公开(公告)号：US08050884B2

公开(公告)日：2011-11-01

申请号：US11951698

申请日：2007-12-06

Applicant: Ronald N. Murata

Inventor： Ronald N. Murata

IPC: G01K11/30 ,  G01K17/00 ,  G01J5/48

CPC classification number: G01J5/602 ,  G01J5/0003 ,  G01J2005/0048 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01J2005/0081 ,  G01J2005/0092

Abstract: Methods and apparatus are provided to determine the emissivity, temperature and area of an object. The methods and apparatus are designed such that the emissivity and area of the object may be separately determined as functions dependent upon the temperature of the object derived from a three or more band infrared measurement sensor. As such, the methods and apparatus may only require a regression analysis of the temperature of the object without any regression analysis of the emissivity and area of the object.

Abstract translation: 提供方法和装置来确定物体的发射率，温度和面积。 方法和装置被设计成使得物体的发射率和面积可以单独地确定为取决于从三个或更多个带状红外测量传感器导出的物体的温度的函数。 因此，方法和装置可以仅需要物体的温度的回归分析，而不对物体的发射率和面积进行任何回归分析。

公开(公告)号：US5231595A

公开(公告)日：1993-07-27

申请号：US782750

申请日：1991-10-18

Applicant: Toshiro Makino ,  Hiroji Tsujimura ,  Jiro Arima

Inventor： Toshiro Makino ,  Hiroji Tsujimura ,  Jiro Arima

IPC: G01J5/00 ,  G01J5/60

CPC classification number: G01J5/60 ,  G01J2005/0074

Abstract: A pyrometer includes a light source capable of emitting light to at least two wavelengths to a target to be measured. A light measuring member measures the light source and provides output signals representative of those two wavelengths. A second light measuring member measures light reflected by the target and provides second signals corresponding to the two wavelengths. A third light measuring member measures the intensity of the light radiated by the target with respect to those two wavelengths to produce third signals. An emissivity is assumed for the target based on the predetermined wavelengths, and a temperature is calculated on the basis of the minimum value of the difference between the assumed radiation intensity calculated according to the assumed emissivity of the target and the measured radiation intensity in accordance with the third signals.

Abstract translation: 高温计包括能够将光发射到至少两个波长的光源到待测量的靶。 光测量部件测量光源并提供表示这两个波长的输出信号。 第二光测量部件测量由目标反射的光，并提供对应于两个波长的第二信号。 第三光测量部件测量目标相对于这两个波长辐射的光的强度，以产生第三信号。 基于预定波长对目标进行发射率，并且基于根据目标的假设发射率计算的假定辐射强度与所测量的辐射强度之间的差的最小值来计算温度， 第三个信号。

公开(公告)号：US5186541A

公开(公告)日：1993-02-16

申请号：US780716

申请日：1991-10-21

Applicant: Raymond C. Paulk

Inventor： Raymond C. Paulk

IPC: G01J5/00

CPC classification number: G01J5/0003 ,  G01J5/02 ,  G01J5/026 ,  G01J5/16 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01J2005/068

Abstract: A non-contact infrared temperature sensing system for determining temperature values for a series of targets all having a similar emissivity value, which calculates an emissivity value for the targets based on the sensed total heat radiated from one target, an inputted temperature value for that target, and a temperature value for extraneous radiation from that target. The system then computes, for each subsequent target whose heat radiation is detected, a temperature value for each said target dependent upon the emitted component of radiation, and independent of the extraneous component of radiation from that target.

Abstract translation: 一种非接触式红外温度感测系统，用于确定一系列具有相似发射率值的一系列目标的温度值，该温度值基于从一个目标辐射的感测总热量计算目标的发射率值，该目标的输入温度值 ，以及来自该目标的外来辐射的温度值。 然后，该系统对于其被检测到热辐射的每个随后的目标计算取决于所发射的辐射分量的每个所述目标的温度值，并且独立于来自该目标的辐射的外来分量。

