公开(公告)号：US06856081B2

公开(公告)日：2005-02-15

申请号：US10192772

申请日：2002-07-09

Applicant: Mark J. Cattelino ,  Fred I. Friedlander

Inventor： Mark J. Cattelino ,  Fred I. Friedlander

IPC: H01J23/087 ,  G01K1/08 ,  H01J3/14 ,  H01J3/20 ,  H01J25/10 ,  H01J29/00 ,  H01J29/46 ,  H01J29/70

CPC classification number: H01J23/0876 ,  H01J3/20 ,  H01J23/087

Abstract: Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device. The magnetic field symmetry is independent of beam voltage, beam current and applied magnetic field strength. A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a multi-beam electron beam device. The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the device. The flux plate includes apertures for each beam of the multi-beam device. A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps may be implemented in a number of ways all of which have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the device as linear beams.

Abstract translation: 围绕多光束电子束装置的每个光束的纵向轴线提供轴向对称的磁场。 磁场对称性与束电压，束电流和施加的磁场强度无关。 通量均衡器组件设置在阴极和阳极之间以及多束电子束装置的阴极附近。 组件包括完全包含在装置的磁聚焦电路内的铁磁通量板。 磁通板包括用于多光束装置的每个光束的孔。 磁通平衡间隙或间隙设置在磁通板中，以在磁通板中的磁场中产生扰动，其反映由波束的离轴位置引起的不对称性。 间隙可以以多​​种方式实现，其中所有这些都具有产生局部连续变化的磁阻的作用，其局部地反映磁场不对称性。 通量均衡器组件防止或基本上减少光束扭曲，并将器件的所有电子束保持为线性光束。

公开(公告)号：US20170125202A1

公开(公告)日：2017-05-04

申请号：US15404440

申请日：2017-01-12

Applicant: Hermes Microvision Inc.

Inventor： Shuai Li

IPC: H01J37/143 ,  H01J37/28

CPC classification number: H01J37/143 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/09 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/063 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/0653 ,  H01J2237/083 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2806 ,  H01J2237/2817

Abstract: This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

公开(公告)号：US09418815B2

公开(公告)日：2016-08-16

申请号：US14271940

申请日：2014-05-07

Applicant: PARAM CORPORATION

Inventor： Hiroshi Yasuda

IPC: H01J37/30 ,  H01J3/24 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/143 ,  H01J37/317 ,  H01J3/20

CPC classification number: H01J3/24 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/143 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/1405

Abstract: There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.

Abstract translation: 提供了一种用于使用永磁体有效地绘制精细图案的装置。 该装置具有由Z轴作为中心轴的圆柱形铁磁体构成的外筒201，位于外筒内部并沿着Z轴方向极化的圆柱形永磁体202，位于筒状永久磁铁内部的校正线圈204， 用于调整由圆柱形永磁体沿Z轴方向产生的磁场强度的圆柱形永磁体的间隙和位于圆柱形永磁体和校正线圈之间的间隙中的冷却剂通道203，用于允许冷却剂 流过其中并控制圆筒形永磁体的温度变化。

公开(公告)号：US09000394B2

公开(公告)日：2015-04-07

申请号：US13464261

申请日：2012-05-04

Applicant: Weiming Ren ,  Zhongwei Chen

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: H01J37/14

CPC classification number: H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

Abstract: The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

公开(公告)号：US20130248730A1

公开(公告)日：2013-09-26

申请号：US13895452

申请日：2013-05-16

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: H01J3/20

CPC classification number: H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

Abstract: The present invention provides two ways to form a special permeability discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的磁导率不连续单元的两种方式，其具有更简单的构造或在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

公开(公告)号：US07622721B2

公开(公告)日：2009-11-24

申请号：US11704476

申请日：2007-02-09

Applicant: Michael Gutkin ,  Alexander Bizyukov ,  Vladimir Sleptsov ,  Ivan Bizyukov ,  Konstantin Sereda

Inventor： Michael Gutkin ,  Alexander Bizyukov ,  Vladimir Sleptsov ,  Ivan Bizyukov ,  Konstantin Sereda

IPC: H01J27/02 ,  G21K1/00

CPC classification number: H01J27/143 ,  H01J3/20

Abstract: A focused ion source based on a Hall thruster with closed loop electron drift and a narrow acceleration zone is disclosed. The ion source of the invention has an ion focusing system consisting of two parts. The first part is a ballistic focusing system in which the aperture through which the beam exits the discharge channel is tilted. The second is a magnetic focusing system which focuses the ion beam exiting the discharge channel by canceling a divergent magnetic field present at the aperture through which the beam exits the discharge channel. The ion source of the invention also has an in-line hollow cathode capable of forming a self-sustaining discharge. The invention further reduces substrate contamination, while increasing the processing rate. Further the configuration disclosed allows the ion source to operate at lower operational gas pressures.

