公开(公告)号：US20220399180A1

公开(公告)日：2022-12-15

申请号：US17841657

申请日：2022-06-15

Applicant: Mochii, Inc. (d/b/a Voxa)

Inventor： Christopher Su-Yan Own

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/22

Abstract: A charged-particle-beam microscope for imaging a sample, the microscope having a stage to hold a sample and an automated sample feeder to repeatedly and automatically exchange the sample from among a plurality of samples. A charged-particle-beam column is provided to direct a charged-particle-beam onto the sample, the charged-particle-beam column. The column includes a charged-particle-beam source to generate an electron beam and charged-particle-beam optics to converge the charged-particle beam onto the sample. A detector is provided to detect charged particles emanating from the sample to generate image data. A controller executes an artificial intelligence algorithm to analyze the image data.

公开(公告)号：US09899186B1

公开(公告)日：2018-02-20

申请号：US15426024

申请日：2017-02-06

Applicant: Mochii, Inc.

Inventor： Christopher Su-Yan Own ,  Matthew Francis Murfitt

IPC: H01J37/28 ,  G01N23/04 ,  C23C14/24 ,  H01J37/18 ,  H01J37/20 ,  H01J37/10 ,  H01J37/244 ,  H01J37/22 ,  C23C14/52 ,  C23C14/54

CPC classification number: H01J37/28 ,  C23C14/24 ,  C23C14/52 ,  C23C14/54 ,  G02B21/002 ,  G02B21/0048 ,  G02B21/008 ,  G02B21/367 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/18 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/0203 ,  H01J2237/2007 ,  H01J2237/28

Abstract: A charged-particle beam microscope is provided for imaging a sample. The microscope has a vacuum chamber to maintain a low-pressure environment. A stage is provided to hold a sample in the vacuum chamber. The microscope has a compact evaporator in the vacuum chamber to evaporate and deposit a coating onto a surface of the sample. The microscope also has a charged-particle beam column is provided to direct a charged-particle beam onto the coating on the surface of the sample. The charged-particle beam column includes a charged-particle beam source to generate a charged-particle beam and charged-particle beam optics to converge the charged-particle beam onto the sample. A detector is provided to detect charged-particle radiation emanating from the coating on the surface of the sample to generate an image. A controller analyzes the detected charged-particle radiation to generate an image of the sample.

公开(公告)号：US09564291B1

公开(公告)日：2017-02-07

申请号：US14742697

申请日：2015-06-17

Applicant: Mochii, Inc.

Inventor： Christopher Su-Yan Own ,  Matthew Francis Murfitt

IPC: G01N23/04 ,  G01N23/22 ,  H01J37/28 ,  G02B21/00 ,  G02B21/36 ,  H01J37/147 ,  H01J37/20

CPC classification number: H01J37/28 ,  C23C14/24 ,  C23C14/52 ,  C23C14/54 ,  G02B21/002 ,  G02B21/0048 ,  G02B21/008 ,  G02B21/367 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/18 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/0203 ,  H01J2237/2007 ,  H01J2237/28

Abstract: A charged-particle beam microscope is provided for imaging a sample. The microscope has a stage to hold a sample and a charged-particle beam column to direct a charged-particle beam onto the sample. The charged-particle beam column includes a charged-particle beam source to generate a charged-particle beam, and charged-particle beam optics to converge the charged-particle beam onto the sample. The microscope also has a light beam column to direct a light beam onto the sample. The light beam column includes a light beam source to generate a light beam, and light-beam optics to converge the light beam onto the sample. One or more detectors are provided to detect charged-particle and light radiation emanating from the sample to generate an image. A controller to analyze the detected charged-particle radiation and detected light radiation to generate an image of the sample.

Abstract translation: 提供带电粒子束显微镜用于对样品进行成像。 显微镜具有载置样品和带电粒子束柱以将带电粒子束引导到样品上的阶段。 带电粒子束柱包括带电粒子束源以产生带电粒子束，并且带电粒子束光学器件将带电粒子束收敛到样品上。 显微镜还具有将光束引导到样品上的光束柱。 光束列包括用于产生光束的光束源和用于将光束会聚到样品上的光束光学器件。 提供一个或多个检测器以检测从样品发出的带电粒子和光辐射以产生图像。 控制器，用于分析检测到的带电粒子辐射和检测到的光辐射以产生样品的图像。

公开(公告)号：US08927932B2

公开(公告)日：2015-01-06

申请号：US14071614

申请日：2013-11-04

Applicant: Mochii, Inc.

Inventor： Christopher Su-Yan Own ,  William Andregg ,  Michael Lee Andregg

IPC: H01J37/26 ,  G01N23/02 ,  G01N13/12 ,  C12Q1/68

CPC classification number: H01J37/261 ,  C12Q1/6869 ,  H01J2237/248 ,  H01J2237/2802 ,  Y10S430/143 ,  C12Q2565/601 ,  C12Q2565/607

Abstract: A scanning transmission electron microscope for imaging a specimen includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A stage is provided to hold a specimen in the path of the electron beam. A beam scanner scans the electron beam across the specimen. A controller may define one or more scanning areas corresponding to locations of the specimen, and control one or more of the beam scanner and stage to selectively scan the electron beam in the scanning areas. A detector is provided to detect electrons transmitted through the specimen to generate an image. The controller may generate a sub-image for each of the scanning areas, and stitch together the sub-images for the scanning areas to generate a stitched-together image. The controller may also analyze the stitched-together image to determine information regarding the specimen.

Abstract translation: 用于对样本进行成像的扫描透射电子显微镜包括产生电子束的电子束源。 光束被提供以会聚电子束。 提供了一个台架以将样本保持在电子束的路径中。 光束扫描器扫描穿过样品的电子束。 控制器可以定义与样本的位置相对应的一个或多个扫描区域，并且控制一个或多个光束扫描器和平台以选择性扫描扫描区域中的电子束。 提供检测器以检测通过样本传输的电子以产生图像。 控制器可以为每个扫描区域生成子图像，并且将扫描区域的子图像拼接在一起以生成拼接图像。 控制器还可以分析缝合在一起的图像以确定关于样本的信息。

公开(公告)号：US08921787B2

公开(公告)日：2014-12-30

申请号：US14258004

申请日：2014-04-21

Applicant: Christopher Su-Yan Own ,  William Andregg ,  Mochii, Inc.

Inventor： Christopher Su-Yan Own ,  Andrew Bleloch ,  William Andregg

IPC: G01N23/02 ,  G01N13/12 ,  H01J37/26

CPC classification number: H01J37/263 ,  H01J37/153 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/2614 ,  H01J2237/262

Abstract: A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may be adapted to generate two or more images that are substantially incoherently related to one another, store the images, and combine amplitude signals at corresponding pixels of the respective images to improve a signal-to-noise ratio. Alternatively or in addition, the transmission electron microscope may be adapted to operate the specimen holder to move the specimen in relation to the beam optics during exposure or between exposures to operate the transmission electron microscope in an incoherent mode.

Abstract translation: 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以适于产生彼此基本上不相干的两个或更多个图像，存储图像，并将各个图像的相应像素处的振幅信号组合以提高信噪比。 或者或另外，透射电子显微镜可以适于操作样本保持器以在曝光期间或在曝光之间相对于光束光学元件移动样本，以以非相干模式操作透射电子显微镜。