公开(公告)号：US08974858B2

公开(公告)日：2015-03-10

申请号：US13944479

申请日：2013-07-17

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Wan Park ,  You-Min Cha ,  Won-Seok Cho ,  Jae-Mork Park ,  Jae-Hong Ahn ,  Min-Jeong Hwang ,  Tae-Wook Kim ,  Jong-Woo Lee ,  Tae-Seung Kim

IPC: C23C16/00 ,  C23C14/12 ,  B05D1/02 ,  B05D1/00 ,  B05D3/04 ,  C23C14/24 ,  C23C14/56 ,  C23C16/52 ,  H01L51/00 ,  H01L51/56

CPC classification number: C23C14/12 ,  B05D1/02 ,  B05D1/60 ,  B05D3/0493 ,  C23C14/243 ,  C23C14/56 ,  H01L51/0008 ,  H01L51/56

Abstract: An apparatus for depositing an organic material and a depositing method thereof, wherein a deposition process is performed with respect to a second substrate while transfer and alignment processes are performed with respect to a first substrate in a chamber, so that loss of an organic material wasted in the transfer and alignment processes can be reduced, thereby maximizing material efficiency and minimizing a processing tack time. The apparatus includes a chamber having an interior divided into a first substrate deposition area and a second substrate deposition area, an organic material deposition source transferred to within ones of the first and second substrate deposition areas to spray particles of an organic material onto respective ones of first and second substrates and a first transferring unit to rotate the organic material deposition source in a first direction from one of the first and second substrate deposition areas to an other of the first and second substrate deposition areas.

Abstract translation: 一种用于沉积有机材料的设备及其沉积方法，其中相对于第二衬底执行沉积工艺，同时相对于腔室中的第一衬底进行转移和取向处理，从而浪费有机材料的损失 可以减少转移和对准过程，从而最大化材料效率并最小化处理粘着时间。 该装置包括具有分为第一衬底沉积区域和第二衬底沉积区域的内部的腔室，被转移到第一和第二衬底沉积区域内的有机材料沉积源，以将有机材料的颗粒喷射到 第一和第二基板和第一转印单元，用于使有机材料沉积源沿第一方向从第一和第二基板沉积区域之一旋转到第一和第二基板沉积区域中的另一个。

公开(公告)号：US08632854B2

公开(公告)日：2014-01-21

申请号：US13942514

申请日：2013-07-15

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Mork Park ,  You-Min Cha ,  Won-Seok Cho ,  Jae-Hong Ahn ,  Min-Jeong Hwang

IPC: C23C16/458 ,  H01L21/306 ,  C23F1/00 ,  B05D1/32 ,  B05D5/00 ,  C23C16/06 ,  C23C16/22

CPC classification number: H01L21/682 ,  C23C14/042 ,  H01L51/001 ,  H01L51/56

Abstract: A substrate centering device for an organic material deposition system comprises: a plurality of substrate support holders configured to be reciprocally movable in a facing direction within an organic material deposition chamber and supporting both side portions of a substrate loaded by a robot; a substrate centering unit configured to be reciprocally movable at each of the substrate support holders and centering the substrate by guiding both side portions of the substrate; and a plurality of substrate clampers configured to be reciprocally movable in a vertical direction at each of the substrate support holders, and clamping the substrate that has been centered by the substrate centering unit.

Abstract translation: 一种用于有机材料沉积系统的基板定心装置，包括：多个基板支撑保持器，其构造成可在有机材料沉积室内面向相反方向往复运动，并支撑由机器人装载的基板的两侧部分; 基板定心单元，其构造成在每个基板支撑保持器处可往复运动，并且通过引导基板的两个侧部对准基板; 以及多个基板夹持器，其构造成在每个基板支撑保持器处在垂直方向上往复运动，并且夹持由基板定心单元居中的基板。