公开(公告)号：US08729466B1

公开(公告)日：2014-05-20

申请号：US13804066

申请日：2013-03-14

Applicant: Marian Mankos

Inventor： Marian Mankos

IPC: H01J37/05 ,  G01N23/225 ,  H01J37/29 ,  H01J37/153

CPC classification number: H01J37/026 ,  H01J37/04 ,  H01J37/285 ,  H01J37/29 ,  H01J2237/0042 ,  H01J2237/0044 ,  H01J2237/0492 ,  H01J2237/05 ,  H01J2237/1534 ,  H01J2237/2538

Abstract: One embodiment relates to an apparatus for correcting aberrations introduced when an electron lens forms an image of a specimen and simultaneously forming an electron image using electrons with a narrow range of electron energies from an electron beam with a wide range of energies. A first electron beam source is configured to generate a lower energy electron beam, and a second electron beam source is configured to generate a higher energy electron beam. The higher energy beam is passed through a monochromator comprising an energy-dispersive beam separator, an electron mirror and a knife-edge plate that removes both the high and low energy tail from the propagating beam. Both the lower and higher energy electron beams are deflected by an energy-dispersive beam separator towards the specimen and form overlapping illuminating electron beams. An objective lens accelerates the electrons emitted or scattered by the sample. The electron beam leaving the specimen is deflected towards a first electron mirror by an energy-dispersive beam separator, which introduces an angular dispersion that disperses the electron beam according to its energy. A knife-edge plate, located between the beam separator and first electron mirror, is inserted that removes all of the beam with energy larger and smaller than a selected energy and filters the beam according to energy. One or more electron lenses focus the electron beam at the reflection surface of the first electron mirror so that after the reflection and another deflection by the same energy-dispersive beam separator the electron beam dispersion is removed. The dispersion-free and energy-filtered electron beam is then reflected in a second electron mirror which corrects one or more aberrations of the objective lens. After the second reflection, electrons are deflected by the magnetic beam separator towards the projection optics which forms a magnified, aberration-corrected, energy-filtered image on a viewing screen.

公开(公告)号：US20140124666A1

公开(公告)日：2014-05-08

申请号：US14126792

申请日：2012-04-16

Applicant: Yuko Sasaki ,  Hiroyuki Ito

Inventor： Yuko Sasaki ,  Hiroyuki Ito

IPC: H01J37/05 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.

Abstract translation: 提供了一种用于改善其能量过滤器的能量解决方案的带电粒子束装置。 在一个实施例中，带电粒子束装置包括偏转器，用于将从样品发射的带电粒子偏转到能量滤波器，并且针对多个偏转中的每一个发现随施加到能量滤波器的电压变化而引起的亮度值的变化 偏转器的条件以及使得亮度值的变化满足预定条件的偏转条件被设定为偏转器的偏转状态。

公开(公告)号：US20130292568A1

公开(公告)日：2013-11-07

申请号：US13993829

申请日：2011-12-05

Applicant: Daisuke Bizen ,  Hiroshi Makino ,  Junichi Tanaka ,  Makoto Ezumi

Inventor： Daisuke Bizen ,  Hiroshi Makino ,  Junichi Tanaka ,  Makoto Ezumi

IPC: H01J37/05 ,  H01J37/10

CPC classification number: H01J37/05 ,  G01B15/00 ,  H01J37/10 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/24485

Abstract: This electron scanning microscope comprises an electron source (102), electron optical systems (109, 110, 111) for exposing a sample (113) to primary electron beams (138), an electron detector (127) for detecting signal electrons (139) emitted from the sample, and a deceleration electrical field-type energy filter (108). The deceleration electrical field-type energy filter has a conductor thin film (304) for distinguishing the energy of signal electrons. With this configuration, it is possible to realize a scanning electron microscope having a deceleration electrical field-type energy filter with which high energy resolution is obtained, even in a case where the scanning electron microscope has a retarding optical system.

