MEMS DEVICE HAVING CURVED REFLECTIVE LAYER AND METHOD FOR MANUFACTURING MEMS DEVICE

    公开(公告)号:US20210278282A1

    公开(公告)日:2021-09-09

    申请号:US17328773

    申请日:2021-05-24

    Abstract: A MEMS device according to an example embodiment of the present disclosure includes: a lower substrate; an infrared sensor formed on the lower substrate; and a lower bonding pad disposed to cover the infrared sensor. The infrared sensor includes: a metal pad formed on an upper surface of the lower substrate and electrically connected to a detection circuit; a reflective layer formed on the upper surface of the lower substrate and reflecting an infrared band; an absorption plate disposed to be spaced apart from an upper portion of the reflective layer and absorbing infrared rays to change resistance; and an anchor formed on the metal pad to support the absorption plate and to electrically connect the metal pad and the absorption plate to each other. The reflective layer has a curved or stepped shape such that a distance between the reflective layer and the absorption plate varies depending on a position of the reflective layer.

    METHOD OF PERFORMING VISUALIZED MEASUREMENT ON THICKNESS DISTRIBUTION OF PAINT FILM AND APPARATUS THEREFOR

    公开(公告)号:US20210223037A1

    公开(公告)日:2021-07-22

    申请号:US16307640

    申请日:2018-11-02

    Abstract: A method of performing visualized measurement on thickness distribution of a paint film and an apparatus therefor. A measurement target region is heated by a heating unit that applies a light beam while moving relative to the measurement target region of a measurement target structure. A sensing unit moving together with the heating unit generates a plurality of thermal images related to a phenomenon in which thermal energy is propagated in the measurement target region by scanning and photographing the heated measurement target region. The thermal images in a dynamic state are converted into time-spatial-integrated thermal images in a static state by performing coordinate transformation according to a time-spatial-integrated coordinate transformation algorithm. A thickness of the paint film is calculated by using a Fourier thermal conduction equation. A noise caused by an external heat source is removed by subtracting a pre-heating time-spatial-integrated thermal image from the converted time-spatial-integrated thermal image.

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