公开(公告)号：US20140131311A1

公开(公告)日：2014-05-15

申请号：US13906138

申请日：2013-05-30

Applicant: Samsung Display Co., Ltd

Inventor： Sung-Joong Joo ,  You-Min Cha

IPC: H01J37/32

CPC classification number: H01J37/32366 ,  H01J37/3244

Abstract: A thin film forming apparatus and a thin film forming method using the same are disclosed. In one aspect, the thin film forming apparatus comprises a mask that includes a blocking portion and an opening. It also includes an etching source that jets an etching gas through the opening of the mask to etch a thin film according to a pattern. The mask includes a gas blower for blowing a gas around the opening so that the etching gas does not penetrate into a thin film area corresponding to the block portion. When the thin film forming apparatus is used, a normal residual area of a thin film may be safely preserved and patterning may be accurately performed. Thus, the quality of a product manufactured by using the thin film forming apparatus may be improved.

Abstract translation: 公开了一种薄膜形成装置和使用该薄膜形成装置的薄膜形成方法。 在一个方面，薄膜形成装置包括一个包括阻挡部分和开口的掩模。 它还包括蚀刻源，其通过掩模的开口喷射蚀刻气体，以根据图案蚀刻薄膜。 掩模包括用于在开口周围吹送气体的气体鼓风机，使得蚀刻气体不会渗透到对应于块部分的薄膜区域中。 当使用薄膜形成装置时，可以安全地保留薄膜的正常残留区域，并且可以精确地进行图案化。 因此，可以提高通过使用薄膜形成装置制造的产品的质量。

公开(公告)号：US20150179710A1

公开(公告)日：2015-06-25

申请号：US14295245

申请日：2014-06-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Min-Hwan Choi ,  Chi-Woo Kim ,  Gun-Shik Kim ,  Ok-Keun Song ,  Kee-Han Uh ,  Seong-Ho Jeong ,  You-Min Cha ,  Jae-Beom Choi ,  Young-Mo Koo ,  Keum-Nam Kim ,  Dae-Sung Choi

IPC: H01L27/32 ,  H01L51/56

CPC classification number: H01L27/3211 ,  C23C14/042 ,  C23C14/56 ,  H01L27/326 ,  H01L51/0011 ,  H01L51/56

Abstract: A method of manufacturing an organic light emitting display apparatus by utilizing a deposition apparatus for forming an organic layer on a substrate includes: fixing the substrate to a mask assembly for forming a common layer or a mask assembly for forming a pattern layer in a loading unit; when the one or more deposition assemblies are separated from the substrate, forming an intermediate layer by depositing a deposition material discharged from the one or more deposition assemblies in a deposition unit of the deposition apparatus onto the substrate while the substrate is moved relative to the one or more deposition assemblies by a first conveyer unit; and separating the substrate on which the deposition is finished from the mask assembly for forming the common layer or the mask assembly for forming the pattern layer in an unloading unit.

Abstract translation: 通过利用在基板上形成有机层的沉积装置制造有机发光显示装置的方法包括：将基板固定到用于形成公共层的掩模组件或用于在装载单元中形成图案层的掩模组件 ; 当一个或多个沉积组件与衬底分离时，通过将沉积装置的沉积单元中的一个或多个沉积组件排出的沉积材料沉积到衬底上而形成中间层，同时衬底相对于衬底移动 或更多的沉积组件通过第一输送单元; 以及将用于形成公共层的掩模组件的掩模组件上的沉积完成的衬底或用于在卸载单元中形成图案层的掩模组件分离。

公开(公告)号：US08974858B2

公开(公告)日：2015-03-10

申请号：US13944479

申请日：2013-07-17

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Wan Park ,  You-Min Cha ,  Won-Seok Cho ,  Jae-Mork Park ,  Jae-Hong Ahn ,  Min-Jeong Hwang ,  Tae-Wook Kim ,  Jong-Woo Lee ,  Tae-Seung Kim

IPC: C23C16/00 ,  C23C14/12 ,  B05D1/02 ,  B05D1/00 ,  B05D3/04 ,  C23C14/24 ,  C23C14/56 ,  C23C16/52 ,  H01L51/00 ,  H01L51/56

CPC classification number: C23C14/12 ,  B05D1/02 ,  B05D1/60 ,  B05D3/0493 ,  C23C14/243 ,  C23C14/56 ,  H01L51/0008 ,  H01L51/56

Abstract: An apparatus for depositing an organic material and a depositing method thereof, wherein a deposition process is performed with respect to a second substrate while transfer and alignment processes are performed with respect to a first substrate in a chamber, so that loss of an organic material wasted in the transfer and alignment processes can be reduced, thereby maximizing material efficiency and minimizing a processing tack time. The apparatus includes a chamber having an interior divided into a first substrate deposition area and a second substrate deposition area, an organic material deposition source transferred to within ones of the first and second substrate deposition areas to spray particles of an organic material onto respective ones of first and second substrates and a first transferring unit to rotate the organic material deposition source in a first direction from one of the first and second substrate deposition areas to an other of the first and second substrate deposition areas.

