公开(公告)号：US20140260640A1

公开(公告)日：2014-09-18

申请号：US13844576

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N29/24

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US09395340B2

公开(公告)日：2016-07-19

申请号：US13844576

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US10060884B2

公开(公告)日：2018-08-28

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

公开(公告)号：US20160290971A1

公开(公告)日：2016-10-06

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N29/24 ,  G01N21/95 ,  G01N21/956 ,  G01N21/88

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 预定间隔可以是扫描长度或整数倍的扫描长度。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。