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    Electron-Optical Corrector for an Aplanatic Imaging System
    12.
    发明申请
    Electron-Optical Corrector for an Aplanatic Imaging System 有权
    用于Aplanatic成像系统的电子光学校正器

    公开(公告)号：US20080265172A1

    公开(公告)日：2008-10-30

    申请号：US12091411

    申请日：2006-10-11

    Applicant: Stephan Uhlemann

    Inventor： Stephan Uhlemann

    IPC: H01J1/50

    CPC classification number: H01J37/153 ,  H01J2237/153

    Abstract: An electron-optical corrector for rendering superfluous both the third-order opening error and the anisotropic part of the extra-axial third-order coma, using round lenses and hexapole fields, the corrector includes at least three coaxially arranged hexapole fields with at least one round lens field is arranged between adjacent hexapole fields, so that the hexapole fields are imaged onto each other in pairs. The intensities of the hexapole fields are selected so that the image error coefficient of the three-fold astigmatism is equal to 0, and at least three hexapole fields in the Larmor reference system are rotated in relation to each other at an angle about the optical axis.

    Abstract translation: 一种电子光学校正器，其使用圆形透镜和六极场来渲染多余的三次打开误差和异轴三次彗差的各向异性部分，校正器包括至少三个同轴布置的六极场，其具有至少一个 圆形透镜场布置在相邻的六极场之间，使得六极场成对成对。 选择六极场的强度，使得三折像散的图像误差系数等于0，并且拉莫尔参考系中的至少三个六极场相对于彼此以围绕光轴的角度相互旋转 。

    Lens array with a laterally movable optical axis for corpuscular rays
    13.
    发明授权
    Lens array with a laterally movable optical axis for corpuscular rays 失效
    透镜阵列具有用于红外线的横向移动的光轴

    公开(公告)号：US06995378B2

    公开(公告)日：2006-02-07

    申请号：US10499165

    申请日：2002-11-26

    Applicant: Stephan Uhlemann ,  Maximilan Haider ,  Heiko Müller

    Inventor： Stephan Uhlemann ,  Maximilan Haider ,  Heiko Müller

    IPC: H01J37/145 ,  H01J37/153

    CPC classification number: H01J37/153 ,  H01J37/145 ,  H01J2237/3175

    Abstract: Disclosed is a lens array having a laterally movable axis for corpuscular rays, particularly for transmission from areas of an object surface onto the focal plane by means of electrons. The inventive array consists of a combined lens comprising a cylinder lens and a quadrupole lens provided with slit diaphragms which can be impinged upon by electric and/or magnetic fields. The optical axis of the quadrupole lens is oriented parallel to the axis of the cylinder lens and defines the optical axis of the projection, the position of which can be altered in relation to the axis of the cylinder lens. The quadrupole lens is in focus in the sector in which the cylinder lens is not in focus and is out of focus in the section in which the cylinder lens is in focus. The inventive combined lens can be operated as an immersion lens for projecting secondary electrons. The immersion field consists of at least two adjacent axially aligned fields. The first field lies between the object and the first slit diaphragm, and the second field lies between the first slit diaphragm and the second slit diaphragm. Both fields can be focused independently from each other. The potential difference between the object and the first diaphragm is comparatively small in relation to the potential difference between the first diaphragm and the second diaphragm, and the potential course between the object and the first diaphragm has to be approximately linear. The combined lens is brought into/out of focus by superposing the immersion field, the cylinder lens field, and the quadrupole field. Alternatively, the lens array can be used as a cathode lens for a photocathode with several homogenous adjacent emission areas.

    Abstract translation: 公开了一种透镜阵列，其具有用于粒子束的横向可移动轴，特别是用于通过电子从物体表面到焦平面上的区域的透射。 本发明的阵列由包括柱面透镜和四极透镜的组合透镜组成，该四极透镜设置有可被电场和/或磁场撞击的狭缝光阑。 四极透镜的光轴定向为平行于柱面透镜的轴线并且限定投影的光轴，其位置可以相对于柱面透镜的轴线改变。 四极透镜在柱面透镜未聚焦的区域中聚焦，并且在柱面透镜聚焦的部分中不对焦。 本发明的组合透镜可以用作投影二次电子的浸没透镜。 浸入场由至少两个相邻的轴向排列的场组成。 第一场位于物体和第一狭缝光阑之间，第二场位于第一狭缝光阑和第二狭缝光阑之间。 这两个领域可以彼此独立地集中。 物体与第一膜片之间的电位差相对于第一膜片和第二膜片之间的电位差相对较小，并且物体与第一膜片之间的电位过程必须近似线性。 组合透镜通过叠加浸没场，气缸透镜场和四极场进入/离开焦点。 或者，透镜阵列可以用作具有几个均匀的相邻发射区域的用于光电阴极的阴极透镜。

