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公开(公告)号：US09970883B2
公开(公告)日：2018-05-15
申请号：US15399331
申请日：2017-01-05
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
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2.发明申请Interleaved Acousto-Optical Device Scanning For Suppression Of Optical Crosstalk 审中-公开用于抑制光串扰的交错声光装置扫描公开(公告)号：US20160290971A1
公开(公告)日：2016-10-06
申请号：US15184590
申请日：2016-06-16
Applicant: KLA-Tencor Corporation
Inventor： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC: G01N29/24 , G01N21/95 , G01N21/956 , G01N21/88
CPC classification number: G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.
Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 预定间隔可以是扫描长度或整数倍的扫描长度。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。
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公开(公告)号：US20170115232A1
公开(公告)日：2017-04-27
申请号：US15399331
申请日：2017-01-05
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
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Patent Agency Ranking
4.发明授权Interleaved acousto-optical device scanning for suppression of optical crosstalk 有权用于抑制光学串扰的交错声光器件扫描公开(公告)号：US09395340B2
公开(公告)日：2016-07-19
申请号：US13844576
申请日：2013-03-15
Applicant: KLA-Tencor Corporation
Inventor： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC: G01N21/88 , G01N21/95 , G01N29/24 , G01N21/956
CPC classification number: G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.
Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。
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公开(公告)号：US20150226677A1
公开(公告)日：2015-08-13
申请号：US14619004
申请日：2015-02-10
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
Abstract translation: 公开了用于检查或测量样本的装置和方法。 一种系统包括用于产生和偏转多个入射光束以形成多个斑点的照明通道，其跨越由样本的多个扫描部分组成的分割线扫描。 该系统还包括一个或多个检测通道，用于响应于朝向这种样本的入射光束，感测从样本发出的光，并且在每个入射光束的光点扫描其扫描部分时收集每个扫描部分的检测图像。 一个或多个检测通道包括至少一个纵向侧通道，用于纵向收集每个扫描部分的检测图像，因为每个入射光束的光斑在其扫描部分上扫描。
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公开(公告)号：US10060884B2
公开(公告)日：2018-08-28
申请号：US15184590
申请日：2016-06-16
Applicant: KLA-Tencor Corporation
Inventor： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC: G01N21/88 , G01N21/95 , G01N29/24 , G01N21/956
CPC classification number: G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.
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公开(公告)号：US09546962B2
公开(公告)日：2017-01-17
申请号：US14619004
申请日：2015-02-10
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
Abstract translation: 公开了用于检查或测量样本的装置和方法。 一种系统包括用于产生和偏转多个入射光束以形成多个斑点的照明通道，其跨越由样本的多个扫描部分组成的分割线扫描。 该系统还包括一个或多个检测通道，用于响应于朝向这种样本的入射光束，感测从样本发出的光，并且在每个入射光束的光点扫描其扫描部分时收集每个扫描部分的检测图像。 一个或多个检测通道包括至少一个纵向侧通道，用于纵向收集每个扫描部分的检测图像，因为每个入射光束的光斑在其扫描部分上扫描。
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8.发明申请Interleaved Acousto-Optical Device Scanning For Suppression Of Optical Crosstalk 有权用于抑制光串扰的交错声光装置扫描公开(公告)号：US20140260640A1
公开(公告)日：2014-09-18
申请号：US13844576
申请日：2013-03-15
Applicant: KLA-Tencor Corporation
Inventor： Jamie Sullivan , Wenjian Cai , Yevgeniy Churin , Ralph Johnson , Meier Yitzhak Brender , Mark Shi Wang , Rex Runyon , Kai Cao
IPC: G01N29/24
CPC classification number: G01N29/2418 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2291/2697
Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.
Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。
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