Abstract translation: 该电子扫描显微镜包括用于将样品（113）暴露于一次电子束（138）的电子源（102），用于检测信号电子（139）的电子检测器（127）的电子光学系统（109,110,111） 从所述样品发射的减速电场型能量过滤器（108）。 减速电场型能量滤波器具有用于区分信号电子能量的导体薄膜（304）。 利用这种结构，即使在扫描电子显微镜具有延迟光学系统的情况下，也可以实现具有能够获得高能量分辨率的减速电场型能量过滤器的扫描电子显微镜。

公开(公告)号：US20130206987A1

公开(公告)日：2013-08-15

申请号：US13757939

申请日：2013-02-04

Applicant: JEOL LTD.

Inventor： Kazuya Omoto

IPC: H01J37/10 ,  H01J37/153 ,  H01J37/05

CPC classification number: H01J37/10 ,  H01J37/04 ,  H01J37/05 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/057 ,  H01J2237/1532

Abstract: A transmission electron microscope (100) includes an electron beam source (2), an illumination lens (10), an objective lens (20), an intermediate lens system (30), a pair of transfer lenses (40) located behind the intermediate lens system (30), and an energy filter (60) for separating the electrons of the beam L transmitted through the specimen (S) according to energy. The transfer lenses (40) transfer the first image to the entrance crossover plane (S1) of the energy filter (60) and to transfer the second image to the entrance image plane (A1) of the filter (60). An image plane (A3) is formed between the first transfer lens (40a) and the second transfer lens (40b).

Abstract translation: 透射电子显微镜（100）包括电子束源（2），照明透镜（10），物镜（20），中间透镜系统（30），位于中间的后面的一对转印透镜 透镜系统（30）和能量过滤器（60），用于根据能量分离透过样本（S）的光束L的电子。 传送透镜（40）将第一图像传送到能量过滤器（60）的入口交叉平面（S1），并将第二图像传送到过滤器（60）的入射图像平面（A1）。 在第一转印透镜（40a）和第二转印透镜（40b）之间形成像平面（A3）。

公开(公告)号：US08008618B2

公开(公告)日：2011-08-30

申请号：US12480829

申请日：2009-06-09

Applicant: Frank Londry

Inventor： Frank Londry

IPC: H01J37/05 ,  H01J49/26

CPC classification number: H01J49/421

Abstract: A mass spectrometer having an elongated rod set, the rod set having a first end, a second end, a plurality of rods and a central longitudinal axis is described as is a method operating same. Embodiments involve a) admitting ions into the rod set; b) producing an RF field between the plurality of rods to radially confine the ions in the rod set, wherein the RF field varies along at least a portion of a length of the rod set to provide, for each of the ions, a corresponding first axial force acting on the ion to push the ion in a first axial direction; and, c) for each of the ions, providing a corresponding second axial force to push the ion in a second axial direction opposite to the first axial direction; wherein the corresponding first axial force increases relative to the corresponding second axial force with radial displacement of the ion from the central longitudinal axis in any direction orthogonal to the central longitudinal axis such that the first corresponding axial force is less than the corresponding second axial force when the ion is less than a threshold radial distance from the central longitudinal axis and the corresponding first axial force exceeds the corresponding second axial force when the ion is radially displaced from the central longitudinal axis by more than the threshold radial distance in any direction orthogonal to the central longitudinal axis.

Abstract translation: 具有细长杆组的质谱仪是具有第一端，第二端，多个杆和中心纵向轴线的杆组件，其操作方法也被描述。 实施方案包括：a）将离子进入棒组; b）在所述多个杆之间产生RF场以径向地将所述离子限制在所述杆组中，其中所述RF场沿所述杆组的长度的至少一部分变化，以为每个所述离子提供对应的第一 作用在离子上的轴向力在第一轴向推动离子; 和c）对于每个离子，提供相应的第二轴向力以在与第一轴向方向相反的第二轴向方向上推动离子; 其中对应的第一轴向力相对于相应的第二轴向力增加，所述离子在与中心纵向轴线正交的任何方向上从中心纵向轴线径向移位，使得第一对应的轴向力小于相应的第二轴向力， 该离子小于距中心纵向轴线的阈值径向距离，并且当离子从中心纵向轴线径向偏移多于垂直于该中心纵向轴线的任何方向上的阈值径向距离时，相应的第一轴向力超过相应的第二轴向力 中心纵轴。

