公开(公告)号：US20130241091A1

公开(公告)日：2013-09-19

申请号：US13840117

申请日：2013-03-15

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin MAN

IPC: H01J37/26

CPC classification number: H01J37/261 ,  H01J37/265 ,  H01J37/2955 ,  H01J2237/31745

Abstract: Provided is an apparatus for preparing a sample including: a sample stage that supports a sample; a focused ion beam column that applies a focused ion beam to the same sample and processes the sample; and an irradiation area setting unit that sets a focused-ion-beam irradiation area including a first irradiation area used to form an observation field irradiated with an electron beam in order to detect backscattered electrons and a second irradiation area used to form a tilted surface tilted with respect to the normal line of the observation field with an angle of 67.5° or more and less than 90°.

Abstract translation: 提供了一种用于制备样品的装置，包括：样品台，其支撑样品; 聚焦离子束柱，将聚焦离子束施加到相同的样品并处理样品; 以及照射区域设定单元，其设定包含用于形成用电子束照射的观察场的第一照射区域的聚焦离子束照射区域，以便检测反向散射的电子，以及用于形成倾斜面的第二照射区域 相对于观察场的法线，角度为67.5°以上且小于90°。

公开(公告)号：US20170278668A1

公开(公告)日：2017-09-28

申请号：US15465925

申请日：2017-03-22

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin MAN ,  Atsushi UEMOTO

IPC: H01J37/22 ,  H01J37/244 ,  G02B21/36 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/222 ,  G02B21/361 ,  H01J37/244 ,  H01J37/28 ,  H01J37/30 ,  H01J37/3178 ,  H01J2237/221 ,  H01J2237/226

Abstract: Disclosed herein is a method for cross-section processing and observation, and apparatus therefore, the method including: performing a position information obtaining process of observing the entirety of a sample by using an optical microscope or an electron microscope, and of obtaining three-dimensional position coordinate information of a particular observation target object included in the sample; performing a cross-section processing process of irradiating a particular region in which the object is present by using a focused ion beam based on the information, and of exposing a cross section of the region; performing a cross-section image obtaining process of irradiating the cross section by using an electron beam, and of obtaining a cross-section image of a predetermined size region including the object; and performing a three-dimensional image obtaining process of repeating the cross-section processing process and the cross-section image obtaining process at predetermined intervals in a predetermined direction, and of obtaining a three-dimensional image from obtained multiple cross-section images.

公开(公告)号：US20150206702A1

公开(公告)日：2015-07-23

申请号：US14601497

申请日：2015-01-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi UEMOTO ,  Xin MAN ,  Tatsuya ASAHATA

IPC: H01J37/147 ,  H01J37/26

CPC classification number: H01J37/265 ,  H01J2237/15 ,  H01J2237/30483

Abstract: A cross-section processing observation apparatus includes an ion beam control unit for controlling a charged particle beam generation-focusing portion and a deflector and including a DAC which converts an input digital signal into an analog signal which is to be input to the deflector, and a field-of-view setting portion for setting a value of a field of view of a charged particle beam where the scanning performed by the deflector is performed on the basis of a set value of a slice amount.

Abstract translation: 横截面处理观察装置包括：离子束控制单元，用于控制带电粒子束产生聚焦部分和偏转器，并且包括将输入数字信号转换为要被输入到偏转器的模拟信号的DAC;以及 视场设定部，其基于切片量的设定值来设定由偏转器执行的扫描的带电粒子束的视场的值。

公开(公告)号：US20150060668A1

公开(公告)日：2015-03-05

申请号：US14470135

申请日：2014-08-27

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin MAN ,  Tatsuya ASAHATA ,  Atsushi UEMOTO

IPC: H01J37/317 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/317 ,  H01J37/244 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/08 ,  H01J2237/24475 ,  H01J2237/2802 ,  H01J2237/31749

Abstract: A charged particle beam apparatus for processing a tip end portion of a sample into a needle shape, includes an ion beam irradiation unit that irradiates the tip end portion with ion beams, an electron beam irradiation unit that irradiates the tip end portion with electron beams, a secondary electron detection unit that detects secondary electrons generated at the tip end portion by the irradiation with the electron beams, and an EBSD detection unit that detects diffracted electrons generated at the tip end portion by the irradiation with the electron beams.

Abstract translation: 一种用于将样品的尖端处理成针状的带电粒子束装置包括：用离子束照射前端部的离子束照射单元，用电子束照射前端部的电子束照射单元， 二次电子检测单元，其通过照射电子束来检测在前端部分产生的二次电子;以及EBSD检测单元，其通过用电子束的照射检测在前端部分产生的衍射电子。

公开(公告)号：US20140291508A1

公开(公告)日：2014-10-02

申请号：US14224164

申请日：2014-03-25

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi UEMOTO ,  Xin MAN ,  Tatsuya ASAHATA

IPC: H01J37/04

CPC classification number: H01J37/28 ,  G01N23/2255 ,  G01N2223/045 ,  H01J37/222 ,  H01J2237/226 ,  H01J2237/24585 ,  H01J2237/2804 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: A focused ion beam apparatus including: a focused ion beam irradiation mechanism forming first and second cross-sections; a first image generation unit generating a first image, including a reflected electron image or a secondary electron image, of the first and second cross-sections; a second image generation unit generating a second image, including an EDS image or a secondary ion image, of the first and second cross-sections; and a control section causing the second image generation unit to generate the second image of the second cross-section, in a case where the first and second images of the first cross-section are acquired, the first image of the second cross-section is acquired, and the first image of the second cross-section includes a region different from a region representing a specific composition in the first image of the first cross-section.