    Monochromator and radiation source with monochromator
    14.
    发明授权
    Monochromator and radiation source with monochromator 有权
    单色仪和辐射源

    公开(公告)号：US07745783B2

    公开(公告)日：2010-06-29

    申请号：US12153455

    申请日：2008-05-20

    Applicant: Stephan Uhlemann

    Inventor： Stephan Uhlemann

    IPC: G21K1/06 ,  G21K5/02

    CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/26 ,  H01J49/48 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/1538

    Abstract: A monochromator (1) for a charged particle optics, in particular, for electron microscopy, comprises at least one first deflection element (2, 3) with an electrostatic deflecting field (2′, 3′) for generating a dispersion (4) in the plane (5) of a selection aperture (6) to select charged particles of a desired energy interval (7) and at least one second deflection element (8, 9) with an electrostatic deflecting field (8′, 9′) which eliminates the dispersion (4) of the at least one first deflecting field (2′, 3′). A radiation source (17) comprises such a monochromator (1). High monchromatism without intensity contrasts caused by defects of the slit aperture is thereby achieved in that the deflection elements (2, 3, 8, 9) have a design other than spherically shaped and their electrodes (24, 25) are given a potential (φ+, φ−) such that the charged particles (xα, yβ) which virtually enter the image of the radiation source (17) at different respective angles (α, β) in different sections (x, y), are differently focused such that charged particles (xα, yβ) of one energy are point focused (10, 10′, 10″) exclusively in the plane (5) of the selection aperture (6), since zero-crossings (11, 12) of the deflections (A) of the charged particles (xα, yβ) of the different sections (x, y) only coincide there at the same axial position (z, E).

    Abstract translation: 用于带电粒子光学器件的单色仪（1），特别是用于电子显微镜的装置包括至少一个具有用于产生分散体（4）的静电偏转场（2'，3'）的第一偏转元件（2,3） 选择孔径（6）的平面（5）以选择具有期望能量间隔（7）的带电粒子和至少一个具有静电偏转场（8'，9'）的第二偏转元件（8,9） 所述至少一个第一偏转场（2'，3'）的色散（4）。 辐射源（17）包括这样的单色仪（1）。 因此，由于偏转元件（2,3,8,9）具有除球形之外的设计，并且它们的电极（24,25）被赋予电位（＆phgr），因此实现了由狭缝孔径的缺陷引起的没有强度对比度的高单色差 ; +，＆phgr; - ），使得实际上在不同部分（x，y）中以不同的各个角度（α，＆bgr））进入辐射源（17）的图像的带电粒子（xα，y和bgr） 不同的聚焦使得一个能量的带电粒子（xα，y和bgr）专门在选择孔径（6）的平面（5）中点聚焦（10,10'，10“），因为过零点（11,12 不同部分（x，y）的带电粒子（xα，y＆bgr）的偏转（A）的位移仅在相同的轴向位置（z，E）处重合。

    ELECTRON-OPTICAL CORRECTOR FOR APLANATIC IMAGING SYSTEMS
    16.
    发明申请
    ELECTRON-OPTICAL CORRECTOR FOR APLANATIC IMAGING SYSTEMS 有权
    用于APLANICAL IMAGING SYSTEMS的电子光学校正器

    公开(公告)号：US20090134339A1

    公开(公告)日：2009-05-28

    申请号：US12297306

    申请日：2007-03-31

    Applicant: Stephan Uhlemann ,  Harald Rose ,  Heiko Muller

    Inventor： Stephan Uhlemann ,  Harald Rose ,  Heiko Muller

    IPC: H01J3/14

    CPC classification number: H01J37/153 ,  H01J2237/1534

    Abstract: A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.

    Abstract translation: 一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间 并调整为使六边形中心六极场成像。 在六极场之间，以中间平面为准，中间平面彼此共轭。 三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场 六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。 六极场对的取向相对于由六极场限定的取向旋转足够的角度，以便校正异轴三阶彗差。

    Lens array with a laterally movable optical axis for corpuscular rays
    19.
    发明申请
    Lens array with a laterally movable optical axis for corpuscular rays 失效
    透镜阵列具有用于红外线的横向移动的光轴

