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1.发明授权公开(公告)号：US09034141B2
公开(公告)日：2015-05-19
申请号：US13906138
申请日：2013-05-30
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Joong Joo , You-Min Cha
IPC: H01J37/32
CPC classification number: H01J37/32366 , H01J37/3244
Abstract: A thin film forming apparatus and a thin film forming method using the same are disclosed. In one aspect, the thin film forming apparatus comprises a mask that includes a blocking portion and an opening. It also includes an etching source that jets an etching gas through the opening of the mask to etch a thin film according to a pattern. The mask includes a gas blower for blowing a gas around the opening so that the etching gas does not penetrate into a thin film area corresponding to the block portion. When the thin film forming apparatus is used, a normal residual area of a thin film may be safely preserved and patterning may be accurately performed. Thus, the quality of a product manufactured by using the thin film forming apparatus may be improved.
Abstract translation: 公开了一种薄膜形成装置和使用该薄膜形成装置的薄膜形成方法。 在一个方面，薄膜形成装置包括一个包括阻挡部分和开口的掩模。 它还包括蚀刻源，其通过掩模的开口喷射蚀刻气体，以根据图案蚀刻薄膜。 掩模包括用于在开口周围吹送气体的气体鼓风机，使得蚀刻气体不会渗透到对应于块部分的薄膜区域中。 当使用薄膜形成装置时，可以安全地保留薄膜的正常残留区域，并且可以精确地进行图案化。 因此，可以提高通过使用薄膜形成装置制造的产品的质量。
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公开(公告)号：US20140319475A1
公开(公告)日：2014-10-30
申请号：US14035058
申请日：2013-09-24
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Joong Joo , You-Min Cha
IPC: H01L27/32
CPC classification number: H01L27/3246 , H01L51/5281
Abstract: An organic light emitting diode display is disclosed. In one aspect, the display includes a pixel electrode formed on a substrate and a pixel defining layer on the pixel electrode, the pixel defining layer having an opening exposing a part of the pixel electrode, and a stepped side wall of the opening. The display also includes an organic emission layer on the pixel electrode in the opening of the pixel defining layer and a common electrode covering the organic emission layer and the pixel defining layer. The pixel defining layer has a stepped side wall of the opening.
Abstract translation: 公开了一种有机发光二极管显示器。 一方面，显示器包括形成在基板上的像素电极和像素电极上的像素限定层，像素限定层具有露出像素电极的一部分的开口以及开口的阶梯状侧壁。 显示器还包括在像素限定层的开口中的像素电极上的有机发射层和覆盖有机发射层和像素限定层的公共电极。 像素限定层具有开口的阶梯状的侧壁。
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公开(公告)号：US10081863B2
公开(公告)日：2018-09-25
申请号：US14224006
申请日：2014-03-24
Applicant: Samsung Display Co., Ltd.
Inventor： Kyung-Hoon Chung , You-Min Cha
IPC: C23C14/04 , C23C16/04 , C23C14/50 , C23C16/458
CPC classification number: C23C16/042 , C23C14/04 , C23C14/042 , C23C14/50 , C23C16/04 , C23C16/4583
Abstract: A thin-film depositing apparatus including a mask, and a chucking unit for adhering the mask to a surface of a substrate, wherein the chucking unit includes a plurality of magnet units that contact another surface of the substrate by independently rising or falling by using their weight and thus are magnetically combined with the mask.
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4.发明授权Deposition apparatus and method of manufacturing organic light emitting diode display 有权沉积装置和制造有机发光二极管显示器的方法公开(公告)号：US09267202B2
公开(公告)日：2016-02-23
申请号：US14074629
申请日：2013-11-07
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Joong Joo , You-Min Cha , Seuk-Hwan Park
CPC classification number: C23C14/568 , C23C14/50 , H01L51/0011 , H01L51/56
Abstract: A deposition apparatus includes a deposition chamber, a plurality of substrate holders comprising a first holder configured to maintain a substrate at a first substrate position in the deposition chamber and a second holder configured to maintain another substrate at a second substrate position in the deposition chamber, a deposition source disposed in the deposition chamber and configured to supply a deposition material to apply onto substrates placed at the first and second substrate positions, and a deposition source transfer mechanism configured to move the deposition source to be opposite to one of the first and second substrates in a first direction, a substrate transfer mechanism configured to transfer a substrate in a second direction to or from the first substrate position and further configured to transfer another substrate in the second direction to or from the second substrate position.
Abstract translation: 沉积设备包括沉积室，多个衬底保持器，其包括构造成将衬底保持在沉积室中的第一衬底位置处的第一保持器和构造成将另一衬底保持在沉积室中的第二衬底位置处的第二保持器， 沉积源，设置在所述沉积室中并且被配置为提供沉积材料以施加到放置在所述第一和第二基板位置的基板上;沉积源传输机构，被配置为使所述沉积源移动以与所述第一和第二基板位置之一相反 衬底传送机构，其被配置为将衬底沿第二方向传送到第一衬底位置或从第一衬底位置移动，并且还被配置为将第二方向上的另一个衬底转移到第二衬底位置或从第二衬底位置传送另一个衬底。
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公开(公告)号：US20150114293A1
公开(公告)日：2015-04-30
申请号：US14224006
申请日：2014-03-24
Applicant: Samsung Display Co., Ltd.
