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    MULTI-SPOT SCANNING COLLECTION OPTICS
    13.
    发明申请
    MULTI-SPOT SCANNING COLLECTION OPTICS 有权
    多点扫描收集光学

    公开(公告)号：US20150226677A1

    公开(公告)日：2015-08-13

    申请号：US14619004

    申请日：2015-02-10

    Applicant: KLA-Tencor Corporation

    Inventor： Jamie M. Sullivan ,  Ralph Johnson ,  Evegeny Churin ,  Wenjian Cai ,  Yong Mo Moon

    IPC: G01N21/88 ,  G01N21/95 ,  G02B27/42

    CPC classification number: G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/1056 ,  G02B21/0016 ,  G02B21/002 ,  G02B21/0052 ,  G02B21/0092 ,  G02B27/0068 ,  G02B27/4227 ,  G02B27/46

    Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.

    Abstract translation: 公开了用于检查或测量样本的装置和方法。 一种系统包括用于产生和偏转多个入射光束以形成多个斑点的照明通道，其跨越由样本的多个扫描部分组成的分割线扫描。 该系统还包括一个或多个检测通道，用于响应于朝向这种样本的入射光束，感测从样本发出的光，并且在每个入射光束的光点扫描其扫描部分时收集每个扫描部分的检测图像。 一个或多个检测通道包括至少一个纵向侧通道，用于纵向收集每个扫描部分的检测图像，因为每个入射光束的光斑在其扫描部分上扫描。

    System and Method for Apodization in a Semiconductor Device Inspection System
    14.
    发明申请
    System and Method for Apodization in a Semiconductor Device Inspection System 有权
    半导体器件检测系统中的变迹系统和方法

    公开(公告)号：US20140016125A1

    公开(公告)日：2014-01-16

    申请号：US13760829

    申请日：2013-02-06

    Applicant: KLA-Tencor Corporation

    Inventor： Jamie M. Sullivan ,  Gary Janik ,  Steve Cui ,  Rex Runyon ,  Dieter Wilk ,  Steve Short ,  Mikhail Haurylau ,  Qiang Q. Zhang ,  Grace Hsiu-Ling Chen ,  Robert M. Danen ,  Suwipin Martono ,  Shobhit Verma ,  Wenjian Cai ,  Meier Brender

    IPC: G01N21/88 ,  G02B27/58

    CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8825 ,  G02B27/58

    Abstract: An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.

    Abstract translation: 具有可选择变迹的检查系统包括被配置为照亮样品表面的照明源，被配置为检测从样品表面发出的至少一部分光的检测器，所述照明源和检测器通过光学 光学系统的可选择地配置的变迹装置，其中所述变迹装置包括可操作地耦合到一个或多个致动级的一个或多个变迹元件，所述一个或多个致动级被配置成沿着一个或多个方向可选地致动所述一个或多个变迹元件 以及控制系统，其通信地耦合到所述一个或多个致动并被配置为通过控制所述一个或多个变迹元件的致动状态来选择性地控制沿着所述光学路径传输的照明的变迹。

    Systems and Methods for Run-Time Alignment of a Spot Scanning Wafer Inspection System
    17.
    发明申请
    Systems and Methods for Run-Time Alignment of a Spot Scanning Wafer Inspection System 有权
    点扫描晶片检测系统的运行时间对准的系统和方法

    公开(公告)号：US20160313256A1

    公开(公告)日：2016-10-27

    申请号：US15004331

    申请日：2016-01-22

    Applicant: KLA-Tencor Corporation

    Inventor： Jamie M. Sullivan ,  Wenjian Cai ,  Kai Cao

    IPC: G01N21/88 ,  G02F1/33 ,  G02B13/00 ,  G01N21/95

    CPC classification number: G02B13/0095 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2201/106 ,  G01N2201/12

    Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.

    Abstract translation: 具有运行时间对准的点扫描成像系统包括：束扫描装置，其被配置为线性扫描横跨样本的聚焦光束，一个或多个检测器，定位成接收来自样品的光;以及控制器，其通信地耦合到光束扫描装置 ，样品台和一个或多个检测器。 所述控制器被配置为存储第一图像，将一组驱动信号发送到所述波束扫描设备，所述采样台或所述一个或多个检测器中的至少一个，将所述第二采样网格的至少一部分至少比较 第一采样网格的一部分以确定一个或多个偏移误差，并且基于所述一个或多个偏移误差来调整所述驱动信号集合中的至少一个驱动信号，使得所述第二采样网格与所述第一采样网格重叠。

    Enhanced high-speed logarithmic photo-detector for spot scanning system
    18.
    发明授权
    Enhanced high-speed logarithmic photo-detector for spot scanning system 有权
    用于点扫系统的增强型高速对数光电检测器

    公开(公告)号：US09389166B2

    公开(公告)日：2016-07-12

    申请号：US13675687

    申请日：2012-11-13

    Applicant: KLA-Tencor Corporation

    Inventor： Ralph C. Wolf ,  Grace H. Chen ,  Kai Cao ,  Jamie M. Sullivan ,  Paul J. Donders ,  Derek C. Mackay

    IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G01B11/24

    CPC classification number: G01N21/00 ,  G01B11/24 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956

    Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. An incident beam is directed across a plurality of consecutive scan portions of a specimen so that an output beam profile from each scan portion is consecutively collected by a photomultiplier tube (PMT), and the scan portions include at least one or more first scan portions and a next scan portion that is scanned after the one or more first scan portions. After or while the incident beam is directed to the one or more first scan portions of the specimen, an output signal for each first scan portion is obtained based on the output beam profile that is collected by the PMT for each first scan portion. An expected output beam profile for the next scan portion is determined based on the output signal that is obtained for each one or more first scan portions. As the incident beam is directed towards the next scan portion, a gain input to the PMT for the next scan portion is set based on the expected output beam profile so that the gain for such next scan portion results in a measured signal at the PMT that is within a predefined specification of the PMT or other hardware components that receive a measured signal from the PMT.

    Abstract translation: 公开了用于检查或测量样本的装置和方法。 入射光束穿过样本的多个连续的扫描部分，使得来自每个扫描部分的输出光束轮廓由光电倍增管（PMT）连续收集，并且扫描部分包括至少一个或多个第一扫描部分和 在所述一个或多个第一扫描部分之后被扫描的下一个扫描部分。 在入射光束被引导到样本的一个或多个第一扫描部分之后或之后，基于由PMT针对每个第一扫描部分收集的输出光束轮廓，获得每个第一扫描部分的输出信号。 基于对于每个一个或多个第一扫描部分获得的输出信号来确定用于下一扫描部分的预期输出光束轮廓。 当入射光束被引导到下一个扫描部分时，基于预期的输出光束分布来设置输入到下一个扫描部分的PMT的增益，使得这样的下一扫描部分的增益导致PMT处的测量信号， 在接收来自PMT的测量信号的PMT或其他硬件组件的预定义规范内。

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