MAGNETIC FIELD ENHANCING BACKING PLATE FOR MRAM WAFER TESTING
    11.
    发明申请
    MAGNETIC FIELD ENHANCING BACKING PLATE FOR MRAM WAFER TESTING 审中-公开
    用于MRAM波形测试的磁场增强背板

    公开(公告)号:US20170059669A1

    公开(公告)日:2017-03-02

    申请号:US14836860

    申请日:2015-08-26

    Abstract: A method and apparatus for testing a magnetic memory device is provided. The method begins when a magnetic field enhancing backing plate is installed in the test fixture. The magnetic field enhancing backing plate may be installed in the wafer chuck of a wafer testing probe station. The magnetic memory device is installed in the test fixture and a magnetic field is applied to the magnetic memory device. The magnetic field may be applied in-plane or perpendicular to the magnetic memory device. The performance of the magnetic memory device may be determined based on the magnetic field applied to the device. The apparatus includes a magnetic field enhancing backing plate adapted to fit a test fixture, possibly in the wafer chuck. The magnetic field enhancing backing plate is fabricated of high permeability magnetic materials, such as low carbon steel, with a thickness based on the magnetic field used in testing.

    Abstract translation: 提供一种用于测试磁存储器件的方法和装置。 当将磁场增强背板安装在测试夹具中时,该方法开始。 磁场增强背板可以安装在晶片测试探针台的晶片卡盘中。 磁存储器件安装在测试夹具中,磁场被施加到磁存储器件。 磁场可以面向或垂直于磁存储器件施加。 磁存储器件的性能可以基于施加到器件的磁场来确定。 该装置包括适于装配测试夹具(可能在晶片卡盘中)的磁场增强背板。 磁场增强背板由高磁导率磁性材料(如低碳钢)制成,厚度基于测试中使用的磁场。

    Synthetic antiferromagnet (SAF) coupled free layer for perpendicular magnetic tunnel junction (P-MTJ)
    13.
    发明授权
    Synthetic antiferromagnet (SAF) coupled free layer for perpendicular magnetic tunnel junction (P-MTJ) 有权
    用于垂直磁隧道结的合成反铁磁体(SAF)耦合自由层(P-MTJ)

    公开(公告)号:US09548446B2

    公开(公告)日:2017-01-17

    申请号:US15133018

    申请日:2016-04-19

    CPC classification number: H01L43/10 G11C11/161 H01L43/02 H01L43/08 H01L43/12

    Abstract: A magnetic tunnel junction (MTJ) device in a magnetoresistive random access memory (MRAM) and method of making the same are provided to achieve a high tunneling magnetoresistance (TMR), a high perpendicular magnetic anisotropy (PMA), good data retention, and a high level of thermal stability. The MTJ device includes a first free ferromagnetic layer, a synthetic antiferromagnetic (SAF) coupling layer, and a second free ferromagnetic layer, where the first and second free ferromagnetic layers have opposite magnetic moments.

    Abstract translation: 提供磁阻随机存取存储器(MRAM)中的磁隧道结(MTJ)器件及其制造方法,以实现高隧道磁阻(TMR),高垂直磁各向异性(PMA),良好的数据保留和 高水平的热稳定性。 MTJ装置包括第一自由铁磁层,合成反铁磁(SAF)耦合层和第二自由铁磁层,其中第一和第二自由铁磁层具有相反的磁矩。

    Synthetic antiferromagnet (SAF) coupled free layer for perpendicular magnetic tunnel junction (p-MTJ)
    14.
    发明授权
    Synthetic antiferromagnet (SAF) coupled free layer for perpendicular magnetic tunnel junction (p-MTJ) 有权
    用于垂直磁隧道结的合成反铁磁体(SAF)耦合自由层(p-MTJ)

    公开(公告)号:US09324939B2

    公开(公告)日:2016-04-26

    申请号:US14321516

    申请日:2014-07-01

    CPC classification number: H01L43/10 G11C11/161 H01L43/02 H01L43/08 H01L43/12

    Abstract: A magnetic tunnel junction (MTJ) device in a magnetoresistive random access memory (MRAM) and method of making the same are provided to achieve a high tunneling magnetoresistance (TMR), a high perpendicular magnetic anisotropy (PMA), good data retention, and a high level of thermal stability. The MTJ device includes a first free ferromagnetic layer, a synthetic antiferromagnetic (SAF) coupling layer, and a second free ferromagnetic layer, where the first and second free ferromagnetic layers have opposite magnetic moments.

    Abstract translation: 提供磁阻随机存取存储器(MRAM)中的磁隧道结(MTJ)器件及其制造方法,以实现高隧道磁阻(TMR),高垂直磁各向异性(PMA),良好的数据保留和 高水平的热稳定性。 MTJ装置包括第一自由铁磁层,合成反铁磁(SAF)耦合层和第二自由铁磁层,其中第一和第二自由铁磁层具有相反的磁矩。

    Perpendicular magnetic tunnel junction (pMTJ) devices employing a thin pinned layer stack and providing a transitioning start to a body-centered cubic (BCC) crystalline / amorphous structure below an upper anti-parallel (AP) layer
    17.
    发明授权
    Perpendicular magnetic tunnel junction (pMTJ) devices employing a thin pinned layer stack and providing a transitioning start to a body-centered cubic (BCC) crystalline / amorphous structure below an upper anti-parallel (AP) layer 有权
    垂直磁性隧道结(pMTJ)器件采用薄的钉扎层堆叠,并提供了一个向上反向平行(AP)层下方的体心立方(BCC)结晶/非晶结构的转变开始

    公开(公告)号:US09590010B1

    公开(公告)日:2017-03-07

    申请号:US15079634

    申请日:2016-03-24

    Abstract: Perpendicular magnetic tunnel junction (pMTJ) devices employing a pinned layer stack with a thin top anti-parallel (AP2) layer and having a transitioning layer providing a transitioning start to a body-centered cubic (BCC) crystalline/amorphous structure below the top anti-parallel (AP2) layer, to promote a high tunnel magnetoresistance ratio (TMR) with reduced pinned layer thickness are disclosed. A first anti-parallel (AP) ferromagnetic (AP1) layer in a pinned layer has a face-centered cubic (FCC) or hexagonal closed packed (HCP) crystalline structure. A transitioning material (e.g., Iron (Fe)) is provided in a transitioning layer between the AP1 layer and an AFC layer (e.g., Chromium (Cr)) that starts a transition from a FCC or HCP crystalline structure, to a BCC crystalline/amorphous structure. In this manner, a second AP ferromagnetic (AP2) layer disposed on the AFC layer can be provided in a reduced thickness BCC crystalline or amorphous structure to provide a high TMR with a reduced pinned layer thickness.

    Abstract translation: 垂直磁性隧道结(pMTJ)器件采用具有薄顶部反平行(AP2)层的钉扎层叠层,并且具有向顶部抗反射平面(AP2)层下方的体心立方(BCC)结晶/非晶结构提供过渡开始的过渡层 公开了平行(AP2)层,以促进具有减小的钉扎层厚度的高隧道磁阻比(TMR)。 固定层中的第一反平行(AP)铁磁(AP1)层具有面心立方(FCC)或六边形封闭(HCP)晶体结构。 在AP1层和开始从FCC或HCP晶体结构的转变到BCC晶体/晶体的AFC层(例如,铬(Cr))之间的过渡层中提供了转变材料(例如,铁(Fe) 无定形结构。 以这种方式,设置在AFC层上的第二AP铁磁(AP2)层可以以减小的厚度BCC晶体或非晶结构提供,以提供具有减小的钉扎层厚度的高TMR。

Patent Agency Ranking