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公开(公告)号：US09970883B2
公开(公告)日：2018-05-15
申请号：US15399331
申请日：2017-01-05
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
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公开(公告)号：US09546962B2
公开(公告)日：2017-01-17
申请号：US14619004
申请日：2015-02-10
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
Abstract translation: 公开了用于检查或测量样本的装置和方法。 一种系统包括用于产生和偏转多个入射光束以形成多个斑点的照明通道，其跨越由样本的多个扫描部分组成的分割线扫描。 该系统还包括一个或多个检测通道，用于响应于朝向这种样本的入射光束，感测从样本发出的光，并且在每个入射光束的光点扫描其扫描部分时收集每个扫描部分的检测图像。 一个或多个检测通道包括至少一个纵向侧通道，用于纵向收集每个扫描部分的检测图像，因为每个入射光束的光斑在其扫描部分上扫描。
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公开(公告)号：US20170115232A1
公开(公告)日：2017-04-27
申请号：US15399331
申请日：2017-01-05
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
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公开(公告)号：US20150226677A1
公开(公告)日：2015-08-13
申请号：US14619004
申请日：2015-02-10
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Ralph Johnson , Evegeny Churin , Wenjian Cai , Yong Mo Moon
CPC classification number: G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N2201/06113 , G01N2201/1056 , G02B21/0016 , G02B21/002 , G02B21/0052 , G02B21/0092 , G02B27/0068 , G02B27/4227 , G02B27/46
Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.
Abstract translation: 公开了用于检查或测量样本的装置和方法。 一种系统包括用于产生和偏转多个入射光束以形成多个斑点的照明通道，其跨越由样本的多个扫描部分组成的分割线扫描。 该系统还包括一个或多个检测通道，用于响应于朝向这种样本的入射光束，感测从样本发出的光，并且在每个入射光束的光点扫描其扫描部分时收集每个扫描部分的检测图像。 一个或多个检测通道包括至少一个纵向侧通道，用于纵向收集每个扫描部分的检测图像，因为每个入射光束的光斑在其扫描部分上扫描。
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