公开(公告)号：US5156461A

公开(公告)日：1992-10-20

申请号：US702646

申请日：1991-05-17

Applicant: Mehrdad M. Moslehi ,  Habib N. Najm

Inventor： Mehrdad M. Moslehi ,  Habib N. Najm

IPC: G01J5/00 ,  G01J5/08

CPC classification number: G01J5/0003 ,  G01J5/00 ,  G01J5/0007 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0821 ,  G01J5/0834 ,  G01J5/0862 ,  G01J5/0868 ,  G01J5/0896 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01J5/061

Abstract: A multi-point non-invasive, real-time pyrometry-based temperature sensor (200) for simultaneously sensing semiconductor wafer (22) temperature and compensating for wafer emissivity effects. The pyrometer (200) measures the radiant energy that a heated semiconductor wafer (22) emits and coherent beams of light (224) that the semiconductor wafer (22) reflects. As a result, the sensor (200) generates accurate, high-resolution multi-point measurements of semiconductor wafer (22) temperature during a device fabrication process. The pyrometer (200) includes an infrared laser source (202) that directs coherent light beam (203) into beam splitter (204). From the beam splitter (204), the coherent light beam (203) is split into numerous incident coherent beams (210). Beams (210) travel via optical fiber bundles (218) to the surface of semiconductor wafer (22) within the fabrication reactor (80). Each optical fiber bundle (218) collects reflected coherent light beam and radiant energy from wafer (22). Reflected coherent light beam (226) and radiant energy (222) is directed to a detector (240) for detecting signals and recording radiance, emissivity, and temperature values. Multiple optical fiber bundles (218) may be used in the sensor (200) for high spatial resolution multi-point measurements of wafer (22) temperature for precision real-time process control and uniformity optimizations.

Abstract translation: 一种用于同时感测半导体晶片（22）温度并补偿晶片辐射效应的多点非侵入式实时基于高温测量的温度传感器（200）。 高温计（200）测量加热的半导体晶片（22）发射的辐射能量和半导体晶片（22）反射的相干的光束（224）。 结果，传感器（200）在器件制造过程中产生半导体晶片（22）温度的准确的高分辨率多点测量。 高温计（200）包括将相干光束（203）引导到分束器（204）中的红外激光源（202）。 从分束器（204），相干光束（203）被分成许多入射相干光束（210）。 光束（210）通过光纤束（218）行进到制造反应器（80）内的半导体晶片（22）的表面。 每个光纤束（218）从晶片（22）收集反射的相干光束和辐射能。 反射相干光束（226）和辐射能（222）被引导到用于检测信号和记录辐射度，发射率和温度值的检测器（240）。 可以在传感器（200）中使用多个光纤束（218），用于晶片（22）温度的高空间分辨率多点测量，用于精确实时过程控制和均匀性优化。

公开(公告)号：US4924478A

公开(公告)日：1990-05-08

申请号：US620553

申请日：1984-06-14

Applicant: Volker Tank

Inventor： Volker Tank

IPC: G01J5/00 ,  G01J5/06

CPC classification number: G01J5/602 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01J5/0871 ,  G01J5/522

Abstract: A method of and device for contactless measuring of temperature of an object independently of its emissivity in infrared and/or visible range, is based on finding, by means of Planck law of radiation a curve which is the sum of the radiance or radiant intensity of a radiator having temperature and emissivity of the object and the radiance or radiant intensity of a radiator having the temperature of environment, the latter radiation being reflected by the object with the reflectivity .rho.=1-.epsilon. where .epsilon. is the emissivity of the object. The actual temperature of the object is found from the curve which is most similar to the curve of at least two values of radiance or radiant intensity detected from the object, plotted against the wavelengths. The device for carrying out the method includes a spectrometer, a modulator rotating at constant speed and having at least two filtering segments for the radiation wavelengths, an analog/digital converter clocked by pulses derived from the modulator to produce at its output digital signals, a microprocessor for reiteratively processing the digital data according to the Planck law of radiation, and a display unit for reading out the computed emissivity, the temperature of the object and the temperature of the environment.