公开(公告)号：US07755042B1

公开(公告)日：2010-07-13

申请号：US12124407

申请日：2008-05-21

Applicant: Gabor D. Toth ,  Rudy F. Garcia ,  Chris Huang ,  Niles Kenneth MacDonald ,  Mehran Nasser-Ghodsi ,  Garrett Pickard ,  Khashayar Shadman ,  Wo-Tak Wu ,  Ming Yu

Inventor： Gabor D. Toth ,  Rudy F. Garcia ,  Chris Huang ,  Niles Kenneth MacDonald ,  Mehran Nasser-Ghodsi ,  Garrett Pickard ,  Khashayar Shadman ,  Wo-Tak Wu ,  Ming Yu

IPC: H01J37/05

CPC classification number: H01J37/05 ,  G01N23/2276 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/2511 ,  H01J2237/2801

Abstract: A scanning electron beam apparatus with an Auger spectrometer. The apparatus includes at least an electron column for generating a primary electron beam, a magnetic objective lens configured to focus the primary electron beam onto a surface of a target substrate, and a spectrometer configured to detect Auger electrons emitted from the surface of the target substrate. The magnetic objective lens applies a magnetic field strength greater than 10 Gauss and less than 50 Gauss at the surface of the target substrate. Other embodiments, aspects and features are also disclosed.

Abstract translation: 具有俄歇光谱仪的扫描电子束装置。 该装置至少包括用于产生一次电子束的电子柱，被配置为将一次电子束聚焦到目标衬底的表面上的磁性物镜，以及配置成检测从靶衬底的表面发射的俄歇电子的光谱仪 。 磁性物镜在目标衬底的表面施加大于10高斯的磁场强度和小于50高斯。 还公开了其它实施例，方面和特征。

公开(公告)号：US20070200062A1

公开(公告)日：2007-08-30

申请号：US11364298

申请日：2006-02-28

Applicant: Rudolf Tromp

Inventor： Rudolf Tromp

IPC: H01J37/05 ,  H01J49/46 ,  H01J37/26 ,  G01N23/225 ,  G01N23/227

CPC classification number: H01J37/05 ,  H01J37/252 ,  H01J2237/0458 ,  H01J2237/057 ,  H01J2237/2538 ,  H01J2237/2544

Abstract: An energy filtering microscopy instrument is provided. An objective lens is disposed for reception of electrons in order to form an electron diffraction pattern in a backfocal plane of the objective lens. An entrance aperture disposed in the backfocal plane of the objective lens for filtering a slice of the electron diffraction pattern. A magnetic deflector has an entrance plane and an exit plane. The entrance aperture is disposed in the entrance plane. The magnetic deflector is disposed to receive the slice of the electron diffraction pattern and project an energy dispersed electron diffraction pattern to the exit plane. An exit aperture is disposed in the exit plane of the magnetic deflector for selection of desired electron energy of the energy dispersed electron diffraction pattern.

Abstract translation: 提供能量过滤显微镜仪器。 为了在物镜的背面平面中形成电子衍射图案，设置物镜接收电子。 设置在物镜的背面平面中的入口孔，用于过滤电子衍射图案的切片。 导磁板具有入射面和出射面。 入口孔设置在入口平面中。 磁偏转器被设置为接收电子衍射图案的切片并将能量分散的电子衍射图案投射到出射平面。 出口孔布置在磁偏转器的出射平面中，用于选择能量分散的电子衍射图案的期望的电子能量。