Inventor： Kyung-Hoon Chung , You-Min Cha
IPC: C23C16/04 , C23C16/458
CPC classification number: C23C16/042 , C23C14/04 , C23C14/042 , C23C14/50 , C23C16/04 , C23C16/4583
Abstract: A thin-film depositing apparatus including a mask, and a chucking unit for adhering the mask to a surface of a substrate, wherein the chucking unit includes a plurality of magnet units that contact another surface of the substrate by independently rising or falling by using their weight and thus are magnetically combined with the mask.
Abstract translation: 一种包括掩模的薄膜沉积设备和用于将掩模粘附到基板的表面的夹持单元，其中夹持单元包括多个磁体单元，其通过使用它们独立地上升或下降而接触基板的另一个表面 因此与掩模磁组合。
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Patent Agency Ranking
公开(公告)号：US20170312773A1
公开(公告)日：2017-11-02
申请号：US15651425
申请日：2017-07-17
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Joong JOO , You-Min Cha , Seuk-Hwan Park
CPC classification number: B05B12/00 , C23C14/04 , C23C14/545
Abstract: A deposition apparatus uniformly controlling deposited quantities of a plurality of depositing sources by efficiently determining an abnormal depositing source. The deposition apparatus may reduce loss of materials by exactly determining an abnormal depositing source. The deposition apparatus includes: a plurality of depositing sources spraying a deposition material; a substrate holder fixing a substrate to face the depositing source; a depositing source shutter disposed at one side of the depositing source and opening and closing an passage of each depositing source; and a main shutter disposed between the depositing source and the substrate fixed to the substrate holder and depositing a part of the deposition material on the substrate through the main shutter.
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公开(公告)号：US09496317B2
公开(公告)日：2016-11-15
申请号：US14295245
申请日：2014-06-03
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Min-Hwan Choi , Chi-Woo Kim , Gun-Shik Kim , Ok-Keun Song , Kee-Han Uh , Seong-Ho Jeong , You-Min Cha , Jae-Beom Choi , Young-Mo Koo , Keum-Nam Kim , Dae-Sung Choi
CPC classification number: H01L27/3211 , C23C14/042 , C23C14/56 , H01L27/326 , H01L51/0011 , H01L51/56
Abstract: A method of manufacturing an organic light emitting display apparatus by utilizing a deposition apparatus for forming an organic layer on a substrate includes: fixing the substrate to a mask assembly for forming a common layer or a mask assembly for forming a pattern layer in a loading unit; when the one or more deposition assemblies are separated from the substrate, forming an intermediate layer by depositing a deposition material discharged from the one or more deposition assemblies in a deposition unit of the deposition apparatus onto the substrate while the substrate is moved relative to the one or more deposition assemblies by a first conveyer unit; and separating the substrate on which the deposition is finished from the mask assembly for forming the common layer or the mask assembly for forming the pattern layer in an unloading unit.
Abstract translation: 通过利用在基板上形成有机层的沉积装置制造有机发光显示装置的方法包括：将基板固定到用于形成公共层的掩模组件或用于在装载单元中形成图案层的掩模组件 ; 当一个或多个沉积组件与衬底分离时，通过将沉积装置的沉积单元中的一个或多个沉积组件排出的沉积材料沉积到衬底上而形成中间层，同时衬底相对于衬底移动 或更多的沉积组件通过第一输送单元; 以及将用于形成公共层的掩模组件的掩模组件上的沉积完成的衬底或用于在卸载单元中形成图案层的掩模组件分离。
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公开(公告)号：US10596582B2
公开(公告)日：2020-03-24
申请号：US15651425
申请日：2017-07-17
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Joong Joo , You-Min Cha , Seuk-Hwan Park
Abstract: A deposition apparatus uniformly controlling deposited quantities of a plurality of depositing sources by efficiently determining an abnormal depositing source. The deposition apparatus may reduce loss of materials by exactly determining an abnormal depositing source. The deposition apparatus includes: a plurality of depositing sources spraying a deposition material; a substrate holder fixing a substrate to face the depositing source; a depositing source shutter disposed at one side of the depositing source and opening and closing an passage of each depositing source; and a main shutter disposed between the depositing source and the substrate fixed to the substrate holder and depositing a part of the deposition material on the substrate through the main shutter.
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公开(公告)号：US09751328B2
公开(公告)日：2017-09-05
申请号：US14107503
申请日：2013-12-16
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Sung-Joong Joo , You-Min Cha
CPC classification number: B41J2/2142 , B05C11/101 , H01L51/0005
Abstract: A monitoring apparatus is provided to monitor an amount of a liquid discharged from a nozzle. The monitoring apparatus includes a discharge case. The discharge case is configured to receive liquid discharged from a nozzle. The discharge case includes a storage space for storing the liquid. A photographing unit photographs the level of the liquid stored in the storage space.
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公开(公告)号：US09724715B2
公开(公告)日：2017-08-08
申请号：US13953982
申请日：2013-07-30
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Joong Joo , You-Min Cha , Seuk-Hwan Park
CPC classification number: B05B12/00 , C23C14/04 , C23C14/545
Abstract: A deposition apparatus may uniformly control deposited quantities of a plurality of depositing sources by efficiently determining an abnormal depositing source. The deposition apparatus may reduce loss of materials by exactly determining an abnormal depositing source. The deposition apparatus includes: a plurality of depositing sources spraying a deposition material; a substrate holder fixing a substrate to face the depositing source; a depositing source shutter disposed at one side of the depositing source and opening and closing an passage of each depositing source; and a main shutter disposed between the depositing source and the substrate fixed to the substrate holder and depositing a part of the deposition material on the substrate through the main shutter.
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