Abstract translation: 一种聚焦离子束装置，包括：形成第一和第二横截面的聚焦离子束照射机构; 产生包括第一和第二横截面的反射电子图像或二次电子图像的第一图像的第一图像生成单元; 产生包括第一和第二横截面的EDS图像或二次离子图像的第二图像的第二图像生成单元; 以及控制部，其使得所述第二图像生成部生成所述第二横截面的第二图像，在获取所述第一横截面的所述第一图像和所述第二图像的情况下，所述第二横截面的所述第一图像为 并且第二横截面的第一图像包括与表示第一横截面的第一图像中的特定构图的区域不同的区域。

公开(公告)号：US20140131575A1

公开(公告)日：2014-05-15

申请号：US14078852

申请日：2013-11-13

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi UEMOTO ,  Xin MAN ,  Tatsuya ASAHATA

IPC: H01J37/28

CPC classification number: H01J37/265 ,  G01N1/32 ,  G01N23/04 ,  G01N23/2208 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/2255 ,  G01T1/36 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3045 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2807 ,  H01J2237/2812 ,  H01J2237/30472 ,  H01J2237/30483 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A cross-section processing and observation method performed by a cross-section processing and observation apparatus, the method comprising: a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections, wherein, in a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.

Abstract translation: 一种横截面加工和观察装置的横截面处理和观察方法，该方法包括：横截面处理步骤，用离子束照射样品形成横截面; 横截面观察步骤，通过用电子束照射横截面来获得横截面的观察图像; 并且重复横截面处理步骤和横截面观察步骤以获得多个横截面的观察图像，其中，在横截面的能量分散X射线光谱（EDS）测量的情况下 并且检测到特定材料的X射线，改变离子束的照射条件以获得指定材料的多个横截面的观察图像，并且对横截面加工和观察 执行指定的材料。

公开(公告)号：US20250140518A1

公开(公告)日：2025-05-01

申请号：US18692790

申请日：2021-09-28

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiyuki NAGAMINE ,  Atsushi UEMOTO ,  Tatsuya ASAHATA ,  Xin MAN

IPC: H01J37/304 ,  H01J37/26 ,  H01J37/30 ,  H01J37/305

Abstract: This machining method includes: a machining step of irradiating a sample constituted from a stack of multiple layers with a focused ion beam so as to machine a cross-section of the sample by a predetermined amount; an image generation step of generating an observation image of the cross-section of the sample by irradiating the sample with an electron beam after the machining step is ended; and a specific-layer determination step of determining whether a specific layer of the multiple layers is exposed based on the observation image.

公开(公告)号：US20240379323A1

公开(公告)日：2024-11-14

申请号：US18692789

申请日：2021-09-28

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiyuki NAGAMINE ,  Atsushi UEMOTO ,  Tatsuya ASAHATA ,  Xin MAN

IPC: H01J37/22 ,  H01J37/26

Abstract: The present invention provides a control method for a charged particle beam device for irradiating a sample in which a plurality of layers is laminated with a focused ion beam to process a cross-section of the sample at a processing angle that is a prescribed angle. The control method includes: an image generation step for irradiating the sample with an electron beam, detecting secondary electrons or reflected electrons generated from the sample, and generating an observation image of a cross-section of the sample based on results of detection; an angle deviation calculation step for calculating the angle deviation between the angle of the cross-section and the processing angle based on the observation image; and a control step for controlling orientation of the sample or a direction of radiation with the electron beam so as to eliminate the angle deviation calculated in the angle deviation calculation step.

公开(公告)号：US20210293668A1

公开(公告)日：2021-09-23

申请号：US17202761

申请日：2021-03-16

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin MAN ,  Tatsuya ASAHATA

IPC: G01N1/28 ,  G01N23/2251 ,  G01N1/30

Abstract: A method for observing a biological tissue sample includes: forming a sample block; cutting up the sample block into a plurality of sample pieces and fixing each of the sample pieces to a sample piece placement member to form a plurality of observation samples; specifying an observation target area for performing precise observation; specifying and registering a coordinate of the observation target area on the sample piece for each of the observation samples; milling including irradiating the observation target area of the sample piece with an ion beam using gas as an ion source or a neutral particle beam with reference to the coordinate and exposing an observation surface inside the sample piece; and obtaining a SEM image of the observation surface with a scanning electron microscope.

公开(公告)号：US20160343541A1

公开(公告)日：2016-11-24

申请号：US15162133

申请日：2016-05-23

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin MAN ,  Tatsuya ASAHATA ,  Atsushi UEMOTO

IPC: H01J37/22 ,  H01J37/29 ,  H01J37/305

CPC classification number: H01J37/222 ,  G01N1/32 ,  G01N23/20091 ,  G01N23/2202 ,  G01N23/2251 ,  G01N2223/418 ,  H01J37/28 ,  H01J37/292 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/2811 ,  H01J2237/31749

Abstract: A cross-section processing-and-observation method includes: a cross-section exposure step of irradiating a sample with a focused ion beam to expose a cross-section of the sample; a cross-sectional image acquisition step of irradiating the cross-section with an electron beam to acquire a cross-sectional image of the cross-section; and a step of repeatedly performing the cross-section exposure step and the cross-sectional image acquisition step along a predetermined direction of the sample at a setting interval to acquire a plurality of cross-sectional images of the sample. In the cross-sectional image acquisition step, a cross-sectional image is acquired under different condition settings for a plurality of regions of the cross-section.