Abstract translation: 公开了一种基于具有闭环电子漂移的霍尔推进器和窄加速区的聚焦离子源。 本发明的离子源具有由两部分组成的离子聚焦系统。 第一部分是一种弹道聚焦系统，其中光束离开排放通道的孔倾斜。 第二个是磁聚焦系统，其通过消除光束离开放电通道的开口处的发散磁场来聚焦离开放电通道的离子束。 本发明的离子源还具有能够形成自持放电的直列空心阴极。 本发明进一步降低了衬底污染，同时提高了处理速度。 此外，所公开的配置允许离子源在较低的工作气体压力下操作。

公开(公告)号：US4633208A

公开(公告)日：1986-12-30

申请号：US614917

申请日：1984-05-29

Applicant: Erich Voss ,  Hermann Wollnik

Inventor： Erich Voss ,  Hermann Wollnik

IPC: H01J37/141 ,  G21K1/08 ,  G21K1/093 ,  H01J3/20 ,  H01J29/64 ,  H01J37/10 ,  H05H7/00 ,  H05H7/04 ,  H01F7/00 ,  H01F1/00

CPC classification number: G21K1/08 ,  H01J3/20 ,  H05H7/04

Abstract: An nth order magnetic multipole arrangement for influencing the trajectory of charged particles is disclosed. In order to avoid using structural parts that are manufactured separately, it has been found to provide as the multipole arrangement, the stator of a multi-pole alternating current machine, the stator winding of which is fed by a voltage source in such a way that the produce of current and number of turns (number of ampere turns) in a groove or group of grooves disposed under the azimuth angle .theta. is proportional to cos (n .theta.), n corresponding to the order (order number) of the multipole arrangement, and the factors a and b being taken from the ratio b/a which states the orientation of the multipole relative to the azmith angle .theta.=0. As the multipole arrangement there may be provided also a stator, excited by permanent magnets, of a direct current machine.

Abstract translation: 公开了用于影响带电粒子的轨迹的第n级磁多极装置。 为了避免使用单独制造的结构部件，已经发现，提供多极装置，多极交流电机的定子，其定子绕组由电压源馈送，使得 设置在方位角θ下方的槽或一组槽中的电流和匝数（安培匝数）的产生与对应于多极装置的顺序（顺序号）的cos（nθ），n成正比， 并且因子a和b取自表示多极相对于立方角θ= 0的取向的比率b / a。 作为多极装置，还可以设置直流电机的由永磁体激励的定子。

公开(公告)号：USRE18972E

公开(公告)日：1933-10-24

申请号：US18972D

IPC: H01J3/20

CPC classification number: H01J3/20

公开(公告)号：US20170125203A1

公开(公告)日：2017-05-04

申请号：US15404618

申请日：2017-01-12

Applicant: Hermes Microvision Inc.

Inventor： Shuai Li

IPC: H01J37/143

CPC classification number: H01J37/143 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/09 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/063 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/0653 ,  H01J2237/083 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2806 ,  H01J2237/2817

Abstract: This invention provides a charged particle source, which comprises an emitter and means fo generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

公开(公告)号：US09202658B2

公开(公告)日：2015-12-01

申请号：US14572052

申请日：2014-12-16

Applicant: Hermes-Microvision, Inc.

Inventor： Zhongwei Chen ,  Weiming Ren ,  Xuerang Hu ,  Xuedong Liu

IPC: H01J1/50 ,  H01J3/20

CPC classification number: H01J3/20 ,  H01J37/141 ,  H01J37/143 ,  H01J2237/1405 ,  Y10T29/49075

Abstract: A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.

Abstract translation: 提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。 多轴磁性透镜包括多个磁性复数透镜模块。 一方面，多轴磁性透镜采用环形永磁体单元，以向多个磁性子透镜模块提供基本稳定的磁通量。 另一方面，多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。 本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。 因此，本发明将有益于需要在长时间内执行的应用，同时保持高性能稳定性。