Abstract translation: 独立于红外和/或可见光范围内的物体的温度无接触式测量的方法和装置是基于通过辐射的普朗克定律找到的，该曲线是辐射度或辐射强度之和 散热器具有物体的温度和发射率以及具有环境温度的散热器的辐射强度或辐射强度，后者辐射被物体反射，反射率rho = 1-ε，其中ε是物体的发射率。 物体的实际温度是从与物体中检测到的至少两个辐射强度或辐射强度值的曲线最相似的曲线找到的，相对于波长绘制。 用于执行该方法的装置包括光谱仪，以恒定速度旋转并具有用于辐射波长的至少两个滤波段的调制器，由从调制器导出的脉冲计时的模拟/数字转换器，以在其输出的数字信号产生一个 用于根据辐射的普朗克定律重复地处理数字数据的微处理器，以及用于读出所计算的发射率，物体的温度和环境温度的显示单元。

公开(公告)号：US4465382A

公开(公告)日：1984-08-14

申请号：US239727

申请日：1981-03-02

Applicant: Tohru Iuchi ,  Kunitoshi Watanabe ,  Toshihiko Shibata ,  Tetsuro Kawamura

Inventor： Tohru Iuchi ,  Kunitoshi Watanabe ,  Toshihiko Shibata ,  Tetsuro Kawamura

IPC: G01J5/00 ,  G01J5/52 ,  G01J5/62 ,  G01J5/10 ,  G01K13/06

CPC classification number: G01J5/524 ,  G01J2005/0074 ,  G01J5/0044 ,  G01J5/62

Abstract: When a steel sheet or the like is heated in a furnace to a temperature somewhat higher than the room temperature and is still or moved, its temperature can be measured by detecting the radiant energy therefrom. The measurement is normally difficult due to the influence of background noise of radiant energy from the surroundings, change of the transmittance factor of the environment or atmosphere for radiant energy, and change of the emissivity of the object to be measured. In order to remove such causes of errors and to correctly measure the temperature by detecting radiant energy, a radiometer and a black body radiator are disposed symmetrically and specularly with respect to the normal to a surface of an object to be measured, and two different amounts of radiant energies are emitted from the black body radiator, and the emissivity of the object to be measured is determined from the detected values from the radiometer, the two temperature values of the black body radiator, and the diffusely reflecting factor associated with the object to be measured, whereby correct measurement of the surface temperature of the object to be measured can be done. Embodiments for implementing this method are proposed.

Abstract translation: 当钢板等在炉中加热到稍高于室温并仍然或移动的温度时，可以通过检测其温度来测量其温度。 由于来自周围的辐射能的背景噪声，辐射能的环境或大气的透过率因子的变化以及被测定物的发射率的变化，通常难以进行测量。 为了消除这种错误的原因并且通过检测辐射能来正确地测量温度，辐射计和黑体散热器相对于被测量物体的表面的法线对称且镜面地设置，并且两个不同的量 从黑体散热器发射辐射能，并且根据来自辐射计的检测值，黑体散热器的两个温度值和与该对象相关联的漫反射因数确定待测物体的发射率 可以进行测量对象物的表面温度的正确测量。 提出了实现该方法的实施例。

公开(公告)号：US20190234800A1

公开(公告)日：2019-08-01

申请号：US16380042

申请日：2019-04-10

Applicant: International Business Machines Corporation

Inventor： Ali Afzali-Ardakani ,  Abram L. Falk ,  Damon B. Farmer ,  Shu-Jen Han ,  George S. Tulevski

IPC: G01J5/00 ,  G01J5/20 ,  G01J5/02

CPC classification number: G01J5/0018 ,  G01J5/023 ,  G01J5/046 ,  G01J5/0862 ,  G01J5/20 ,  G01J5/602 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01J2005/0077

Abstract: A computer-implemented method of forming a thermal-based electronic image of an object that includes receiving electromagnetic radiation emitted by the object at an optically sensitive layer including a superpixel having a plurality of pixels. Each pixel of the plurality of pixels includes a plasmonic absorber having a characteristic resonance wavelength and that generates a radiance measurement of the electromagnetic radiation at its characteristic resonance wavelength. The method further provides for determining, at a processor, an emissivity and temperature for the electromagnetic radiation received at the superpixel using the radiance measurements obtained at the pixels of the superpixel. In addition, the method provides for forming an image of the object from the determined emissivity and temperature.