    公开(公告)号：US20050035299A1

    公开(公告)日：2005-02-17

    申请号：US10499165

    申请日：2002-11-26

    Applicant: Stephan Uhlemann ,  Maximilan Haider ,  Heiko Muller

    Inventor： Stephan Uhlemann ,  Maximilan Haider ,  Heiko Muller

    IPC: G03F7/20 ,  H01J37/065 ,  H01J37/073 ,  H01J37/12 ,  H01J37/145 ,  H01J37/153 ,  H01L21/027 ,  G21K1/08

    CPC classification number: H01J37/153 ,  H01J37/145 ,  H01J2237/3175

    Abstract: Disclosed is a lens array having a laterally movable axis for corpuscular rays, particularly for transmission from areas of an object surface onto the focal plane by means of electrons. The inventive array consists of a combined lens comprising a cylinder lens and a quadrupole lens provided with slit diaphragms which can be impinged upon by electric and/or magnetic fields. The optical axis of the quadrupole lens is oriented parallel to the axis of the cylinder lens and defines the optical axis of the projection, the position of which can be altered in relation to the axis of the cylinder lens. The quadrupole lens is in focus in the sector in which the cylinder lens is not in focus and is out of focus in the section in which the cylinder lens is in focus. The inventive combined lens can be operated as an immersion lens for projecting secondary electrons. The immersion field consists of at least two adjacent axially aligned fields. The first field lies between the object and the first slit diaphragm, and the second field lies between the first slit diaphragm and the second slit diaphragm. Both fields can be focused independently from each other. The potential difference between the object and the first diaphragm is comparatively small in relation to the potential difference between the first diaphragm and the second diaphragm, and the potential course between the object and the first diaphragm has to be approximately linear. The combined lens is brought into/out of focus by superposing the immersion field, the cylinder lens field, and the quadrupole field. Alternatively, the lens array can be used as a cathode lens for a photocathode with several homogenous adjacent emission areas.

    Abstract translation: 公开了一种透镜阵列，其具有用于粒子束的横向可移动轴，特别是用于通过电子从物体表面到焦平面上的区域的透射。 本发明的阵列由包括柱面透镜和四极透镜的组合透镜组成，该四极透镜设置有可被电场和/或磁场撞击的狭缝光阑。 四极透镜的光轴定向为平行于柱面透镜的轴线并且限定投影的光轴，其位置可以相对于柱面透镜的轴线改变。 四极透镜在柱面透镜未聚焦的区域中聚焦，并且在柱面透镜聚焦的部分中不对焦。 本发明的组合透镜可以用作投影二次电子的浸没透镜。 浸入场由至少两个相邻的轴向排列的场组成。 第一场位于物体和第一狭缝光阑之间，第二场位于第一狭缝光阑和第二狭缝光阑之间。 这两个领域可以彼此独立地集中。 物体与第一膜片之间的电位差相对于第一膜片和第二膜片之间的电位差相对较小，并且物体与第一膜片之间的电位过程必须近似线性。 组合透镜通过叠加浸没场，气缸透镜场和四极场进入/离开焦点。 或者，透镜阵列可以用作具有几个均匀的相邻发射区域的用于光电阴极的阴极透镜。

    Electrostatic corrector
    20.
    发明授权
    Electrostatic corrector 有权
    静电校正器

    公开(公告)号：US06836372B2

    公开(公告)日：2004-12-28

    申请号：US10466744

    申请日：2003-07-18

    Applicant: Harald Rose ,  Stephan Uhlemann ,  Christoph Weissbäcker

    Inventor： Harald Rose ,  Stephan Uhlemann ,  Christoph Weissbäcker

    IPC: G02B1100

    CPC classification number: H01J37/153

    Abstract: An electrostatic corrector with a rectilinear optical axis has two corrective parts, which are arranged one behind the other along the optical axis and which have respective quadrupole fields and superimposed circular lens fields. The astigmatic intermediate image of one cross-section that is created by an axis point lies in one corrective part and the astigmatic intermediate image of the other cross-section, which is perpendicular to the first cross-section, lies in the other corrective part. An object of the invention is to eliminate the chromatic aberration of particle lenses. To achieve this, an electrostatic corrector is used, which includes two corrector units having similar instrumental construction, with each of the two corrector units having input and output sides on which two additional electrostatic quadrupoles are located. The two corrector units represent the axial paths in a telescopic manner in a 1:1 representation. The two corrector units are arranged one behind the other along the optical axia and are rotated by 90° about the optical axis relative to one another.

    Abstract translation: 具有直线光轴的静电校正器具有两个校正部件，它们沿着光轴一个接一个布置，并且具有相应的四极场和叠加的圆形透镜场。 由轴点产生的一个横截面的像散中间图像位于一个校正部分中，并且垂直于第一横截面的另一横截面的像散中间图像位于另一校正部分中。 本发明的目的是消除粒子透镜的色差。 为了实现这一点，使用静电校正器，其包括具有相似器件结构的两个校正器单元，两个校正器单元中的每一个具有输入和输出侧，两个额外的静电四极杆位于其上。 两个校正单元以1：1表示法以伸缩方式表示轴向路径。 两个校正单元沿着光学轴线一个接一个地布置，并且相对于彼此围绕光轴旋转90°。

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