用于控制通过线圈组件的电流流动和方向移动 磁体和上连接片相对于基板，多个线性致动器安装在磁卡之间 网和上连接片分别用于相对于磁体移动连接件。