公开(公告)号：US20060022147A1

公开(公告)日：2006-02-02

申请号：US10902939

申请日：2004-08-02

Applicant: Shian-Jyh Lin ,  Yuan-Song Tai

Inventor： Shian-Jyh Lin ,  Yuan-Song Tai

IPC: H01J37/05

CPC classification number: H01J37/3171 ,  H01J2237/053 ,  H01J2237/24405 ,  H01J2237/30433

Abstract: The present invention discloses a method and a device of monitoring an ion beam energy distribution by applying various voltages onto a conductive plate having an opening to generate various electric fields on the path passed by the ion beam so as to control the ion beam passing through said opening, and measuring the current created by the passing ion beam. The obtained relation between the applied voltages and the ion beam current therefore indicates the energy distribution of said ion beam. Furthermore, a step of adjusting the ion beam parameters in accordance with the measured relation between the voltages and current mentioned above can be performed, and the monitoring and adjusting steps can be repeated until the expected ion beam energy distribution is obtained, so that the purity/accuracy of the ion beam energy is improved.

Abstract translation: 本发明公开了一种通过在具有开口的导电板上施加各种电压来监测离子束能量分布的方法和装置，以在通过离子束的路径上产生各种电场，从而控制离子束通过所述离子束的能量分布 打开并测量由离子束产生的电流。 因此，所施加的电压和离子束电流之间的所得关系表示所述离子束的能量分布。 此外，可以执行根据上述电压和电流之间的测量关系来调节离子束参数的步骤，并且可以重复监视和调整步骤直到获得预期的离子束能量分布，使得纯度 /离子束能量的精度提高。

公开(公告)号：US06967328B2

公开(公告)日：2005-11-22

申请号：US10614825

申请日：2003-07-09

Applicant: Oliver Kienzle ,  Rainer Knippelmeyer ,  Ingo Müller

Inventor： Oliver Kienzle ,  Rainer Knippelmeyer ,  Ingo Müller

IPC: H01L21/66 ,  G01N23/00 ,  G01N23/225 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q30/04 ,  G21K7/00 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J37/29

CPC classification number: H01J37/28 ,  H01J2237/2817

Abstract: A method for the electron-microscopic observation of a semiconductor arrangement is provided. It includes providing an electron microscopy optics for imaging secondary electrons emanating from the semiconductor arrangement within an extended object field on a position-sensitive detector, providing an illumination device for emitting a primary energy beam, directing the primary energy beam to at least the object field for extracting there secondary electrons from the semiconductor arrangement. The semiconductor arrangement comprises a region with an upper surface provided by a first material and a recess with a high aspect ratio which is surrounded by the upper surface and has a bottom provided by a second material.

Abstract translation: 提供了一种用于电子显微镜观察半导体装置的方法。 它包括提供电子显微镜光学器件，用于对在位置敏感检测器上的扩展物体场内的半导体布置发射的二次电子进行成像，提供用于发射一次能量束的照明装置，将一次能量束引导至少一个物场 用于从半导体装置中提取二次电子。 半导体装置包括具有由第一材料提供的上表面的区域和具有高纵横比的凹槽，其被上表面包围并具有由第二材料提供的底部。

公开(公告)号：US06956225B1

公开(公告)日：2005-10-18

申请号：US10815586

申请日：2004-04-01

Applicant: Victor M. Benveniste

Inventor： Victor M. Benveniste

IPC: H01J37/05 ,  H01J37/317

CPC classification number: H01J37/05 ,  H01J37/3171

Abstract: Ion implantation systems are provided, comprising a dispersion system located between an ion source and a mass analyzer, that operates to selectively pass an extracted ion beam from the ion source toward the mass analyzer or to direct a dispersed ion beam toward the mass analyzer, where the dispersed ion beam has fewer ions of an undesired mass range than the extracted ion beam.

Abstract translation: 提供离子注入系统，其包括位于离子源和质量分析器之间的分散系统，其操作以选择性地将离子源从离子源向质量分析器传递，或者将分散的离子束引导到质量分析器，其中 分散的离子束具有比提取的离子束更少的不期望质量范围的离子。