Abstract translation: 一种用于沉积有机材料的设备及其沉积方法，其中相对于第二衬底执行沉积工艺，同时相对于腔室中的第一衬底进行转移和取向处理，从而浪费有机材料的损失 可以减少转移和对准过程，从而最大化材料效率并最小化处理粘着时间。 该装置包括具有分为第一衬底沉积区域和第二衬底沉积区域的内部的腔室，被转移到第一和第二衬底沉积区域内的有机材料沉积源，以将有机材料的颗粒喷射到 第一和第二基板和第一转印单元，用于使有机材料沉积源沿第一方向从第一和第二基板沉积区域之一旋转到第一和第二基板沉积区域中的另一个。

公开(公告)号：US20150014661A1

公开(公告)日：2015-01-15

申请号：US14325099

申请日：2014-07-07

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Joong JOO ,  You-Min Cha

IPC: H01L27/32 ,  H01L51/52 ,  H01L51/56

CPC classification number: H01L27/3211 ,  H01L27/3209 ,  H01L27/3258 ,  H01L51/0005 ,  H01L51/5036 ,  H01L51/5256 ,  H01L51/5265 ,  H01L2251/558

Abstract: A organic light emitting display device including a first substrate on which red, green, and blue pixels are formed, the red, green, and blue pixels display including a plurality of first electrodes disposed corresponding to the red, green, and blue pixels, respectively, a plurality of organic light emitting structures emitting white light disposed above the first electrodes, respectively, a plurality of second electrodes respectively disposed on the organic light emitting structures, and a plurality of secondary transparent electrodes disposed between the first electrodes and the organic light emitting structures. The secondary transparent electrodes have different thicknesses from each other by a printing process such that red light, green light, and blue light are respectively emitted by the red, green, and blue pixels when the white light causes resonance to occur between the first electrodes and the second electrodes.

Abstract translation: 一种有机发光显示装置，包括形成有红色，绿色和蓝色像素的第一基板，红色，绿色和蓝色像素显示分别包括对应于红色，绿色和蓝色像素设置的多个第一电极 分别设置在所述有机发光结构上的多个第二电极以及设置在所述第一电极与所述有机发光的多个第二透明电极之间的多个有机发光结构， 结构。 第二透明电极通过印刷处理彼此具有不同的厚度，使得当白光在第一电极和第一电极之间发生共振时，红色，绿色和蓝色像素分别发出红色，绿色和蓝色像素 第二电极。

公开(公告)号：US20140345524A1

公开(公告)日：2014-11-27

申请号：US14107503

申请日：2013-12-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung-Joong JOO ,  You-Min Cha

IPC: B05C11/10

CPC classification number: B41J2/2142 ,  B05C11/101 ,  H01L51/0005

Abstract: A monitoring apparatus is provided to monitor an amount of a liquid discharged from a nozzle. The monitoring apparatus includes a discharge case. The discharge case is configured to receive liquid discharged from a nozzle. The discharge case includes a storage space for storing the liquid. A photographing unit photographs the level of the liquid stored in the storage space.

Abstract translation: 提供监视装置来监视从喷嘴排出的液体的量。 监视装置包括排出箱。 排放箱配置为接收从喷嘴排出的液体。 排出箱包括用于储存液体的储存空间。 摄影单元拍摄存储在存储空间中的液体的水平。

公开(公告)号：US08632854B2

公开(公告)日：2014-01-21

申请号：US13942514

申请日：2013-07-15

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Mork Park ,  You-Min Cha ,  Won-Seok Cho ,  Jae-Hong Ahn ,  Min-Jeong Hwang

IPC: C23C16/458 ,  H01L21/306 ,  C23F1/00 ,  B05D1/32 ,  B05D5/00 ,  C23C16/06 ,  C23C16/22

CPC classification number: H01L21/682 ,  C23C14/042 ,  H01L51/001 ,  H01L51/56

Abstract: A substrate centering device for an organic material deposition system comprises: a plurality of substrate support holders configured to be reciprocally movable in a facing direction within an organic material deposition chamber and supporting both side portions of a substrate loaded by a robot; a substrate centering unit configured to be reciprocally movable at each of the substrate support holders and centering the substrate by guiding both side portions of the substrate; and a plurality of substrate clampers configured to be reciprocally movable in a vertical direction at each of the substrate support holders, and clamping the substrate that has been centered by the substrate centering unit.

Abstract translation: 一种用于有机材料沉积系统的基板定心装置，包括：多个基板支撑保持器，其构造成可在有机材料沉积室内面向相反方向往复运动，并支撑由机器人装载的基板的两侧部分; 基板定心单元，其构造成在每个基板支撑保持器处可往复运动，并且通过引导基板的两个侧部对准基板; 以及多个基板夹持器，其构造成在每个基板支撑保持器处在垂直方向上往复运动，并且夹持由基板定心单元居中的基板。