公开(公告)号：US20180253953A1

公开(公告)日：2018-09-06

申请号：US15912966

申请日：2018-03-06

Applicant: Tyco Safety Products Canada Ltd.

Inventor： Andrei Bucsa ,  Gregory W. Hill ,  Rob Vandervecht

IPC: G08B17/12 ,  F24C7/08 ,  F24C3/12 ,  H05B6/06

CPC classification number: G08B17/12 ,  F23D2208/10 ,  F23N5/242 ,  F24C3/12 ,  F24C7/08 ,  F24C15/2021 ,  G01J5/025 ,  G01J5/026 ,  G01J5/0275 ,  G01J5/089 ,  G01J5/0896 ,  G01J2005/0048 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01J2005/0077 ,  G01J2005/0081 ,  G08B21/12 ,  G08B21/14 ,  G08B25/10 ,  H05B1/0266 ,  H05B6/062 ,  H05B2213/07

Abstract: A Safety Cooking Device includes a thermal sensor that detects infrared radiation (IR) to generate thermal images of a cooktop over time, and a controller. The controller uses the thermal images to determine whether the cooktop is unattended. Both wired and wireless embodiments of the cooking safety device are disclosed. In one implementation, the cooking safety device is in communication with and reports to a security panel of a security system.

公开(公告)号：US09494466B2

公开(公告)日：2016-11-15

申请号：US14169651

申请日：2014-01-31

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Toshiyuki Uchii ,  Tadashi Mori

IPC: G01J5/00 ,  G01J5/60 ,  G01J5/08 ,  G01K11/12 ,  G01J5/06

CPC classification number: G01J5/0014 ,  G01J5/06 ,  G01J5/0821 ,  G01J5/0896 ,  G01J5/602 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01K11/12

Abstract: A temperature measurement device is provided with: light collection means; extraction means; optical intensity calculation means; and temperature measurement means. The light collection means collects the emission spectrum of a measurement subject. The extraction means extracts light having the wavelength of the atomic spectral lines and light having a wavelength in a wavelength region where there are no atomic spectral lines, from the emission spectrum collected by the aforementioned light collection means. The optical intensity calculation means calculates the optical intensities of the light extracted by the aforementioned extraction means. The temperature measurement means calculates the temperature of the aforementioned measurement subject, based on the intensities of the beams calculated by the aforementioned optical intensity calculation means.

Abstract translation: 温度测量装置具有：光收集装置; 提取手段; 光强计算手段; 和温度测量装置。 光采集装置收集测量对象的发射光谱。 提取装置从由上述光收集装置收集的发射光谱中提取具有原子光谱线的波长的光和具有不存在原子光谱线的波长区域中的波长的光。 光强度计算装置计算由上述提取装置提取的光的光强度。 温度测量装置基于由上述光强度计算装置计算的光束的强度来计算上述测量对象的温度。

公开(公告)号：US20140321497A1

公开(公告)日：2014-10-30

申请号：US14256539

申请日：2014-04-18

Applicant: JTEKT CORPORATION

Inventor： Naoki MATSUMOTO ,  Kouya YOSHIDA ,  Jun MATSUMOTO

IPC: G01N25/72 ,  G01K15/00

CPC classification number: G01N25/72 ,  B23K26/032 ,  B23K31/125 ,  G01J2005/0074 ,  G01K15/005 ,  G01N21/63 ,  G01N21/71 ,  G01R31/048 ,  G01R31/308 ,  H01L2224/48472 ,  H01L2224/73257 ,  H01L2224/859

Abstract: There are provided an optical non-destructive inspection apparatus and an optical non-destructive inspection method. The apparatus includes a focusing-collimating unit, a heating laser beam source, a heating laser beam guide unit, an infrared detector, an emitted-infrared guide unit, first and second correcting laser beam source, first and second correcting laser beam guide units, first and second correcting laser detectors, first and second reflected laser beam guide units, and a control unit. The control unit controls the heating laser beam source and the first and second correcting laser beam sources, measures a temperature rise characteristic that is a temperature rise state of a measurement spot based on a heating time, on the basis of a detection signal from the infrared detector and detection signals from the first and second correcting laser detectors, and determines a state of a measurement object based on the measured temperature rise characteristic.